中国科学院机构知识库网格系统: 检索

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	Implementation of a customizable GUI software platform for IC equipment 会议论文 OAI收割 2014 International Conference on Measurement, Instrumentation and Automation, Shanghai, China, April 23-24, 2014 作者: Wang CX(王晨曦); Liu MZ(刘明哲); Xu AD(徐皑冬) 收藏 \| 浏览/下载：33/0 \| 提交时间：2014/08/09 Semiconductor device manufacture Silicon wafers
	bottleneck prediction method based on improved adaptive network-based fuzzy inference system (anfis) in semiconductor manufacturing system 期刊论文 OAI收割 Chinese Journal of Chemical Engineering, 2012, 卷号: 20, 期号: 6, 页码: 1081-1088 Cao Zhengcai; Deng Jijie; Liu Min; Wang Yongji \| 收藏 \| 浏览/下载：16/0 \| 提交时间：2013/09/17 Binary trees Data processing Dynamical systems Forecasting Fuzzy systems Intelligent control Linear transformations Scheduling Semiconductor device manufacture
	a drum-buffer-rope based scheduling method for semiconductor manufacturing system 会议论文 OAI收割 2011 7th IEEE International Conference on Automation Science and Engineering, CASE 2011, Trieste, Italy, August 24, Cao Zhengcai; Peng Yazhen; Wang Yongji \| 收藏 \| 浏览/下载：11/0 \| 提交时间：2013/10/08 Customer satisfaction Rope Scheduling Semiconductor device manufacture
	Fuzzy predictive R2R control to CMP process 会议论文 OAI收割 2011 IEEE International Conference on Computer Science and Automation Engineering, CSAE 2011, Shanghai, China, June 10-12, 2011 作者: Wang L(王亮); Hu JT(胡静涛) 收藏 \| 浏览/下载：25/0 \| 提交时间：2012/06/06 Chemical mechanical polishing Clustering algorithms Computer science Controllers Industrial applications Mathematical models Polishing Predictive control systems Semiconductor device manufacture Stripping (removal)
	A general throughput model for parallel cluster tools 会议论文 OAI收割 2011 International Conference on Informatics, Cybernetics, and Computer Engineering, Melbourne, Australia, November 19-20, 2011 作者: Zheng XH(郑秀红); Yu HB(于海斌); Hu JT(胡静涛) 收藏 \| 浏览/下载：20/0 \| 提交时间：2012/06/06 Intelligent robots Manufacture Models Semiconductor device manufacture Throughput