机构

• 近代物理研究所 [4]

采集方式

• OAI收割 [4]

内容类型

• 期刊论文 [4]

发表日期

• 2010 [2]
• 2006 [1]
• 1999 [1]

学科主题

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Overview of the Shanghai EBIT 期刊论文  OAI收割 JOURNAL OF INSTRUMENTATION, 2010, 卷号: 5, 页码: 10 作者:  Fu, Y.;  Yao, K.;  Wei, B.;  Lu, D.;  Hutton, R.   |  收藏  |  浏览/下载：21/0  |  提交时间：2018/05/31 Ion sources (positive ions, negative ions, electron cyclotron resonance (ECR), electron beam (EBIS))  Plasma diagnostics - charged-particle spectroscopy  Ionization and excitation processes   Effects of radio-frequency bias on silicon oxide films deposited by dual electron cyclotron resonance-radio frequency hybrid plasma 期刊论文  OAI收割 ACTA PHYSICA SINICA, 2010, 卷号: 59, 页码: 1338-1343 作者:  Ke Bo;  Wang Lei;  Ni Tian-Ling;  Ding Fang;  Chen Mu-Di   |  收藏  |  浏览/下载：23/0  |  提交时间：2018/05/31 electron cyclotron resonance-radio frequency dual hybrid plasma  radio-frequency bias  silicon oxide films   Spectroscopic study on pulsed laser ablation of graphite target in ECR nitrogen plasma for carbon nitride film deposition 期刊论文  OAI收割 DIAMOND AND RELATED MATERIALS, 2006, 卷号: 15, 页码: 1350-1356 作者:  Shen, X. K.;  Sun, J.;  Xu, N.   |  收藏  |  浏览/下载：30/0  |  提交时间：2018/05/31 plume emission  carbon nitride  pulsed laser ablation  electron cyclotron resonance microwave discharge  nitrogen plasma   Silicon nitride films synthesized by reactive pulsed laser deposition in an electron cyclotron resonance nitrogen plasma 期刊论文  OAI收割 THIN SOLID FILMS, 1999, 卷号: 350, 页码: 101-105 作者:  Wu, JD;  Sun, J;  Zhong, XX;  Zhou, ZY;  Wu, CZ   |  收藏  |  浏览/下载：26/0  |  提交时间：2018/05/31 reactive pulsed laser deposition  electron cyclotron resonance plasma  silicon nitride