机构

• 光电技术研究所 [8]

采集方式

• OAI收割 [8]

内容类型

• 期刊论文 [5]
• 会议论文 [3]

发表日期

• 2014 [2]
• 2013 [3]
• 2012 [1]
• 2010 [1]
• 2005 [1]

学科主题

• Altitude c... [1]
• Computer s... [1]
• Interferom... [1]

筛选

浏览/检索结果: 共8条，第1-8条 帮助 限定条件 专题：光电技术研究所    第一署名单位    第一作者单位    通讯作者单位     条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Extended range phase-sensitive swept source interferometer for real-time dimensional metrology 期刊论文  OAI收割 OPTICS COMMUNICATIONS, 2014, 卷号: 318, 页码: 88-94 作者:  Shen, Yi;  Ding, Zhihua;  Yan, Yangzhi;  Wang, Chuan;  Yang, Yaliang 收藏  |   Extended range phase-sensitive swept source interferometer for real-time dimensional metrology 期刊论文  OAI收割 Optics Communications, 2014, 卷号: 318, 页码: 88-94 作者:  Shen, Yi;  Ding, Zhihua;  Yan, Yangzhi;  Wang, Chuan;  Yang, Yaliang 收藏  |   Carrier Diffusivity Measurement in Silicon Wafers Using Free Carrier Absorption 期刊论文  OAI收割 INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2013, 卷号: 34, 期号: 8-9, 页码: 1721-1726 作者:  Zhang, Xiren;  Li, Bincheng 收藏  |   Carrier diffusivity measurement in silicon wafers using free carrier absorption 期刊论文  OAI收割 International Journal of Thermophysics, 2013, 卷号: 34, 期号: 8-9, 页码: 1721-1726 作者:  Zhang, Xiren;  Li, Bincheng 收藏  |   The error analysis and correcting of scale tape grating encoder 会议论文  OAI收割 Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications, 2013 作者:  Pan, Nian;  Ma, Wenli;  Huang, Jinlong 收藏  |   Technology of focus detection for 193nm projection lithographic tool 会议论文  OAI收割 Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012 作者:  Di, Chengliang;  Yan, Wei;  Hu, Song;  Xu, Feng;  Li, Jinglong 收藏  |   Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage 会议论文  OAI收割 Proceedings of the SPIE - The International Society for Optical Engineering, 2010 作者:  Yangfang Deng;  Jianguan Tang;  Fan Wu 收藏  |   A high precision dynamic autocollimator 期刊论文  OAI收割 MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI, 2005, 卷号: 295-296, 页码: 337-342 作者:  Shen, MZ;  Liao, S 收藏  |