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浏览/检索结果: 共11条，第1-10条 帮助

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Fringe projection profilometry with phase-coded optics 会议论文  OAI收割
Nantong, China, 2021-10-10
作者:  Yan, Qi;  Ma, Suodong;  Chen, Xu;  Xu, Feng;  Huang, Qitai
  |  收藏  |  浏览/下载：19/0  |  提交时间：2022/01/27
Design of a zoom projection optical system for high resolution projector 会议论文  OAI收割
Beijing, China, 2020-11-30
作者:  Qin, Guang;  Fan, Xuewu;  Ma, Zixuan;  Zhang, Gengyao
  |  收藏  |  浏览/下载：31/0  |  提交时间：2020/12/29
An improved phase-coding method for absolute phase retrieval based on the path-following algorithm 期刊论文  OAI收割
Optics and Lasers in Engineering, 2019, 卷号: 122, 页码: 65-73
作者:  S.Z.Lv;  Q.Sun;  J.B.Yang;  Y.Jiang;  F.Qu
  |  收藏  |  浏览/下载：31/0  |  提交时间：2020/08/24
Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文  OAI收割
opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623
作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo
收藏  |  浏览/下载：32/0  |  提交时间：2016/11/28
Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文  OAI收割
opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623
作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo
收藏  |  浏览/下载：17/0  |  提交时间：2016/11/28
Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source (EI CONFERENCE) 会议论文  OAI收割
Optical Micro- and Nanometrology IV, April 16, 2012 - April 18, 2012, Brussels, Belgium
作者:  Wang X.;  Wang X.;  Wang X.;  Wang Z.;  Wang Z.
收藏  |  浏览/下载：37/0  |  提交时间：2013/03/25
Lithium fluoride (LiF) crystal is a very promising candidate as nanometer resolution EUV and soft X-ray detector. Compared with other EUV and soft X-ray detectors  charge coupled device and photographic films  LiF crystal has high resolution  large field of view and wide dynamic range. In this paper  using LiF crystal as EUV detector and a Schwarzschild objective (SO) working at 13.5nm as projection optics  mesh images with 4.2 m  1.2 m and 800 nm line width and pinhole patterns with 1.5m diameter are acquired in projection imaging mode and direct writing mode  respectively. Fluorescence intensity profiles of images show that the resolution of mesh image is 900 nm  and the one of pinhole image is 800 nm. In the experiments  a spherical condense mirror based on normal incidence type is used to eliminate the damage and contamination on the masks (mesh and pinhole) caused by the laser plasma  and the energy density is not decreased compared with that the masks are close to the plasma. The development of the SO  the alignment of the objective and the imaging experiments are also reported. 2012 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
Design of aspherical surfaces for panoramic imagers using multipopulations genetic algorithm (EI CONFERENCE) 会议论文  OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
作者:  Jin C.-S.;  Wang L.-P.;  Liang Z.-Z.
收藏  |  浏览/下载：27/0  |  提交时间：2013/03/25
A design method of aspherical surface for panoramic imaging system with two mirrors using multi-populations genetic algorithms is proposed. Astigmatism induced by mirrors may significantly compromise image resolution. To solve this problem  we induced algebraic expression of astigmatism in panoramic imager based on generalized Coddington equation and theory of geometric optics. Then  we propose an optimization process for mirror profile design to eliminate astigmatism and provide purposely-designed projection formula with aid of MPGA. A series of polynomial expressions of aspherical surfaces are obtained and procedures of the design are presented. In order to facilitate ray tracing and aberration calculation  even asphere surface model is obtained by using of hybrid schemes combining MPGA and damped least squares. Finally  a prototype of the catadioptric panoramic imager has been developed and panoramic ring image is obtained. 2009 SPIE.  
Even aberration measurement of lithographic projection system based on optimized phase-shifting marks 期刊论文  OAI收割
microelectron. eng., 2009, 卷号: 86, 期号: 1, 页码: 78, 82
Yuan Qiongyan; 王向朝; Qiu Zicheng; Wang Fan; 马明英
收藏  |  浏览/下载：1100/181  |  提交时间：2009/09/18
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width 期刊论文  OAI收割
appl. optics, 2009, 卷号: 48, 期号: 2, 页码: 261, 269
Qiu Zicheng; 王向朝; Yuan Qiongyan; Wang Fan
收藏  |  浏览/下载：1149/199  |  提交时间：2009/09/18
Transient thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography 期刊论文  iSwitch采集
Japanese journal of applied physics part 1-regular papers brief communications & review papers, 2007, 卷号: 46, 期号: 10a, 页码: 6568-6572
作者:  Liu, Ke;  Li, Yanqiu;  Zhang, Fuchang;  Fan, Mingzhe
收藏  |  浏览/下载：31/0  |  提交时间：2019/05/10