机构

• 半导体研究所 [4]
• 高能物理研究所 [2]

采集方式

• OAI收割 [5]
• iSwitch采集 [1]

内容类型

• 期刊论文 [6]

发表日期

• 2008 [1]
• 2007 [1]
• 2005 [3]
• 2002 [1]

学科主题

• Physics [2]
• 半导体物理 [2]
• 半导体材料 [1]

筛选

浏览/检索结果: 共6条，第1-6条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 High rate deposition of microcrystalline silicon films by high-pressure radio frequency plasma enhanced chemical vapor deposition (PECVD) 期刊论文  OAI收割 science in china series e-technological sciences, 2008, 卷号: 51, 期号: 4, 页码: 371-377 Zhou, BQ; Zhu, MF; Liu, FZ; Liu, JL; Zhou, YQ; Li, GH; Ding, K 收藏  |  浏览/下载：60/5  |  提交时间：2010/03/08 radio-frequency plasma enhanced chemical vapor deposition (rf-PECVD)  microcrystalline silicon film  high rate deposition   Studies on surface roughness and growth mechanisms of microcrystalline silicon films by grazing incidence X-ray reflectivity 期刊论文  OAI收割 ACTA PHYSICA SINICA, 2007, 卷号: 56, 期号: 4, 页码: 2422-2427 作者:  Zhou, BQ;  Liu, FZ;  Zhu, MF;  Zhou, YQ;  Wu, ZH 收藏  |  浏览/下载：27/0  |  提交时间：2016/06/29 grazing incidence X-ray reflectivity  microcrystalline silicon film  surface roughness  growth mechanism   Study on growth mechanism of low-temperature prepared microcrystalline si thin films 期刊论文  iSwitch采集 Acta physica sinica, 2005, 卷号: 54, 期号: 4, 页码: 1890-1894 作者:  Gu, JH;  Zhou, YQ;  Zhu, MF;  Li, GH;  Kun, D 收藏  |  浏览/下载：39/0  |  提交时间：2019/05/12 Growth mechanism  Microcrystalline silicon thin film  Surface morphology  Hot wire chemical vapor deposition   The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering 期刊论文  OAI收割 ACTA PHYSICA SINICA, 2005, 卷号: 54, 期号: 5, 页码: 2172-2175 作者:  Zhou, BQ;  Liu, FZ;  Zhu, MF;  Gu, JH;  Zhou, YQ 收藏  |  浏览/下载：38/0  |  提交时间：2016/06/29 hydrogenated microcrystalline silicon thin film  microstructure  micro-voids  small-angle x-ray scattering   The microstructure of hydrogenated microcrystalline silicon thin films studied by small-angle x-ray scattering 期刊论文  OAI收割 acta physica sinica, 2005, 卷号: 54, 期号: 5, 页码: 2172-2175 Zhou BQ; Liu FZ; Zhu MF; Gu JH; Zhou YQ; Liu JL; Dong BZ; Li GH; Ding K 收藏  |  浏览/下载：92/48  |  提交时间：2010/03/17 hydrogenated microcrystalline silicon thin film   Micro-Raman study on hydrogenated protocrystalline silicon films 期刊论文  OAI收割 acta physica sinica, 2002, 卷号: 51, 期号: 8, 页码: 1811-1815 Zhang SB; Liao XB; An L; Yang FH; Kong GL; Wang YQ; Xu YY; Chen CY; Diao HW 收藏  |  浏览/下载：68/0  |  提交时间：2010/08/12 amorphous silicon  film  Raman scattering  microstructure  SI-H FILMS  MICROCRYSTALLINE SILICON  AMORPHOUS SI  LIGHT-SCATTERING  SPECTRA