中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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力学研究所 [5]
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浏览/检索结果:
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The Study of an Integrated Sensor for Partial Nucleate Pool Boiling at Low Heat Flux
期刊论文
OAI收割
IEEE SENSORS JOURNAL, 2022, 卷号: 22, 期号: 24, 页码: 23692-23698
作者:
  |  
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2023/04/20
Microelectromechanical systems (MEMS) microchip
microheater
micro resistance temperature detector (RTD)
partial nucleate pool boiling
Ti/Pt film
A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array
期刊论文
OAI收割
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 卷号: 26, 期号: 2
作者:
Hu, Fangrong
;
Xu, Ningning
;
Wang, Weiming
;
Wang, Yue'e
;
Zhang, Wentao
收藏
  |  
浏览/下载:48/0
  |  
提交时间:2016/06/27
tunable terahertz absorber
metamaterial
microelectromechanical systems (MEMS)
electrical dipole resonator
electrostatic actuator
Design of an acoustic target classification system based on small-aperture microphone array
期刊论文
iSwitch采集
Ieee transactions on instrumentation and measurement, 2015, 卷号: 64, 期号: 7, 页码: 2035-2043
作者:
Huang, Jingchang
;
Zhang, Xin
;
Guo, Feng
;
Zhou, Qianwei
;
Liu, Huawei
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2019/05/10
Acoustic classification system
Gaussian mixture model
Mel-frequency cepstrum coefficients
Microelectromechanical systems
Noise
Small-aperture array
Magnetic Domain Structure of Sm(Co, Cu, Fe, Zr)(x) Thick Permanent Magnetic Films
会议论文
OAI收割
JAN 14-18, 2013
作者:
Zhang, Yun
;
Zhang, Yong
;
Song, Ji-Zhong
;
Qi, Xiao-Yu
;
Du, Juan
  |  
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2018/01/12
Magnetic Films
Magnetic Domains
Permanent Magnets
Microelectromechanical Systems (Mems)
Three-dimensional graphene nanosheet encrusted carbon micropillar arrays for electrochemical sensing
期刊论文
OAI收割
NANOSCALE, 2012, 卷号: 4, 期号: 12, 页码: 3673
Penmatsa, V
;
Kim, T
;
Beidaghi, M
;
Kawarada, H
;
Gu, L
;
Wang, ZF
;
Wang, CL
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2013/09/23
MICROELECTROMECHANICAL SYSTEMS
FILMS
OXIDE
TRANSPARENT
DEPOSITION
SUPERCAPACITORS
FABRICATION
GRAPHITE
NANOSPHERES
TEMPERATURE
Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit Bonding
期刊论文
OAI收割
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1484-1491
Wu, GQ
;
Xu, DH
;
Xiong, B
;
Wang, YC
;
Wang, YL
;
Ma, YL
收藏
  |  
浏览/下载:107/0
  |  
提交时间:2013/04/23
Bulk mode
glass frit bonding
microelectromechanical systems (MEMS)
redistribution
resonators
silicon bumps
vacuum package
wafer-level package
Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers
期刊论文
OAI收割
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2012, 卷号: 59, 期号: 12, 页码: 4881-4887
Yu, HT
;
Xu, PC
;
Xia, XY
;
Lee, DW
;
Li, XX
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2013/04/23
Chemical sensor
in-wall modification
mesoporous thin film (MTF)
microelectromechanical systems (MEMS)
resonant cantilever
Isotropic Silicon Etching With XeF2 Gas for Wafer-Level Micromachining Applications
期刊论文
OAI收割
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1436-1444
Xu, DH
;
Xiong, B
;
Wu, GQ
;
Wang, YC
;
Sun, X
;
Wang, YL
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2013/04/23
Design rule
isotropic etching
microelectromechanical systems (MEMS)
micromachining
wafer level
XeF2 gas
Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining
期刊论文
OAI收割
IEEE SENSORS JOURNAL, 2012, 卷号: 12, 期号: 6, 页码: -
Xu, DH
;
Xiong, B
;
Wu, GQ
;
Ma, YL
;
Wang, YL
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2013/04/23
Advanced micromachining
microelectromechanical systems (MEMS)
thermoelectric
uncooled infrared sensor
wet silicon etching
XeF2 silicon etching
Wafer-level vacuum packaging of micromachined thermoelectric ir sensors
期刊论文
iSwitch采集
Ieee transactions on advanced packaging, 2010, 卷号: 33, 期号: 4, 页码: 904-911
作者:
Xu, Dehui
;
Jing, Errong
;
Xiong, Bin
;
Wang, Yuelin
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2019/05/10
Au-au thermocompression bonding
Infrared sensor
Microelectromechanical systems (mems)
Optical filter
Thermoelectric
Vacuum package
Wafer-level package