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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
力学研究所 [3]
光电技术研究所 [2]
上海微系统与信息技术... [1]
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OAI收割 [6]
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期刊论文 [6]
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2017 [1]
2009 [2]
2008 [1]
2007 [2]
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Engineerin... [1]
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MEMS-based filter integrating tunable Fabry–Perot cavity and grating
期刊论文
OAI收割
Optics Communications, 2017, 卷号: 402, 页码: 472-477
作者:
Shi, Zhendong
;
Fang, Liang
;
Zhong, Libo
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/11/20
Bandpass filters - Diffraction gratings - Electrostatic actuators - Microelectromechanical devices - Optical filters
Silicon-on-insulation-based deformable mirror array for adaptive optics
期刊论文
OAI收割
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 卷号: 27, 期号: 3, 页码: 1291-1294
作者:
Wang, D. J.
;
Yao, J.
;
Qiu, C. K.
;
Hu, F. R.
;
Fan, T. Q.
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2015/09/21
adaptive optics
electrostatic actuators
finite element analysis
light reflection
micromachining
micromirrors
optical arrays
silicon-on-insulator
surface roughness
Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force
期刊论文
OAI收割
Journal of Colloid and Interface Science, 2009, 卷号: 331, 期号: 2, 页码: 458-462
作者:
Guo JG(郭建刚)
收藏
  |  
浏览/下载:1151/143
  |  
提交时间:2009/08/03
Torsional Nems Actuator
Capillary Force
Instability
Bifurcation
Nanoscale Electrostatic Actuators
Van-Der-Waals
Casimir Force
Stability
Behavior
Plates
Pull-In Instability Of Micro-Switch Actuators: Model Review
期刊论文
OAI收割
International Journal of Nonlinear Sciences and Numerical Simulation, 2008, 页码: 175-183
作者:
Lin WH(林文惠)
;
Zhao YP(赵亚溥)
收藏
  |  
浏览/下载:967/62
  |  
提交时间:2009/08/03
Pull-In
Micro And Nano-Switches
Error Estimation
Theoretical Models
Nanoscale Electrostatic Actuators
Van-Der-Waals
Variational Iteration Method
Rf Mems Switches
Torsional Actuators
Microelectromechanical Systems
Behavior
Parameters
Stability
Forces
Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading
期刊论文
OAI收割
Journal of Microelectromechanical Systems, 2007, 卷号: 16, 期号: 3, 页码: 684-693
作者:
Zhang Y(张吟)
;
Wang YS
;
Li ZH
;
Huang YB
;
Li DC
收藏
  |  
浏览/下载:1219/41
  |  
提交时间:2009/08/03
Actuators
Beams
Electrostatic Analysis
Modeling
Micromachined Beams
Shallow Arches
Bistable Mems
Microactuator
Parameters
Actuators
Stability
Model
Micro-cantilever shocking-acceleration switches with threshold adjusting and 'on'-state latching functions
期刊论文
OAI收割
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 卷号: 17, 期号: 3, 页码: 567-575
Jia, MJ
;
Li, XX
;
Song, ZH
;
Bao, MH
;
Wang, YL
;
Yang, H
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2011/12/17
ELECTROSTATIC ACTUATORS
ACCELEROMETERS
TECHNOLOGY
CIRCUIT