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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
长春光学精密机械与物... [4]
上海光学精密机械研究... [4]
西安光学精密机械研究... [2]
中国科学院大学 [1]
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OAI收割 [10]
iSwitch采集 [1]
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期刊论文 [6]
会议论文 [5]
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2021 [1]
2020 [1]
2019 [1]
2014 [2]
2012 [1]
2009 [3]
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Fringe projection profilometry with phase-coded optics
会议论文
OAI收割
Nantong, China, 2021-10-10
作者:
Yan, Qi
;
Ma, Suodong
;
Chen, Xu
;
Xu, Feng
;
Huang, Qitai
  |  
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Design of a zoom projection optical system for high resolution projector
会议论文
OAI收割
Beijing, China, 2020-11-30
作者:
Qin, Guang
;
Fan, Xuewu
;
Ma, Zixuan
;
Zhang, Gengyao
  |  
收藏
  |  
An improved phase-coding method for absolute phase retrieval based on the path-following algorithm
期刊论文
OAI收割
Optics and Lasers in Engineering, 2019, 卷号: 122, 页码: 65-73
作者:
S.Z.Lv
;
Q.Sun
;
J.B.Yang
;
Y.Jiang
;
F.Qu
  |  
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  |  
Aberration measurement technique based on an analytical linear model of a through-focus aerial image
期刊论文
OAI收割
opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
Aberration measurement technique based on an analytical linear model of a through-focus aerial image
期刊论文
OAI收割
opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623
作者:
Yan, Guanyong
;
Wang, Xiangzhao
;
Li, Sikun
;
Yang, Jishuo
;
Xu, Dongbo
收藏
  |  
Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source (EI CONFERENCE)
会议论文
OAI收割
Optical Micro- and Nanometrology IV, April 16, 2012 - April 18, 2012, Brussels, Belgium
作者:
Wang X.
;
Wang X.
;
Wang X.
;
Wang Z.
;
Wang Z.
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  |  
Design of aspherical surfaces for panoramic imagers using multipopulations genetic algorithm (EI CONFERENCE)
会议论文
OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
作者:
Jin C.-S.
;
Wang L.-P.
;
Liang Z.-Z.
收藏
  |  
Even aberration measurement of lithographic projection system based on optimized phase-shifting marks
期刊论文
OAI收割
microelectron. eng., 2009, 卷号: 86, 期号: 1, 页码: 78, 82
Yuan Qiongyan
;
王向朝
;
Qiu Zicheng
;
Wang Fan
;
马明英
收藏
  |  
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width
期刊论文
OAI收割
appl. optics, 2009, 卷号: 48, 期号: 2, 页码: 261, 269
Qiu Zicheng
;
王向朝
;
Yuan Qiongyan
;
Wang Fan
收藏
  |  
Transient thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography
期刊论文
iSwitch采集
Japanese journal of applied physics part 1-regular papers brief communications & review papers, 2007, 卷号: 46, 期号: 10a, 页码: 6568-6572
作者:
Liu, Ke
;
Li, Yanqiu
;
Zhang, Fuchang
;
Fan, Mingzhe
收藏
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