机构

• 上海光学精密机械研究... [4]
• 长春光学精密机械与物... [1]
• 西安光学精密机械研究... [1]

采集方式

• OAI收割 [6]

内容类型

• 期刊论文 [3]
• 会议论文 [2]
• 学位论文 [1]

发表日期

• 2020 [1]
• 2010 [1]
• 2009 [1]
• 2006 [1]
• 2005 [1]

学科主题

• 光学工程 [1]

筛选

浏览/检索结果: 共6条，第1-6条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Design of a zoom projection optical system for high resolution projector 会议论文  OAI收割 Beijing, China, 2020-11-30 作者:  Qin, Guang;  Fan, Xuewu;  Ma, Zixuan;  Zhang, Gengyao   |  收藏  |  浏览/下载：32/0  |  提交时间：2020/12/29 zoom projection lens  optical design  DMD  projection optics   New LED illumination optical engine for micro-projection display (EI CONFERENCE) 会议论文  OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, April 26, 2010 - April 29, 2010, Dalian, China 作者:  Meng Z.;  Meng Z. 收藏  |  浏览/下载：21/0  |  提交时间：2013/03/25 A new optical engine consisting of LEDs  rectangular CPC  rectangular lens array and micro display chip DMD is designed by using of KOLA illumination algorithm for micro-projection display. Detail description and analysis of the rectangular CPC and rectangular lens array are provided. The influence due to the size of rectangular CPC and rectangular lens array is analysed for illuminance uniformity on the DMD chip and light energy efficiency of the optical engine system by software ZEMAX. Based on the analysis of parameter of rectangular lens array  the size of rectangular lens array more decrease the illumination uniformity. Experimental results show that the proposed illumination light optical engine can obtain perfect rectangular focula with higher light uniformity more than 90 % and higher energy efficiency of 40 % to meet the needs of micro-projection display  at the same time the designed illumination optical engine compared with other uniformizing light algorithm have advantages such as: lesser capacity  high illumination uniformity. 2010 Copyright SPIE - The International Society for Optical Engineering.   Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width 期刊论文  OAI收割 appl. optics, 2009, 卷号: 48, 期号: 2, 页码: 261, 269 Qiu Zicheng; 王向朝; Yuan Qiongyan; Wang Fan 收藏  |  浏览/下载：1153/199  |  提交时间：2009/09/18 LITHOGRAPHY SIMULATION  ABERRATION MEASUREMENT  PROJECTION OPTICS  LENS ABERRATIONS  TOOLS   Coma measurement using a PSM and transmission image sensor 期刊论文  OAI收割 optik, 2006, 卷号: 117, 期号: 1, 页码: 21, 25 Wang F; Wang XZ; 马明英; Zhang DQ; Shi WJ; Hu HM 收藏  |  浏览/下载：1758/343  |  提交时间：2009/09/18 optical lithography  aberrations  projection lens  image quality  Zernike coefficients   一种新的光刻机像质参数热漂移检测技术 期刊论文  OAI收割 中国激光, 2005, 卷号: 32, 期号: 12, 页码: 1668, 1672 张冬青; 王向朝; 施伟杰; 马明英; 王帆 收藏  |  浏览/下载：1353/253  |  提交时间：2009/09/18 测量  measurement  最佳焦面热漂移  thermal drift of best focus  放大倍率热漂移  thermal drift of magnification  投影物镜  projection lens  光刻机  lithographic tool  原位检测  in-situ measurement   浸没式光刻机投影物镜波像差检测技术研究 学位论文  OAI收割 作者:  诸波尔   |  收藏  |  浏览/下载：158/0  |  提交时间：2018/12/26 浸没式光刻机  Immersion lithography tool  投影物镜  Projection lens  波像差检测  Wavefront aberration measurement  空间像  Aerial image  主成分分析  Principal component analysis (PCA)