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浏览/检索结果: 共12条，第1-10条 帮助

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Plasmonic Interference Lithography for Low-Cost Fabrication of Dense Lines with Sub-50 nm Half-Pitch 期刊论文  OAI收割
ACS Applied Nano Materials, 2019, 卷号: 2, 期号: 1, 页码: 489-496
作者:  Kong, Weijie;  Luo, Yunfei;  Zhao, Chengwei;  Liu, Ling;  Gao, Ping
  |  收藏  |  浏览/下载：30/0  |  提交时间：2021/05/06
Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review 期刊论文  OAI收割
MICROMACHINES, 2016, 卷号: 7, 期号: 7
作者:  Wang, Changtao;  Zhang, Wei;  Zhao, Zeyu;  Wang, Yanqin;  Gao, Ping
收藏  |  浏览/下载：29/0  |  提交时间：2016/11/15
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  Zhao Y.;  Zhang W.;  Zhang W.;  Li S.;  Gong Y.
收藏  |  浏览/下载：17/0  |  提交时间：2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.  
Near-field beam pattern measurement of qualification model of ALMA band 8 (385-500 GHz) cartridge receiver 期刊论文  OAI收割
EXPERIMENTAL ASTRONOMY, 2009, 卷号: 24, 期号: 1-3, 页码: 89-107
作者:  Naruse, Masato;  Ito, Tetsuya;  Sekimoto, Yutaro;  Toba, Hiroyuki;  Satou, Naohisa
收藏  |  浏览/下载：18/0  |  提交时间：2011/12/08
Plasmon-related optical properties of unpenetrated metallic periodic structures 期刊论文  OAI收割
OPTICAL MATERIALS, 2006, 卷号: 29, 期号: 2-3, 页码: 211-215
作者:  Luo, Xiangang;  Ma, Junxian;  Ishihara, Terry
收藏  |  浏览/下载：32/0  |  提交时间：2015/09/21
Oil-immersion or solid-immersion power enhancement of very-small-aperture lasers 期刊论文  iSwitch采集
Laser physics letters, 2006, 卷号: 3, 期号: 6, 页码: 278-282
作者:  Gan, Q.;  Song, G.;  Chen, L.
收藏  |  浏览/下载：14/0  |  提交时间：2019/05/12
Detect the sub-wavelength data by applying a very-small-aperture laser 期刊论文  iSwitch采集
Laser physics letters, 2006, 卷号: 3, 期号: 4, 页码: 185-189
作者:  Gan, Q;  Song, G;  Yang, G;  Li, Y;  Chen, L
收藏  |  浏览/下载：29/0  |  提交时间：2019/05/12
Detect the sub-wavelength data by applying a very-small-aperture laser 期刊论文  OAI收割
laser physics letters, 2006, 卷号: 3, 期号: 4, 页码: 185-189
Gan Q; Song G; Yang G; Li Y; Chen L
收藏  |  浏览/下载：43/0  |  提交时间：2010/04/11
Fabrication process and power and lifetime characteristics of very-small-aperture laser 期刊论文  OAI收割
acta physica sinica, 2006, 卷号: 54, 期号: 12, 页码: 5609-5613
Song GF; Gan QQ; Qu X; Fang PY; Gao JX; Cao Q; Xu J; Kang XN; Xu Y; Zhong Y; Yang GH; Chen LH
收藏  |  浏览/下载：60/0  |  提交时间：2010/04/11
Oil-immersion or solid-immersion power enhancement of very-small-aperture lasers 期刊论文  OAI收割
laser physics letters, 2006, 卷号: 3, 期号: 6, 页码: 278-282
Gan Q (Gan Q.); Song G (Song G.); Chen L (Chen L.)
收藏  |  浏览/下载：55/0  |  提交时间：2010/04/11