机构

• 上海光学精密机械研... [19]

采集方式

• OAI收割 [19]

内容类型

• 期刊论文 [14]
• 专利 [3]
• 会议论文 [2]

发表日期

• 2015 [1]
• 2014 [9]
• 2013 [4]
• 2012 [2]

学科主题

筛选

浏览/检索结果: 共19条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 In situ aberration measurement method using a phase-shift ring mask 期刊论文  OAI收割 j. micro-nanolithogr. mems moems, 2015, 卷号: 14, 期号: 1, 页码: 11005 作者:  Li, Sikun;  Wang, Xiangzhao;  Yang, Jishuo;  Duan, Lifeng;  Tang, Feng 收藏  |   Aberration measurement based on principal component analysis of aerial images of optimized marks 期刊论文  OAI收割 opt. commun., 2014, 卷号: 329, 页码: 63 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun 收藏  |   Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文  OAI收割 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |   基于相位环空间像主成分分析的投影物镜波像差检测方法 期刊论文  OAI收割 光学学报, 2014, 卷号: 34, 期号: 2, 页码: 211004 作者:  杨济硕;  王向朝;  李思坤;  闫观勇 收藏  |   In situ aberration measurement method using a phase-shift ring mask 会议论文  OAI收割 27th optical microlithography conference as part of the spie advanced lithography symposium 作者:  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Tang, Feng;  Yan, Guanyong 收藏  |   Aberration measurement based on principal component analysis of aerial images of optimized marks 期刊论文  OAI收割 opt. commun., 2014, 卷号: 329, 页码: 63 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |   A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask 会议论文  OAI收割 27th optical microlithography conference as part of the spie advanced lithography symposium 作者:  Li, Sikun;  Wang, Xiangzhao;  Yang, Jishuo;  Tang, Feng;  Yan, Guanyong 收藏  |   基于相位环空间像主成分分析的投影物镜波像差检测方法 期刊论文  OAI收割 光学学报, 2014, 卷号: 34, 期号: 2, 页码: 211004 作者:  杨济硕;  王向朝;  李思坤;  闫观勇 收藏  |   基于相位环空间像主成分分析的投影物镜波像差检测方法 期刊论文  OAI收割 光学学报, 2014, 卷号: 34, 期号: 2, 页码: 211004 作者:   收藏  |   Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文  OAI收割 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |