中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
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光电技术研究所 [14]
长春应用化学研究所 [11]
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期刊论文 [51]
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Sub-5 nm Lithography with Single GeV Heavy Ions Using Inorganic Resist
期刊论文
OAI收割
NANO LETTERS, 2021, 卷号: 21, 期号: 6, 页码: 2390-2396
作者:
Liu, Qing
;
Zhao, Jing
;
Guo, Jinlong
;
Wu, Ruqun
;
Liu, Wenjing
  |  
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2021/12/10
Nanolithography
Heavy Ions
Single-digit Nanometer
Atomic-scale Fabrication
Inorganic Resist
Impact of various parameters on nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation
期刊论文
OAI收割
FERROELECTRICS, 2019, 卷号: 549, 期号: 1(SI), 页码: 70-77
作者:
Wang, Xuewen
;
Theogene, Barayavuga
;
Mei, Huanhuan
;
Zhang, Jianwei
;
Huang, Chenchen
  |  
收藏
  |  
浏览/下载:120/0
  |  
提交时间:2019/11/26
Local anodic oxidation nanolithography
atomic force microscope
silicon surface
Surface plasmons superresolution nanolithography technique by using polydimethylsiloxane soft mold based on light coupling
期刊论文
OAI收割
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2018, 卷号: 82, 期号: 3, 页码: 30401
作者:
He, Chuanwang
;
Huang, Peng
;
Fan, Bin
;
Dong, Xiaochun
  |  
收藏
  |  
浏览/下载:48/0
  |  
提交时间:2019/08/23
Electric fields
High frequency amplifiers
Microchannels
Molds
Nanolithography
Optical resolving power
Polydimethylsiloxane
Silver
Surface plasmons
Revisitation of Extraordinary Young's Interference: from Catenary Optical Fields to Spin-Orbit Interaction in Metasurfaces
期刊论文
OAI收割
ACS PHOTONICS, 2018, 卷号: 5, 期号: 8, 页码: 3198-3204
作者:
Pu, Mingbo
;
Guo, Yinghui
;
Li, Xiong
;
Ma, Xiaoliang
;
Luo, Xiangang
  |  
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2019/08/23
interference
metasurface
catenary optics
spin-orbit interaction
nanolithography
Plasmonic direct writing lithography with a macroscopical contact probe
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2018, 卷号: 441, 页码: 99-104
作者:
Huang, Yuerong
;
Liu, Ling
;
Wang, Changtao
;
Chen, Weidong
;
Liu, Yunyue
  |  
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2019/08/23
Nanolithography
Surface plasmons
Nanostructure
Contact probe
Tailoring two-dimensional nanoparticle arrays into various patterns
期刊论文
OAI收割
NANOTECHNOLOGY, 2018, 卷号: 29, 期号: 4, 页码: 1
作者:
Sun, Jinling
;
Wang, Ying
;
Liao, Jianhui
  |  
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2018/01/19
Nanoparticle Array
Patterning
Self-assembly
Nanolithography
Micro-contact Printing
Pushing the plasmonic imaging nanolithography to nano-manufacturing
期刊论文
OAI收割
Optics Communications, 2017, 卷号: 404, 页码: 62-72
作者:
Gao, Ping
;
Li, Xiong
;
Zhao, Zeyu
;
Ma, Xiaoliang
;
Pu, Mingbo
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/11/20
Diffraction - Electromagnetic waves - Lithography - Nanolithography - Photolithography - Surface plasmon resonance
Deep subwavelength interference lithography with tunable pattern period based on bulk plasmon polaritons
期刊论文
OAI收割
Optics Express, 2017, 卷号: 25, 期号: 17, 页码: 20511-20521
作者:
Liu, Hongchao
;
Kong, Weijie
;
Liu, Kaipeng
;
Zhao, Chengwei
;
Du, Wenjuan
  |  
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2018/11/20
HIGH-ASPECT-RATIO
PHOTONIC CRYSTALS
EUV LITHOGRAPHY
FABRICATION
DIFFRACTION
NANOLITHOGRAPHY
EXTREME
Force Drift in Force Mode Dip-Pen Nanolithography
期刊论文
OAI收割
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 卷号: 16, 期号: 7, 页码: 7030-7036
作者:
Yang, Haijun
;
Zhang, Chen
;
Zhang, Jinjin
;
Zhang, Donghua
;
Hu, Jun
  |  
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2018/03/15
Dip-Pen Nanolithography (DPN)
Atomic Force Microscopy (AFM)
Force Drift
Superresolution nanolithography technique based on polydimethylsiloxane soft mold
期刊论文
OAI收割
IEEE International Conference: 2016 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M-NANO), 2016, 页码: 269-272
作者:
He, Chuanwang
;
Dong, Xiaochun
;
Wang, Pinghe
  |  
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2018/06/14
Electric Fields
Linewidth
Manufacture
Microchannels
Molds
Nanolithography
Nanotechnology
Optical Resolving Power
Photoresists
Pulse Width Modulation
Silver