中国科学院机构知识库网格系统: 检索

Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography 期刊论文 OAI收割
OPTIK, 2014, 卷号: 125, 期号: 22, 页码: 6775-6777
作者: Li, Jinlong; Hu, Song; Zhao, Lixin

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Focal plane PGFM Focus control Lithography

Data normalization of single camera visual measurement network system (EI CONFERENCE) 会议论文 OAI收割
2012 International Conference on Information Technology and Management Innovation, ICITMI 2012, November 10, 2012 - November 11, 2012, Guangzhou, China
作者: Zhang Y.-C.; Zhou J.

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With the development of visual measurement system Normalize the measured coordinates into the same world coordinate system Apply in the three coordinate measuring machine(CMM) to have the simulation experiment So the data normalization has the advantage of more high precision. (2013) Trans Tech Publications the visual measurement system of single camera which applied in the imaging theory of optical feature points then get the global data the result indicates that the maximum absolute tolerance between the normalization coordinates via the center of point set and the ones measured by CMM directly is 0.058mm Switzerland. it has been widespread used in the modern production. Due to the limit of the environment in scene and achieve the overall measurement the visual measurement system of single camera could not measure the shield between the measured objects each other. Focus on this problem But the one between the coordinate repeatedly measured at the position of one network control point is 0.066mm present a kind of the the knowledge of measurement network based on the visual measurement of single camera set up the measurement network system via the multi-control points. Measure the optical feature points in every network control point via the visual measurement system of single camera

Recent development of passive dynamic walking (EI CONFERENCE) 会议论文 OAI收割
2011 International Conference on Energy, Environment and Sustainable Development, ICEESD 2011, October 21, 2011 - October 23, 2011, Shanghai, China
作者: Zhang P.

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The focus of this paper is a review on the recent development of passive dynamic walking. Passive dynamic walkers are introduced from the simple rimless wheel to the recently developed real two legged machines. Control strategies necessary to improve the stability and robustness of locomotion of passive dynamic walkers such as the hybrid geometric approach and the virtual constraints are discussed briefly. Finally the unresolved problems in the field of passive dynamic walking are summarized and directions of further developments are discussed. (2012) Trans Tech Publications Switzerland.

Design and analysis of auto-focus assembly for spaceborne remote sensing camera (EI CONFERENCE) 会议论文 OAI收割
2011 International Conference on Electronics, Communications and Control, ICECC 2011, September 9, 2011 - September 11, 2011, Ningbo, China
作者: Chen W.; Gao X.

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Spaceborne remote sensing camera may be out of focus when the environment and photographic distance changes. In order to get higher ground sampled distance for the camera based on the experience gained from the development of a remote sensing camera working principle of auto-focus assembly control system was discussed. Time of waveform extraction was reduced. It sets force an auto-focus assembly that uses cam and line guide rail in order to move the lens group. The motion error of the auto-focus assembly was difficult to be eliminated and would affect on the focusing accuracy of the spaceborne remote sensing camera directly. So it was analyzed at both ends of the focusing structure. The CCD detector can keep stable when the remote sensing camera is imaging. The motion error was tested to verify the validity of the simulation result and it is less than 0.01mm. Its accuracy meets using demand. The focusing method of moving focal plane is suitable for spaceborne remote sensing camera. 2011 IEEE.

United steering of control moment gyros for small satellite with limited gimbal rate (EI CONFERENCE) 会议论文 OAI收割
2010 IEEE International Conference on Information and Automation, ICIA 2010, June 20, 2010 - June 23, 2010, Harbin, Heilongjiang, China
Xu K.; Jin G.; Chen C.

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Single Gimbal Control Moment Gyroscopes (SGCMG) can could provide large control torque and quick attitude maneuver rate to small satellites without any increase in power volume and mass which will help small satellites become more powerful. Singularity avoidance and failure steering are two important problems to SGCMGs and also the main focus in this field. A new united steering law for SGCMGs with capabilities of singularity avoidance and quick transition of singularity surfaces is developed in this paper. To ensuring the existence of null motion the commanded output of controller was changed real-timely as the variation of singularity measurement of SGCMGs which can avoid the gimbal angle rate saturation. This developed steering law could help the SGCMGs provide real-time control toques in spite of limitation of gimbal angle rate. Simulation analysis is conducted for a certain 4-SGCMG system mounted on a small satellite. Simulation results indicate that the steering law is very effective in singularity avoidance. 2010 IEEE.

Research of computer control system for laser warning HWIL simulation (EI CONFERENCE) 会议论文 OAI收割
2010 3rd International Conference on Advanced Computer Theory and Engineering, ICACTE 2010, August 20, 2010 - August 22, 2010, Chengdu, China
作者: Wang J.-J.

