机构

• 力学研究所 [4]
• 上海微系统与信息技术... [4]
• 金属研究所 [1]
• 苏州纳米技术与纳米仿... [1]
• 长春光学精密机械与物... [1]
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采集方式

• OAI收割 [16]
• iSwitch采集 [1]

内容类型

• 期刊论文 [15]
• 会议论文 [2]

发表日期

• 2024 [1]
• 2022 [1]
• 2020 [1]
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学科主题

• Engineerin... [2]
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• 力学 [1]
• 半导体材料 [1]

筛选

浏览/检索结果: 共17条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Adaptive Kalman Filter Based on Online ARW Estimation for Compensating Low-Frequency Error of MHD ARS 期刊论文  OAI收割 IEEE Transactions on Instrumentation and Measurement, 2024, 卷号: 73, 页码: 1-10 作者:  Su, Yunhao;  Han, Junfeng;  Ma, Caiwen;  Wu, Jianming;  Wang, Xuan   |  收藏  |  浏览/下载：26/0  |  提交时间：2024/07/22 Angular random walk (ARW)  magnetohydrodynamic angular rate sensor (MHD ARS)  microelectromechanical system (MEMS) gyroscope  Sage-Husa adaptive Kalman filter(SHAKF)  signal fusion   The Study of an Integrated Sensor for Partial Nucleate Pool Boiling at Low Heat Flux 期刊论文  OAI收割 IEEE SENSORS JOURNAL, 2022, 卷号: 22, 期号: 24, 页码: 23692-23698 作者:  Jiang, Wenjing;  Li, Zhigang;  Zhao JF(赵建福);  Du WF(杜王芳);  Yuan, Hongtao   |  收藏  |  浏览/下载：20/0  |  提交时间：2023/04/20 Microelectromechanical systems (MEMS) microchip  microheater  micro resistance temperature detector (RTD)  partial nucleate pool boiling  Ti/Pt film   Bending proof strength of Zr61Ti2Cu25Al12 bulk metallic glass and its correlation with shear-banding initiation 期刊论文  OAI收割 INTERMETALLICS, 2020, 卷号: 126, 页码: 12 作者:  Li, Diao-Feng;  Shen, Yong;  Xu, Jian   |  收藏  |  浏览/下载：12/0  |  提交时间：2021/02/02 Metallic glasses  Yield behavior  Bending  Mechanical testing  Shear band  MicroElectroMechanical (MEMS)  NanoElectroMechanical NEMS   Twisting Sliding Mode Control of an Electrostatic MEMS Micromirror for a Laser Scanning System 期刊论文  OAI收割 IEEE-CAA JOURNAL OF AUTOMATICA SINICA, 2019, 卷号: 6, 期号: 4, 页码: 1060-1067 作者:  Chen Hui;  Sun Zhendong;  Sun Weijie;  Yeow John Tze Wei   |  收藏  |  浏览/下载：26/0  |  提交时间：2021/01/14 PULL-IN  ADAPTIVE-CONTROL  DESIGN  STABILIZATION  MIRRORS  ORDER  Electrostatic micromirror  imaging  microelectromechanical system (MEMS)  twisting algorithm   A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array 期刊论文  OAI收割 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 卷号: 26, 期号: 2 作者:  Hu, Fangrong;  Xu, Ningning;  Wang, Weiming;  Wang, Yue'e;  Zhang, Wentao 收藏  |  浏览/下载：49/0  |  提交时间：2016/06/27 tunable terahertz absorber  metamaterial  microelectromechanical systems (MEMS)  electrical dipole resonator  electrostatic actuator   Magnetic Domain Structure of Sm(Co, Cu, Fe, Zr)(x) Thick Permanent Magnetic Films 会议论文  OAI收割 JAN 14-18, 2013 作者:  Zhang, Yun;  Zhang, Yong;  Song, Ji-Zhong;  Qi, Xiao-Yu;  Du, Juan   |  收藏  |  浏览/下载：19/0  |  提交时间：2018/01/12 Magnetic Films  Magnetic Domains  Permanent Magnets  Microelectromechanical Systems (Mems)   Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit Bonding 期刊论文  OAI收割 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1484-1491 Wu, GQ; Xu, DH; Xiong, B; Wang, YC; Wang, YL; Ma, YL 收藏  |  浏览/下载：112/0  |  提交时间：2013/04/23 Bulk mode  glass frit bonding  microelectromechanical systems (MEMS)  redistribution  resonators  silicon bumps  vacuum package  wafer-level package   Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers 期刊论文  OAI收割 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2012, 卷号: 59, 期号: 12, 页码: 4881-4887 Yu, HT; Xu, PC; Xia, XY; Lee, DW; Li, XX 收藏  |  浏览/下载：26/0  |  提交时间：2013/04/23 Chemical sensor  in-wall modification  mesoporous thin film (MTF)  microelectromechanical systems (MEMS)  resonant cantilever   Isotropic Silicon Etching With XeF2 Gas for Wafer-Level Micromachining Applications 期刊论文  OAI收割 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1436-1444 Xu, DH; Xiong, B; Wu, GQ; Wang, YC; Sun, X; Wang, YL 收藏  |  浏览/下载：20/0  |  提交时间：2013/04/23 Design rule  isotropic etching  microelectromechanical systems (MEMS)  micromachining  wafer level  XeF2 gas   Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining 期刊论文  OAI收割 IEEE SENSORS JOURNAL, 2012, 卷号: 12, 期号: 6, 页码: - Xu, DH; Xiong, B; Wu, GQ; Ma, YL; Wang, YL 收藏  |  浏览/下载：22/0  |  提交时间：2013/04/23 Advanced micromachining  microelectromechanical systems (MEMS)  thermoelectric  uncooled infrared sensor  wet silicon etching  XeF2 silicon etching