机构

• 长春光学精密机械与物... [3]
• 半导体研究所 [2]
• 上海应用物理研究所 [1]

采集方式

• OAI收割 [5]
• iSwitch采集 [1]

内容类型

• 期刊论文 [4]
• 会议论文 [2]

发表日期

• 2018 [1]
• 2011 [1]
• 2008 [2]
• 2007 [1]
• 2006 [1]

学科主题

• Instrument... [1]
• 光电子学 [1]

筛选

浏览/检索结果: 共6条，第1-6条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 High-performance etching of multilevel phase-type Fresnel zone plates with large apertures 期刊论文  OAI收割 Optics Communications, 2018, 卷号: 407, 页码: 227-233 作者:  Guo, C. L.;  Zhang, Z. Y.;  Xue, D. L.;  Li, L. X.;  Wang, R. Q.   |  收藏  |   Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文  OAI收割 International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China Tan X. 收藏  |   Planar refractive microlens arrays in indium phosphide and quartz substrates 期刊论文  iSwitch采集 Optical engineering, 2008, 卷号: 47, 期号: 5, 页码: 15 作者:  Zhang, Xinyu;  Xie, Changsheng;  Ji, An;  Tang, Qingle;  Luo, Wei 收藏  |   Planar refractive microlens arrays in indium phosphide and quartz substrates 期刊论文  OAI收割 optical engineering, 2008, 卷号: 47, 期号: 5, 页码: art. no. 054001 Zhang, XY; Xie, CS; Ji, A; Tang, Q; Luo, W 收藏  |   Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet (EI CONFERENCE) 会议论文  OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China 作者:  Jin C.-S.;  Zhang L.-C. 收藏  |   Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranes 期刊论文  OAI收割 ACTA PHYSICA SINICA, 2006, 卷号: 55, 期号: 3, 页码: 1517 Sen, W（王森）; Yu, GJ（俞国军）; Gong, JL; Li, QT; Zhu, DZ; Zhu, ZY 收藏  |