中国科学院机构知识库网格系统: 检索

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	Governing Rule for Dynamic Formation of Grain Boundaries in Grown Graphene 期刊论文 OAI收割 ACS NANO, 2015, 卷号: 9, 期号: 6, 页码: 5792-5798 作者: Guo, Wei; Wu, Bin; Li, Yongtao; Wang, Lifeng; Chen, Jisi 收藏 \| 浏览/下载：30/0 \| 提交时间：2015/10/28 grain boundaries graphene dynamic formation chemical vapor deposition anisotropic etching
	In-situ TEM imaging of the anisotropic etching of graphene by metal nanoparticles 期刊论文 OAI收割 NANOTECHNOLOGY, 2014, 卷号: 25, 期号: 46 Wei, JK; Xu, Z; Wang, H; Tian, XZ; Yang, SZ; Wang, LF; Wang, WL; Bai, XD 收藏 \| 浏览/下载：28/0 \| 提交时间：2015/04/14 graphene nanoribbons anisotropic catalytic etching in-situ electron microscopy graphene
	Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors 期刊论文 OAI收割 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 卷号: 21, 期号: 6, 页码: 1402-1409 Xu, L; Wang, YC; Zhou, H; Liu, YX; Li, T; Wang, YL 收藏 \| 浏览/下载：33/0 \| 提交时间：2013/04/23 Anisotropic etching catalytic gas sensors concave-shaped membrane power per active area (PPAA) sol-gel 3-D microheaters
	Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Zhu Y. 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/03/25 Linear fiber-optic image slicer is used more and more in spatial exploration and imaging system. In this paper a plane arranging method of fiber-optic array based on Si-V grooves is established in order to improve the accuracy and reduce the cost of manufacturing. Firstly the Si-V groove array is micro-machined with anisotropic etching process then optical fibers are placed in the grooves orderly with plane arranging method. Secondly the end surfaces of the device are polished also the linear fiber-optic image slicer is packaged. Finally some parameters are tested including structure parameters transmittivity and vibration test. Experimental results indicate that the maximum error accumulated in 2000 periods of the Si-V grooves is 0.5 m the error of the height in Si-V grooves is less than 0.15m the roughness of the end surface is less than 0.9nm. The transmittivity of the linear fiber-optic image slicer that without optical film is 51.46% at the wavelength of 632.8nm. After random vibration experiment the ratio of the broken fiber increased by 0.1%. While the temperature reached 320C the stress of epoxy will be 130Mpa which is close to the limit resistance stress of 139Mpa some cracks appeared.
	Study on the fabrication of orange micro-LED arrays for display (EI CONFERENCE) 会议论文 OAI收割 ICO20: Display Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China 作者: Li J.; Wang W.; Wang W.; Zhao L.; Li J. 收藏 \| 浏览/下载：31/0 \| 提交时间：2013/03/25 Arrays of micro-sized LEDs which can be used as microdisplays have been demonstrated in recent years. In order to reduce the input and output connections to the arrays we employ a matrix addressable architecture in which all the pixels in each row are connected by a common metal line on the top of the window layer (top electrode) or at the base of substrate(bottom electrode). Decreasing the size of electrodes makes for minimizing the size of device. The optic and electric isolation and good ohmic contact are also helpful to obtain superior optical and electrical performance. We describe a procedure of fabrication of AlGalnP-based orange micro-LED by wet etching. The structure of devices is etched using both isotropic and anisotropic etchant. The pixel size is about 16um 20um and there are 1000 818 pixels in the light emitting chip whose diagonal is 1-in.
	Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching 期刊论文 iSwitch采集 Optical engineering, 2004, 卷号: 43, 期号: 4, 页码: 789-790 作者: Xia, JS; Yu, JZ; Fan, ZC; Wang, ZT; Chen, SW 收藏 \| 浏览/下载：18/0 \| 提交时间：2019/05/12 Variable optical attenuator Thermo-optics Silicon-on-insulator Multimode interferometers Anisotropic chemical etching
	Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China 作者: Wang W.; Wang L.; Wang L.; Wang L.; Chen W. 收藏 \| 浏览/下载：31/0 \| 提交时间：2013/03/25 We study insertion losses of optical switch when the laser beam is propagating during the free space between two single mode fibers (SMFs) and the related assemblage challenges Then a new packaging structure is developed for the hybrid-integration of free-space MOEMS (micro-opto-electro-mechanical systems) chip with a silicon micromachined submount to improve alignment accuracy. The submount is designed to accommodate various free-space MOEMS chips with minimal active optical alignment thus reducing the packaging cost. The silicon submount has a central recess to place the MOEMS chip in sixteen V-grooves for optical fibers and micropits for micro ball lenses all bulk micromachined at the same time by a single anisotropic wet etching step. A corner compensation technique is employed to prevent erosion of the convex corners where different geometries meet. Through this assembling method the fiber micro ball lens can be aligned preciously thus reduced lateral and angular misalignment between them. Then total insertion losses can be decreased.