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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
长春光学精密机械与物... [7]
上海应用物理研究所 [2]
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OAI收割 [9]
内容类型
期刊论文 [5]
会议论文 [4]
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2020 [1]
2019 [1]
2018 [3]
2009 [1]
2006 [1]
2005 [2]
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In situ GISAXS study on the temperature-dependent performance of multilayer monochromators from the liquid nitrogen cooling temperature to 600 degrees C
期刊论文
OAI收割
APPLIED SURFACE SCIENCE, 2020, 卷号: 508, 页码: -
作者:
Jiang, H
;
Hua, WQ
;
Tian, NX
;
Li, AG
;
Li, XH
  |  
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2021/09/06
X-RAY REFLECTION
SILICON MONOCHROMATOR
ROUGHNESS
INTERFACE
GROWTH
SCATTERING
MIRRORS
Characterizing curved surface roughness of Wolter-I X-ray grazing incidence telescope
期刊论文
OAI收割
Chinese Optics, 2019, 卷号: 12, 期号: 3, 页码: 587-595
作者:
Y.-C.Zhang
;
P.Liu
;
X.-G.Wang
;
L.-P.He
;
B.Chen
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2020/08/24
Surface roughness,Mirrors,Power spectral density,Spectral density,Surface measurement,Surface scattering,Telescopes,X ray scattering
Thickness-dependent structural characteristics for a sputtering-deposited chromium monolayer and Cr/C and Cr/Sc multilayers
期刊论文
OAI收割
JOURNAL OF SYNCHROTRON RADIATION, 2018, 卷号: 25, 页码: 785-792
作者:
Jiang, H
;
Wang, H
;
Zhu, JT
;
Xue, CF
;
Zhang, JY
  |  
收藏
  |  
浏览/下载:43/0
  |  
提交时间:2018/09/06
Nitride Thin-films
X-ray Mirrors
Surface-morphology
Optical-surfaces
Growth
Roughness
Layer
Microstructure
Reflectivity
Spectroscopy
Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm
期刊论文
OAI收割
Optics Communications, 2018, 卷号: 410, 页码: 805-810
作者:
Kuang, S. Q.
;
Gong, X. P.
;
Yang, H. G.
  |  
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2019/09/17
Multilayers
Multilayer design
X-ray
Soft X-rays
Extreme ultraviolet
Thin films
x-ray
genetic algorithm
mirrors
fabrication
reflectivity
optimization
coatings
Optics
Mechanical design and finite element analyses of surface bending mechanism for X-ray optics
期刊论文
OAI收割
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2018, 卷号: 53, 页码: 107-119
作者:
Gong, X. P.
;
Lu, Q. P.
;
Wang, Y.
;
Song, Y.
  |  
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2019/09/17
Surface bending mechanism
X-ray optics
Synchrotron radiation
Mechanical design
Finite element analysis
mirrors
Engineering
Science & Technology - Other Topics
Instruments &
Instrumentation
Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE)
会议论文
OAI收割
Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states
Yan-li M.
;
Yong-gang W.
;
Shu-yan C.
;
Bo C.
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2013/03/25
A soft x-ray reflectometer with laser produced plasma source has been designed
which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above
the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand
both the two samples are measured by WYKO surface profiler
and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler
which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO
and the possible reasons of such difference have been discussed in detail. 2009 SPIE.
Research and analysis of non-coaxial x-ray microscopy working at grazing incidence (EI CONFERENCE)
会议论文
OAI收割
Australian Conference on Optical Fibre Technology/Australian Optical Society, ACOFT/AOS 2006, July 10, 2006 - July 13, 2006, Melbourne, VIC, Australia
Jiasheng H.
;
Yuhong B.
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2013/03/25
We have designed and fabricated a non-coaxial grazing reflective x-ray microscope that is composed of four spherical mirrors for the diagnosis of intertial confinement fusion. The aberrations and imaging quality of the system are analysis and calculated.
Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE)
会议论文
OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
Zhou C.
;
Li H.
;
Chen C.
;
Zhou C.
;
Qian S.
收藏
  |  
浏览/下载:35/0
  |  
提交时间:2013/03/25
Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal
spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle
optical system
mechanical constructions
DC serve motor control system
array detector
data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy
low cost
multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.
Imaging quality analysis of KBA x-ray microscope working at grazing incidence (EI CONFERENCE)
会议论文
OAI收割
Optical Design and Testing II, November 8, 2004 - November 11, 2004, Beijing, United states
作者:
Zhao L.
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2013/03/25
In the latest 20 years
x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching
spatial exploration technology
high-energy physics
procedure diagnosis of inertial confinement fusion (ICF) et al. Since refractive index of materials in the x-ray region is lower than 1
and x-ray is strongly absorbed by materials
it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general
grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper
according to user's requirement
we have designed a non-coaxial grazing KBA microscope. The microscope consists of two sets of perpendicular spherical mirrors
each set includes two parallel mirrors. Taking it as an example
we have compiled an optical computing program for the non-coaxial grazing imaging systems so as to analyze and evaluate aberrations of KBA microscope. Thus it can help us to get an optimal comprehension of KBA x-ray imaging system. In the same time
the analytical results provide reliable foundation for evaluating imaging quality of KBA microscope.