中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
金属研究所 [3]
上海微系统与信息技术... [3]
半导体研究所 [3]
采集方式
OAI收割 [9]
内容类型
期刊论文 [9]
发表日期
2011 [1]
2007 [1]
2006 [2]
2004 [1]
2003 [1]
2002 [2]
更多
学科主题
Engineerin... [1]
Materials ... [1]
Physics, C... [1]
半导体器件 [1]
半导体材料 [1]
微电子学 [1]
更多
筛选
浏览/检索结果:
共9条,第1-9条
帮助
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
提交时间升序
提交时间降序
作者升序
作者降序
发表日期升序
发表日期降序
Influence of high-dose nitrogen implantation on the positive charge density of the buried oxide of silicon-on-insulator wafers
期刊论文
OAI收割
acta physica sinica, 2011, 卷号: 60, 期号: 5, 页码: article no.56104
作者:
Yu F
收藏
  |  
浏览/下载:106/6
  |  
提交时间:2011/07/06
separation by oxygen implantation
buried oxide
nitrogen implantation
positive charge density
RADIATION HARDNESS
IMPLANTING NITROGEN
ION-IMPLANTATION
IMPROVEMENT
TECHNOLOGY
OXYGEN
LAYER
Surface modification of poly(propylene carbonate) by oxygen ion implantation
期刊论文
OAI收割
Applied Surface Science, 2007, 卷号: 253, 期号: 12, 页码: 5436-5441
J. Z. Zhang
;
J. C. Kang
;
P. Hu
;
Q. L. Meng
收藏
  |  
浏览/下载:46/0
  |  
提交时间:2012/04/13
poly(propylene carbonate)
oxygen ion implantation
surface modification
positron-annihilation
polymer surfaces
polystyrene
polycarbonate
behavior
Effect of ion implantation upon erosion resistance of polyimide films in space environment
期刊论文
OAI收割
Transactions of Nonferrous Metals Society of China, 2006, 卷号: 16, 页码: S661-S664
S. W. Duo
;
M. S. Li
;
Y. C. Zhou
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2012/04/13
atomic oxygen
ion implantation
surface modification
polyamide
erosion resistance
atomic oxygen
polymeric materials
coatings
Research on nitrogen implantation energy dependence of the properties of SIMON materials
期刊论文
OAI收割
nuclear instruments & methods in physics research section b-beam interactions with materials and atoms, 2006, 卷号: 242, 期号: 1-2, 页码: 585-587
Zhang EX
;
Sun JY
;
Chen J
;
Chen M
;
Zhang ZX
;
Li N
;
Zhang GQ
;
Wang X
收藏
  |  
浏览/下载:308/0
  |  
提交时间:2010/04/11
nitrogen
ion implantation
SIMOX
implantation energy
C-V measurement
CHARGE
OXYGEN
OXIDES
LAYERS
Optimized implant dose and energy to fabricate high-quality patterned SIMOX SOI materials
期刊论文
OAI收割
SOLID STATE COMMUNICATIONS, 2004, 卷号: 130, 期号: 3-4, 页码: 275-279
Dong, YM
;
Chen, J
;
Wang, X
;
Chen, M
;
Wang, X
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2012/03/24
SILICON-ON-INSULATOR
OXYGEN-ION-IMPLANTATION
SEPARATION
EVOLUTION
DESIGN
Broaden buried oxide layer of SOI structure in SIMOX using water plasma
期刊论文
OAI收割
2003 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS, 2003, 页码: 181-182
Chen, J
;
Dong, YM
;
Wang, X
;
Yi, WB
;
Wang, X
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2012/03/24
ION-IMPLANTATION
SILICON
OXYGEN
Influence of aging on the morphology and wettability of polytetrafluoroethylene implanted by high-fluence carbon ion
期刊论文
OAI收割
Materials Letters, 2002, 卷号: 56, 期号: 4, 页码: 410-417
J. Z. Zhang
;
L. H. Xu
;
X. J. Yu
;
X. H. Liu
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2012/04/14
PTFE
carbon ion implantation
wettability
aging effect after I year
beam-assisted deposition
surface modification
atomic oxygen
irradiation
polymers
adhesion
plasma
films
The study of the formation of thin SOI structure by SIMOX with water plasma
期刊论文
OAI收割
MATERIALS ISSUES IN NOVEL SI-BASED TECHNOLOGY, 2002, 卷号: 686, 页码: 47-52
Jing,C
;
Meng,C
;
Xiang,W
;
Dong,YM
;
Zhihong,Z
;
Xi,W
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2012/03/24
OXYGEN ION-IMPLANTATION
SILICON
OXIDE
The new exploration for proton-implanted silicon: the conversion of a surface-region-purification-induced p-n junction into a p-i-n electrical structure approaching silicon on insulator
期刊论文
OAI收割
semiconductor science and technology, 2000, 卷号: 15, 期号: 2, 页码: l6-l9
Li JM
收藏
  |  
浏览/下载:47/0
  |  
提交时间:2010/08/12
ION-IMPLANTATION
HYDROGEN
OXYGEN