机构

• 上海微系统与信息技... [20]

采集方式

• OAI收割 [20]

内容类型

• 期刊论文 [19]
• 学位论文 [1]

发表日期

• 2009 [2]
• 2008 [2]
• 2007 [3]
• 2006 [4]
• 2004 [3]
• 2002 [3]
• 更多

学科主题

• Engineerin... [3]
• Engineerin... [2]
• Engineerin... [2]
• Physics, A... [2]
• Applied [1]
• Applied; P... [1]
• 更多

筛选

浏览/检索结果: 共20条，第1-10条 帮助 限定条件 专题：上海微系统与信息技术研究所    第一署名单位    第一作者单位    通讯作者单位     条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序题名升序题名降序作者升序作者降序发表日期升序发表日期降序 A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings 期刊论文  OAI收割 SENSORS AND ACTUATORS A-PHYSICAL, 2009, 卷号: 150, 期号: 2, 页码: 296-301 Zhou, HB; Li, G; Sun, XN; Zhu, ZH; Xu, BJ; Jin, QH; Zhao, JL; Ren, QS 收藏  |  浏览/下载：17/0  |  提交时间：2011/12/17 SCANNING PROBE MICROSCOPY  ATOMIC-FORCE MICROSCOPE  DRUG-DELIVERY  TECHNOLOGY  MICRONEEDLE  ELECTRODES  NEEDLES  CELLS  MOLD   YOUNG'S MODULUS SIZE EFFECT OF SCS NANOBEAM BY TENSILE TESTING IN ELECTRON MICROSCOPY 期刊论文  OAI收割 2009 IEEE SENSORS, VOLS 1-3, 2009, 页码: 205-208 Jin, QH; Li, T; Wang, YL; Li, XX; Yang, H; Xu, FF 收藏  |  浏览/下载：9/0  |  提交时间：2011/12/17 MECHANICAL-PROPERTIES  SILICON  FABRICATION  AFM   Phenomenologically modeling the formation and evolution of the solid electrolyte interface on the graphite electrode for lithium-ion batteries 期刊论文  OAI收割 ELECTROCHIMICA ACTA, 2008, 卷号: 53, 期号: 24, 页码: 7069-7078 Yan, J; Xia, BJ; Su, YC; Zhou, XZ; Zhang, J; Zhang, XG 收藏  |  浏览/下载：16/0  |  提交时间：2011/11/04 ATOMIC-FORCE MICROSCOPY  SURFACE-CHEMISTRY  THIN-FILMS  RECHARGEABLE BATTERIES  PROPYLENE CARBONATE  PYROLYTIC-GRAPHITE  LI  INTERCALATION  DECOMPOSITION  PERFORMANCE   A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction 期刊论文  OAI收割 REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 卷号: 79, 期号: 3, 页码: 33701-33701 Bao, HF; Li, XX 收藏  |  浏览/下载：12/0  |  提交时间：2011/12/17 ATOMIC-FORCE MICROSCOPE  GLASS-TRANSITION TEMPERATURE  POLYMER-FILMS  POLY(METHYL METHACRYLATE)  CANTILEVERS  THICKNESS  DYNAMICS   Growth of single-walled carbon nanotubes on the given locations for AFM tips 期刊论文  OAI收割 ACTA PHYSICO-CHIMICA SINICA, 2007, 卷号: 23, 期号: 4, 页码: 565-568 Wang, R; Xu, HM; Li, D; Liang, J 收藏  |  浏览/下载：6/0  |  提交时间：2012/03/24 ATOMIC-FORCE MICROSCOPY   Experimental study on resonant response of piezoresistive double-clamped (111)-Si nano-beam 期刊论文  OAI收割 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2007, 页码: 560-563 Zhao, QB; Jiao, JW; Yang, H; Duan, F; Lin, ZX; Li, T; Zhang, Y; Wang, YL 收藏  |  浏览/下载：17/0  |  提交时间：2011/12/17 ATOMIC-FORCE MICROSCOPE  FABRICATION  CANTILEVERS  TECHNOLOGY  THICK   Experimental study on resonant response of piezoresistive double-clamped (111)-Si nano-beam 期刊论文  OAI收割 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2007, 页码: 560-563 Zhao, QB; Jiao, JW; Yang, H; Duan, F; Lin, ZX; Li, T; Zhang, Y; Wang, YL 收藏  |  浏览/下载：14/0  |  提交时间：2011/12/17 ATOMIC-FORCE MICROSCOPE  FABRICATION  CANTILEVERS  TECHNOLOGY  THICK   A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals 期刊论文  OAI收割 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 卷号: 16, 期号: 12, 页码: 2539-2546 Li, P; Li, XX 收藏  |  浏览/下载：10/0  |  提交时间：2011/12/17 ATOMIC-FORCE MICROSCOPE  MICROCANTILEVER SENSORS  INDUCED DEFLECTIONS  SURFACE STRESS  FABRICATION  PROBE   Silicon dioxide microcantilever with piezoresistive element integrated for portable ultraresoluble gaseous detection 期刊论文  OAI收割 APPLIED PHYSICS LETTERS, 2006, 卷号: 89, 期号: 7, 页码: 74104-74104 Li, P; Li, XX; Zuo, GM; Liu, J; Wang, YL; Liu, M; Jin, DZ 收藏  |  浏览/下载：12/0  |  提交时间：2011/12/17 ATOMIC-FORCE MICROSCOPY  SURFACE STRESS  EXPLOSIVES   A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals 期刊论文  OAI收割 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 卷号: 16, 期号: 12, 页码: 2539-2546 Li, P; Li, XX 收藏  |  浏览/下载：10/0  |  提交时间：2011/12/17 ATOMIC-FORCE MICROSCOPE  MICROCANTILEVER SENSORS  INDUCED DEFLECTIONS  SURFACE STRESS  FABRICATION  PROBE