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	Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography 期刊论文 OAI收割 Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355 作者: Y.Song; Bayanheshig; S.Li; S.Jiang; W.Wang \| 收藏 \| 浏览/下载：31/0 \| 提交时间：2020/08/24 Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics
	SGⅡ升级装置主放CSF远场自动准直关键技术研究学位论文 OAI收割工学硕士, 中国科学院自动化研究所: 中国科学院大学, 2015 作者: 刘代金收藏 \| 浏览/下载：60/0 \| 提交时间：2015/09/02 惯性约束聚变神光II升级装置激光准直系统 CSF远场串并行控制 Inertial confinement fusion SG II UP facility laser alignment system CSF far field serial-parallel control
	Research on 10.6 m laser beam monitoring in CO2 laser processing system (EI CONFERENCE) 会议论文 OAI收割 Infrared Materials, Devices, and Applications, November 12, 2007 - November 15, 2007, Beijing, China 作者: Gao Y.; Shao S. 收藏 \| 浏览/下载：25/0 \| 提交时间：2013/03/25 It is a key point of CO2 laser beam monitoring in the CO 2 laser processing system to achieve alignment between CO2 laser and PL (pointing and launching) system. By monitoring the angle offset of CO2 laser beam the compensation can be gotten witch is given to fast-steering mirror to rectify the direction of laser beam. But the normal photoelectric detector can not get the laser signal because of CO2 laser's high energy and long wavelength. Its wavelength is 10.6m and its power can reach kW level. Consequently it is difficult to detect the high-energy 10.6m laser beam directly. So we monitored the output mirror of laser resonator superseded the laser beam indirectly. The laser beam monitoring system could be designed based on CCD laser auto-collimation angular measurement principle and image processing method. In this paper application of CCD laser auto-collimation angular measurement principle and image processing method for CO2 laser beam monitoring system is introduced particularly After design fabrication and alignment the monitoring system can be used for experimental study that including angular measurement accuracy and angle offset measurement of CO2 laser beam. Angle offset range and angle variation rule of CO2 laser beam is also can be acquired for further research.
	Development of an experimental EUVL system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-P.; Zhang L.-C.; Jin C.-S. 收藏 \| 浏览/下载：19/0 \| 提交时间：2013/03/25 An experimental EUVL system has been developed to investigate EUV imaging system design component fabrication assembly technique and experimental process. The system includes a laser produced plasma (LPP) source an ellipsoidal condenser a transmission mask a reduced projection optics and vacuum system. We designed a 10:1 reduction projection optics using Schwarzschild system with spherical mirrors to achieve 0.1m resolution. The Schwarzschild optics coated with Mo/Si multilayers was assembled with wavefront error (WFE) of 0.014 waves RMS at 632.8nm wavelength under computer-aided alignment method. Using this system a fine pattern of less than 0.25m covering a 0.1mm diameter image field of view was clearly replicated on resist-coated wafer.
	Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Zhao J.-L.; Feng X.-G. 收藏 \| 浏览/下载：24/0 \| 提交时间：2013/03/25 Comparing with the writing method of plane pattern spherical pattern' has some remarkable different on several points. Firstly it is difficult to spin-coated a uniform photoresist film on a spherical substrate especially the ratio of spherical radius to caliber is smaller and the spin-coated way must match the ratio of spherical radius to caliber. Secondly if the sphere couldn't be regarded as a plane a so-called concentric optical scan movement way must be applied for the generation of spherical pattern because the reflex of substrate will affect the quantity of illumination. Commonly an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise the exposure time of photoresist will be different and the line widths of pattern will be also different at different areas. Fourthly commonly because the errors of concentric machine and substrate surface shape are bigger so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.
	基于远近光场耦合测量的超短超强激光束靶耦合技术学位论文 OAI收割作者: 杨野 \| 收藏 \| 浏览/下载：34/0 \| 提交时间：2018/12/26 高功率激光准直 Alignment system of high-power laser 束靶耦合技术 Laser and target alignment technology 超短超强激光 Ultra-short and ultra-intense laser 离轴抛物镜 Off-axis parabolic mirror 惯性约束聚变 Inertial confinement fusion