中国科学院机构知识库网格系统: 检索

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	Beam Shaping Performance Based on Metallic Corrugated Grooves and Dielectric Periodic Gratings at 500 GHz 期刊论文 OAI收割 IEEE ACCESS, 2018, 卷号: 6, 页码: 42507-42515 作者: Ding, Jiang-Qiao; Hu, Jie; Shi, Sheng-Cai; Zhao, Yun \| 收藏 \|
	Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator 会议论文 OAI收割 Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA, OCT 26-29, 2017OCT 26-29, 2017 作者: Ma, Wenying; Ma, Changwei; Wang, Weimin \| 收藏 \|
	Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文 OAI收割 Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419 作者: Wang, Weimin; Tao, Fenggang; Wang, Qiang; Qiu, Chuankai; Chen, Zexiang \| 收藏 \|
	Investigation of femtosecond laser-induced periodic surface structure on tungsten 期刊论文 OAI收割 guangxue xuebao/acta optica sinica, 2016, 卷号: 36, 期号: 5 作者: Li, Chen; Cheng, Guanghua; Razvan, Stoian 收藏 \|
	Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文 OAI收割 Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4 作者: Miao, J(苗静); Shen, WJ(沈文江); He, CD; Xue, CY; Xiong, JJ 收藏 \|
	TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer 期刊论文 OAI收割 MICROELECTRONIC ENGINEERING, 2012, 卷号: 91, 页码: 167-173 Wei, CZ; Zhou, W; Wang, Q; Xia, XY; Li, XX 收藏 \|
	Silicon-on-insulation-based deformable mirror array for adaptive optics 期刊论文 OAI收割 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 卷号: 27, 期号: 3, 页码: 1291-1294 作者: Wang, D. J.; Yao, J.; Qiu, C. K.; Hu, F. R.; Fan, T. Q. 收藏 \|
	Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator 期刊论文 OAI收割 opt. commun., 2009, 卷号: 282, 期号: 7, 页码: 1370, 1373 Zhou Zenghui; Xu Jian; Liao Yang; 程亚; 徐至展; Sugioka Koji; Midorikawa Katsumi 收藏 \|