中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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浏览/检索结果: 共23条,第1-10条 帮助

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The research about micromachining accuracy control based on fuzzy evaluation algorithm 期刊论文  OAI收割
Concurrency and Computation-Practice & Experience, 2019, 卷号: 31, 期号: 10, 页码: 8
作者:  
J.Qiao;  Q.H.Lu;  W.B.Zhang;  X.Y.Xue
  |  收藏  |  浏览/下载:20/0  |  提交时间:2020/08/24
Beam Shaping Performance Based on Metallic Corrugated Grooves and Dielectric Periodic Gratings at 500 GHz 期刊论文  OAI收割
IEEE ACCESS, 2018, 卷号: 6, 页码: 42507-42515
作者:  
Ding, Jiang-Qiao;  Hu, Jie;  Shi, Sheng-Cai;  Zhao, Yun
  |  收藏  |  浏览/下载:39/0  |  提交时间:2019/04/08
Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator 会议论文  OAI收割
Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA, OCT 26-29, 2017OCT 26-29, 2017
作者:  
Ma, Wenying;  Ma, Changwei;  Wang, Weimin
  |  收藏  |  浏览/下载:54/0  |  提交时间:2019/08/23
Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect 期刊论文  OAI收割
Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419
作者:  
Wang, Weimin;  Tao, Fenggang;  Wang, Qiang;  Qiu, Chuankai;  Chen, Zexiang
  |  收藏  |  浏览/下载:29/0  |  提交时间:2018/11/20
Effects of Laser Repetition Rate and Fluence on Micromachining of TiC Ceramic 期刊论文  OAI收割
materials and manufacturing processes, 2016, 卷号: 31, 期号: 7, 页码: 832-837
作者:  
Zhang, Ying;  Wang, Yuqian
收藏  |  浏览/下载:40/0  |  提交时间:2016/04/20
Investigation of femtosecond laser-induced periodic surface structure on tungsten 期刊论文  OAI收割
guangxue xuebao/acta optica sinica, 2016, 卷号: 36, 期号: 5
作者:  
Li, Chen;  Cheng, Guanghua;  Razvan, Stoian
收藏  |  浏览/下载:28/0  |  提交时间:2016/10/14
Micromachining features of TiC ceramic by femtosecond pulsed laser 期刊论文  OAI收割
ceramics international, 2015, 卷号: 41, 期号: 5, 页码: 6525-6533
作者:  
Zhang, Ying;  Wang, Yuqian;  Zhang, Junzhan;  Liu, Yongsheng;  Yang, Xiaojun
收藏  |  浏览/下载:49/0  |  提交时间:2015/07/20
Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文  OAI收割
Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4
作者:  
Miao, J(苗静);  Shen, WJ(沈文江);  He, CD;  Xue, CY;  Xiong, JJ
收藏  |  浏览/下载:84/0  |  提交时间:2015/12/31
silicon  elemental semiconductors  silicon-on-insulator  wafer bonding  electromechanical effects  ultrasonic transducers  capacitive transducers  micromechanical devices  micromachining  vibrations  membranes  finite element analysis  reliability  capacitance  electromechanical coupling coefficient  capacitive micromachined ultrasonic transducer  impedance matching  propagation medium  microelectromechanical system capacitive ultrasonic transducer  silicon on insulator  wafer bonding  optimum geometric dimensions  membrane mechanical vibration  electrical characteristics  finite-element analysis  operation mode  device safety  device reliability  equivalent stress  operation-collapse voltage  bottom electrodes  glass substrate surface  parallel parasitic capacitance  Si  SiO2  
Research on PVDF micro-force sensor 会议论文  OAI收割
4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014, Guilin, China, June 19-20, 2014
作者:  
Ma CZ(马超哲);  Du JS(杜劲松);  Liu YY(刘意杨)
收藏  |  浏览/下载:41/0  |  提交时间:2014/11/03
Ultrafast lasers-reliable tools for advanced materials processing 期刊论文  OAI收割
light-sci. appl., 2014, 卷号: 3, 页码: e149
作者:  
Sugioka, Koji;  Cheng, Ya
收藏  |  浏览/下载:25/0  |  提交时间:2016/11/28