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Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient
期刊论文
OAI收割
Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4
作者:
Miao, J(苗静)
;
Shen, WJ(沈文江)
;
He, CD
;
Xue, CY
;
Xiong, JJ
收藏
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浏览/下载:84/0
  |  
提交时间:2015/12/31
silicon
elemental semiconductors
silicon-on-insulator
wafer bonding
electromechanical effects
ultrasonic transducers
capacitive transducers
micromechanical devices
micromachining
vibrations
membranes
finite element analysis
reliability
capacitance
electromechanical coupling coefficient
capacitive micromachined ultrasonic transducer
impedance matching
propagation medium
microelectromechanical system capacitive ultrasonic transducer
silicon on insulator
wafer bonding
optimum geometric dimensions
membrane mechanical vibration
electrical characteristics
finite-element analysis
operation mode
device safety
device reliability
equivalent stress
operation-collapse voltage
bottom electrodes
glass substrate surface
parallel parasitic capacitance
Si
SiO2
Synthesis and luminescence properties of Eu3+-doped silicate nanomaterial (EI CONFERENCE)
会议论文
OAI收割
17th International Conference on Dynamical Processes in Excited States of Solids, DPC'10, June 20, 2010 - June 25, 2010, Argonne, IL, United states
作者:
Zhang J.
;
Zhang J.
;
Zhang J.
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  |  
浏览/下载:29/0
  |  
提交时间:2013/03/25
In this paper
we introduce a sol-gel process for preparing Y 2Si2O7: Eu3+ nanocrystals. The rare earth compounds were dispersed in the SiO2 colloids and the monodisperse nano-scale composite materials were prepared. The reactant mass fraction and heat treatment temperatures could affect the structures and emission spectrum properties of as-synthesized samples. The samples emit the strong red light upon excitation under the ultraviolet. The main peaks originate from 5D0-7F2 electric dipole transition of Eu3+. With regard to the samples treated at different temperatures
the emission spectra obtained under 266 nm excitation show different shapes of spectra lines and relative intensities
indicating that the Eu3+ ions have been located in different local environments. 2011 Published by Elsevier B.V.
Efficient 1.53 mu m emission and energy transfer in Si/Er-Si-O multilayer structure
期刊论文
OAI收割
materials research bulletin, 2011, 卷号: 46, 期号: 2, 页码: 262-265
作者:
Xue CL
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浏览/下载:70/4
  |  
提交时间:2011/07/05
Multilayers
Inorganic compounds
Sputtering
Optical properties
DOPED SI/SIO2 SUPERLATTICES
ERBIUM SILICATE
ER3+
LUMINESCENCE
FILMS
PHOTOLUMINESCENCE
基于负熵的人员脚步震动信号检测识别算法
期刊论文
OAI收割
小型微型计算机系统, 2010, 期号: 01
梁志强
;
魏建明
;
赵俊钰
;
刘海涛
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2012/01/06
阵列波导光栅(AWG)
Si基SiO2
光波导
光波分复用
集成光学
电介质刻蚀机理研究及其在深亚微米集成电路制造中的应用
学位论文
OAI收割
博士: 中国科学院研究生院(上海微系统与信息技术研究所) , 2009
陈乐乐
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  |  
浏览/下载:75/0
  |  
提交时间:2012/03/06
SiO2刻蚀
Si3N4刻蚀
光学发射光谱
刻蚀腔条件
Identification of pore size in porous SiO2 thin film by positron annihilation
期刊论文
OAI收割
CHINESE PHYSICS C, 2009, 卷号: 33, 期号: 2, 页码: #REF!
作者:
Zhang Z(张哲)
;
Qin XB(秦秀波)
;
Wang DN(王丹妮)
;
Yu RS(于润升)
;
Wang QZ(王巧占)
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2016/04/12
Al-Si thin film
porous SiO2 thin film
positron annihilation
Identification of pore size in porous SiO_2 thin film by positron annihilation
期刊论文
OAI收割
中国物理C, 2009, 期号: 2, 页码: 156-160
作者:
Zhang Z(张哲)
;
Qin XB(秦秀波)
;
Wang DN(王丹妮)
;
Yu RS(于润升)
;
Wang QZ(王巧占)
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2015/12/25
Al-Si thin film
porous SiO2 thin film
positron annihilation
Preparation and properties of Si2N2O/beta-cristobalite composites
期刊论文
OAI收割
Journal of the European Ceramic Society, 2008, 卷号: 28, 期号: 6, 页码: 1227-1234
Q. F. Tong
;
J. Y. Wang
;
Z. P. Li
;
Y. C. Zhou
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  |  
浏览/下载:14/0
  |  
提交时间:2012/04/13
cristobalite
mechanical properties
dielectric properties
SiO2
Si2N2O
silicon oxynitride ceramics
beta-cristobalite
glasses
crystallization
transformation
stabilization
toughness
strength
phase
Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms
期刊论文
OAI收割
journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 5, 页码: 1120-1134
Yang, JL
;
Gaspar, J
;
Paul, O
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  |  
浏览/下载:35/0
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提交时间:2010/03/08
Bulge test
fracture
pooled Weibull analysis
silicon nitride (Si3N4)
silicon oxide (SiO2)
甲烷氧化偶联催化剂及SiC 一体化载体在甲烷转化利用中的应用研究
学位论文
OAI收割
理学博士: 中国科学院研究生院, 2007
柳海涛
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  |  
浏览/下载:38/0
  |  
提交时间:2013/05/27
甲烷氧化偶联
原料气
200ml 工业放大
W-Mn/Si
Ni/SiC
一体化催化剂
甲烷二氧化碳重整
Oxidative coupling of methane
Catalyst
K-Na-W-Mn/SiO2
Scale up
Monolithic foam W-Mn/SiC
CO2 reforming of methane to synthesis gas