中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
上海光学精密机械研究... [5]
上海微系统与信息技术... [4]
光电技术研究所 [3]
沈阳自动化研究所 [3]
西安光学精密机械研究... [3]
力学研究所 [2]
更多
采集方式
OAI收割 [23]
内容类型
期刊论文 [18]
会议论文 [4]
学位论文 [1]
发表日期
2019 [1]
2018 [2]
2017 [1]
2016 [2]
2015 [2]
2014 [3]
更多
学科主题
Engineerin... [2]
Engineerin... [1]
Engineerin... [1]
光学 [1]
工业技术 [1]
数理科学和化学 [1]
更多
筛选
浏览/检索结果:
共23条,第1-10条
帮助
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
提交时间升序
提交时间降序
作者升序
作者降序
发表日期升序
发表日期降序
The research about micromachining accuracy control based on fuzzy evaluation algorithm
期刊论文
OAI收割
Concurrency and Computation-Practice & Experience, 2019, 卷号: 31, 期号: 10, 页码: 8
作者:
J.Qiao
;
Q.H.Lu
;
W.B.Zhang
;
X.Y.Xue
  |  
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2020/08/24
accuracy control,fuzzy algorithm,micromachining,machining accuracy,nonlinear cluster training,genetic algorithm,Computer Science
Beam Shaping Performance Based on Metallic Corrugated Grooves and Dielectric Periodic Gratings at 500 GHz
期刊论文
OAI收割
IEEE ACCESS, 2018, 卷号: 6, 页码: 42507-42515
作者:
Ding, Jiang-Qiao
;
Hu, Jie
;
Shi, Sheng-Cai
;
Zhao, Yun
  |  
收藏
  |  
浏览/下载:39/0
  |  
提交时间:2019/04/08
Beam shaping characteristic
leaky-wave antenna
micromachining
surface plasmon (SP)
terahertz (THz)
Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator
会议论文
OAI收割
Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA, OCT 26-29, 2017OCT 26-29, 2017
作者:
Ma, Wenying
;
Ma, Changwei
;
Wang, Weimin
  |  
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2019/08/23
Adaptive optics
Deformation
Delta modulation
Electromechanical devices
Laser pulses
MEMS
Mirrors
Structural design
Surface micromachining
Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect
期刊论文
OAI收割
Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419
作者:
Wang, Weimin
;
Tao, Fenggang
;
Wang, Qiang
;
Qiu, Chuankai
;
Chen, Zexiang
  |  
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2018/11/20
Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining
Effects of Laser Repetition Rate and Fluence on Micromachining of TiC Ceramic
期刊论文
OAI收割
materials and manufacturing processes, 2016, 卷号: 31, 期号: 7, 页码: 832-837
作者:
Zhang, Ying
;
Wang, Yuqian
收藏
  |  
浏览/下载:40/0
  |  
提交时间:2016/04/20
Composition
Femtosecond
Fluence
Laser
Micromachining
Morphology
Repetition rate
TiC
Investigation of femtosecond laser-induced periodic surface structure on tungsten
期刊论文
OAI收割
guangxue xuebao/acta optica sinica, 2016, 卷号: 36, 期号: 5
作者:
Li, Chen
;
Cheng, Guanghua
;
Razvan, Stoian
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2016/10/14
Electromagnetic fields
Electromagnetic waves
Hydrophilicity
Hydrophobicity
Laser pulses
Micromachining
Periodic structures
Surface structure
Time domain analysis
Tungsten
Ultrashort pulses
Micromachining features of TiC ceramic by femtosecond pulsed laser
期刊论文
OAI收割
ceramics international, 2015, 卷号: 41, 期号: 5, 页码: 6525-6533
作者:
Zhang, Ying
;
Wang, Yuqian
;
Zhang, Junzhan
;
Liu, Yongsheng
;
Yang, Xiaojun
收藏
  |  
浏览/下载:49/0
  |  
提交时间:2015/07/20
Titanium carbide ceramic
Morphology
Micromachining
Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient
期刊论文
OAI收割
Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4
作者:
Miao, J(苗静)
;
Shen, WJ(沈文江)
;
He, CD
;
Xue, CY
;
Xiong, JJ
收藏
  |  
浏览/下载:84/0
  |  
提交时间:2015/12/31
silicon
elemental semiconductors
silicon-on-insulator
wafer bonding
electromechanical effects
ultrasonic transducers
capacitive transducers
micromechanical devices
micromachining
vibrations
membranes
finite element analysis
reliability
capacitance
electromechanical coupling coefficient
capacitive micromachined ultrasonic transducer
impedance matching
propagation medium
microelectromechanical system capacitive ultrasonic transducer
silicon on insulator
wafer bonding
optimum geometric dimensions
membrane mechanical vibration
electrical characteristics
finite-element analysis
operation mode
device safety
device reliability
equivalent stress
operation-collapse voltage
bottom electrodes
glass substrate surface
parallel parasitic capacitance
Si
SiO2
Research on PVDF micro-force sensor
会议论文
OAI收割
4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014, Guilin, China, June 19-20, 2014
作者:
Ma CZ(马超哲)
;
Du JS(杜劲松)
;
Liu YY(刘意杨)
收藏
  |  
浏览/下载:41/0
  |  
提交时间:2014/11/03
Manufacture
Micromachining
Piezoelectricity
Signal processing
Ultrafast lasers-reliable tools for advanced materials processing
期刊论文
OAI收割
light-sci. appl., 2014, 卷号: 3, 页码: e149
作者:
Sugioka, Koji
;
Cheng, Ya
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2016/11/28
3D fabrication
industrial application
micromachining
nanofabrication
ultrafast laser