中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 上海微系统与信息技... [38]
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  • 2008 [38]
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相变存储器电学性能测试系统与存储性能演示系统研究 学位论文  OAI收割
硕士, 上海微系统与信息技术研究所: 中国科学院上海微系统与信息技术研究所, 2008
梁爽
收藏  |  浏览/下载:69/0  |  提交时间:2012/03/06
Polycrystalline Si-rich SiSbx bottom heating layer for phase change memory 期刊论文  OAI收割
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 卷号: 11, 期号: 6, 页码: H147-H149
Rao, F; Song, ZT; Zhang, T; Gong, YF; Wu, LC; Feng, SL; Chen, B
收藏  |  浏览/下载:17/0  |  提交时间:2012/03/24
Investigation of environmental friendly Te-free SiSb material for applications of phase-change memory 期刊论文  OAI收割
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2008, 卷号: 23, 期号: 5, 页码: 55010-55010
Zhang, T; Song, ZT; Liu, B; Feng, SL
收藏  |  浏览/下载:17/0  |  提交时间:2012/03/24
Reactive-ion etching of Sn-doped Ge2Sb2Te5 in CHF3/O-2 plasma for non-volatile phase-change memory device 期刊论文  OAI收割
THIN SOLID FILMS, 2008, 卷号: 516, 期号: 21, 页码: 7871-7874
Xu, C; Liu, B; Song, ZT; Feng, SL; Chen, BM
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24
Oxidant addition effect on Ge2Sb2Te5 phase change film chemical mechanical polishing 期刊论文  OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 卷号: 155, 期号: 11, 页码: H929-H931
Zhong, M; Song, ZT; Liu, B; Feng, SL; Chen, B
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24
Comparison of the crystallization of Ge-Sb-Te and Si-Sb-Te in a constant-temperature annealing process 期刊论文  OAI收割
SCRIPTA MATERIALIA, 2008, 卷号: 58, 期号: 11, 页码: 977-980
Zhang, T; Cheng, Y; Song, ZT; Liu, B; Feng, SL; Han, XD; Zhang, Z; Chen, B
收藏  |  浏览/下载:15/0  |  提交时间:2012/03/24
Germanium nitride interfacial layer for chalcogenide random access memory applications 期刊论文  OAI收割
APPLIED PHYSICS EXPRESS, 2008, 卷号: 1, 期号: 1, 页码: 11201-11201
Shen, J; Liu, B; Song, Z; Xu, C; Rao, F; Liang, S; Feng, S; Chen, B
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24
Reactive ion etching as cleaning method post chemical mechanical polishing for phase change memory device 期刊论文  OAI收割
CHINESE PHYSICS LETTERS, 2008, 卷号: 25, 期号: 2, 页码: 762-764
Zhong, M; Song, ZT; Liu, B; Feng, SL; Chen, B
收藏  |  浏览/下载:13/0  |  提交时间:2012/03/24
Properties of seamless W sub-micro electrode used for phase change memory 期刊论文  OAI收割
CHINESE PHYSICS LETTERS, 2008, 卷号: 25, 期号: 6, 页码: 2289-2291
Feng, GM; Song, ZT; Liu, B; Feng, SL; Wan, XD
收藏  |  浏览/下载:13/0  |  提交时间:2012/03/24
Switching reliability improvement of phase change memory with nanoscale damascene structure by Ge2Sb2Te5CMP process 期刊论文  OAI收割
ELECTRONICS LETTERS, 2008, 卷号: 44, 期号: 4, 页码: 322-323
Zhong, M; Song, ZT; Liu, B; Wang, LY; Feng, SL
收藏  |  浏览/下载:10/0  |  提交时间:2012/03/24