中国科学院机构知识库网格系统: 检索

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	Beam Shaping Performance Based on Metallic Corrugated Grooves and Dielectric Periodic Gratings at 500 GHz 期刊论文 OAI收割 IEEE ACCESS, 2018, 卷号: 6, 页码: 42507-42515 作者: Ding, Jiang-Qiao; Hu, Jie; Shi, Sheng-Cai; Zhao, Yun \| 收藏 \| 浏览/下载：42/0 \| 提交时间：2019/04/08 Beam shaping characteristic leaky-wave antenna micromachining surface plasmon (SP) terahertz (THz)
	Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator 会议论文 OAI收割 Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA, OCT 26-29, 2017OCT 26-29, 2017 作者: Ma, Wenying; Ma, Changwei; Wang, Weimin \| 收藏 \| 浏览/下载：55/0 \| 提交时间：2019/08/23 Adaptive optics Deformation Delta modulation Electromechanical devices Laser pulses MEMS Mirrors Structural design Surface micromachining
	Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文 OAI收割 Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419 作者: Wang, Weimin; Tao, Fenggang; Wang, Qiang; Qiu, Chuankai; Chen, Zexiang \| 收藏 \| 浏览/下载：31/0 \| 提交时间：2018/11/20 Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining
	Investigation of femtosecond laser-induced periodic surface structure on tungsten 期刊论文 OAI收割 guangxue xuebao/acta optica sinica, 2016, 卷号: 36, 期号: 5 作者: Li, Chen; Cheng, Guanghua; Razvan, Stoian 收藏 \| 浏览/下载：29/0 \| 提交时间：2016/10/14 Electromagnetic fields Electromagnetic waves Hydrophilicity Hydrophobicity Laser pulses Micromachining Periodic structures Surface structure Time domain analysis Tungsten Ultrashort pulses
	Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文 OAI收割 Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4 作者: Miao, J(苗静); Shen, WJ(沈文江); He, CD; Xue, CY; Xiong, JJ 收藏 \| 浏览/下载：86/0 \| 提交时间：2015/12/31 silicon elemental semiconductors silicon-on-insulator wafer bonding electromechanical effects ultrasonic transducers capacitive transducers micromechanical devices micromachining vibrations membranes finite element analysis reliability capacitance electromechanical coupling coefficient capacitive micromachined ultrasonic transducer impedance matching propagation medium microelectromechanical system capacitive ultrasonic transducer silicon on insulator wafer bonding optimum geometric dimensions membrane mechanical vibration electrical characteristics finite-element analysis operation mode device safety device reliability equivalent stress operation-collapse voltage bottom electrodes glass substrate surface parallel parasitic capacitance Si SiO2
	TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer 期刊论文 OAI收割 MICROELECTRONIC ENGINEERING, 2012, 卷号: 91, 页码: 167-173 Wei, CZ; Zhou, W; Wang, Q; Xia, XY; Li, XX 收藏 \| 浏览/下载：31/0 \| 提交时间：2013/04/23 Automotive sensor Pressure sensor Accelerometer Piezoresistance Surface-micromachining Self-testing
	Silicon-on-insulation-based deformable mirror array for adaptive optics 期刊论文 OAI收割 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 卷号: 27, 期号: 3, 页码: 1291-1294 作者: Wang, D. J.; Yao, J.; Qiu, C. K.; Hu, F. R.; Fan, T. Q. 收藏 \| 浏览/下载：16/0 \| 提交时间：2015/09/21 adaptive optics electrostatic actuators finite element analysis light reflection micromachining micromirrors optical arrays silicon-on-insulator surface roughness
	Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator 期刊论文 OAI收割 opt. commun., 2009, 卷号: 282, 期号: 7, 页码: 1370, 1373 Zhou Zenghui; Xu Jian; Liao Yang; 程亚; 徐至展; Sugioka Koji; Midorikawa Katsumi 收藏 \| 浏览/下载：1016/168 \| 提交时间：2009/09/18 Surface-enhanced Raman scattering Femtosecond laser micromachining Surface metallization Raman sensor