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A computer control system is proposed which is based on hardware-in-loop(HWIL) simulation test system. As an important sub-system in simulation test system the reality is the focus of the simulation system. The construction of the computer control system for laser warning based on HLA Distributed Simulation. By combining the outer clock and time stamp for data frame data interaction is triggered by outer clock the simulation process is propelled. The simulation terminal devices are also controlled by the outer clock. The simulation test is done by the above method. The result shows that the data interaction time less than lms and it meet the need of reality for control so it is effective. 2010 IEEE.

Energy-saving scheduling strategy for elevator group control system based on ant colony optimization (EI CONFERENCE) 会议论文 OAI收割
2010 IEEE Youth Conference on Information, Computing and Telecommunications, YC-ICT 2010, November 28, 2010 - November 30, 2010, Beijing, China
作者: Zhang J.-L.; Li J.-F.

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Elevator group control scheduling is to dispatch every elevator to serve call requests from different floors based on some certain goal. It's a kind of typical combinatorial optimization problems. Ant colony algorithm is good at solving the discrete combinatorial optimization its well global optimization ability and quick convergence velocity are both necessary to a scheduling algorithm. Moreover reducing passengers' waiting and traveling time is the main focus of current dispatching algorithms neglecting the energy consumed by the elevator system. So it's necessary to research on energy-saving algorithms. For the purpose of elevator group's energy-conservation run the objective function of energy is built ant colony model for elevator group control system is created its optimization mechanism is figured out and convergence of the algorithm is studied in this paper. Simulation results show the effectiveness of the strategy. 2010 IEEE.

The effect on tolerance distributing of an off-axis three mirror anastigmatic optical system with wavefront coding technology (EI CONFERENCE) 会议论文 OAI收割
Optical System Alignment and Tolerancing II, August 10, 2008 - August 11, 2008, San Diego, CA, United states
作者: Yan F.; Zhang X.-J.; Yan F.

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The wavefront coding technology is known as a system-level technology which can extend the depth of focus of optical system by innovative optical design and image restoration. This technology can control misfocus related aberrations including misfocus astigmatism and Petzval curvature temperature-related misfocus in digital imaging systems. It can also help optical system tolerate more residual error in optical manufacturing and alignment besides misfocus. The brief introduction of wavefront coding technology and the wavefront coded TMA system under research is presented respectively in part 1 and part 2. The "MTF similarity" is defined to describe the relationship among MTF at different position or different fields in the third part. It is also shown in this part that the MTF similarity of wavefront coded system is much higher than the normal system within a large range. In part 4 comparison between the origin system and the new system with wavefront coding technology is provided after multiple errors are introduced from which it can be observed that the system with wavefront coding technology can tolerate much bigger error than origin system. The error tolerance is re-distributed according to a new criterion based on MTF similarity. If the MTF similarity is less than a certain value it can be regarded that the system can tolerate the residual error. The new error tolerance is displayed and it is shown that the wavefront coding technology can also loosen the error distributing besides extended the depth of focus.

Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE) 会议论文 OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
作者: Zhao J.-L.; Feng X.-G.

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Comparing with the writing method of plane pattern spherical pattern' has some remarkable different on several points. Firstly it is difficult to spin-coated a uniform photoresist film on a spherical substrate especially the ratio of spherical radius to caliber is smaller and the spin-coated way must match the ratio of spherical radius to caliber. Secondly if the sphere couldn't be regarded as a plane a so-called concentric optical scan movement way must be applied for the generation of spherical pattern because the reflex of substrate will affect the quantity of illumination. Commonly an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise the exposure time of photoresist will be different and the line widths of pattern will be also different at different areas. Fourthly commonly because the errors of concentric machine and substrate surface shape are bigger so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.

Research of automatic test technology of parameters used in a dual-CCD TV measure-system (EI CONFERENCE) 会议论文 OAI收割
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, November 2, 2005 - November 5, 2005, Zian, China
作者: Wang L.; Li Y.; Li Y.; Li Y.; Li Y.

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This paper describes a kind of automatic test technology of the parameters used in a dual-CCD TV measure-system (TV -MS) .The TV -MS is the ground control equipment of the anti-tank missile and integrates the technologies of optical machine and electronics. It is important and key component. The main technical parameters of the TV -MS are field of view zero point precision sensitivity anti-jamming ability zooming time and focus time etc. To insure the TV -MS satisfying the tactical and technical requirements and discover fault and reason a fast and accurate equipment satisfying the test technical parameters of the TV -MS is urgently needed in manufacture and service. Firstly the parameter test system converted optical signal to electronic signal implemented automatic control of the invariant illumination of parallel pipeline output. Secondly data and command delivering displaying or printing are realized by using 80C196KB. The experiment result shows that the approach of automatic testing of the Parameters used in a dual-CCD TV -MS is successful and it can be used for all tests of the functions and parameters of the TV -MS. The main innovations are to realize the fast veracious measure of technical parameters of the dual-CCD TV-MS and integrate the technologies of optics machineries and electronics. An advanced means is provided to judge the technical states find malfunctions and discover the reasons in producing and maintaining process. The equipment suited for anti-tank missile systems is given.