机构

• 光电技术研究所 [12]

采集方式

• OAI收割 [12]

内容类型

• 期刊论文 [11]
• 会议论文 [1]

发表日期

• 2018 [2]
• 2017 [6]
• 2016 [2]
• 2015 [2]

学科主题

• Calibratio... [1]

筛选

浏览/检索结果: 共12条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression 期刊论文  OAI收割 IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382 作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong   |  收藏  |  浏览/下载：47/0  |  提交时间：2019/08/23 Surface measurement  noise suppression  spatial modulation   Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy 期刊论文  OAI收割 OPTICS EXPRESS, 2018, 卷号: 26, 期号: 3, 页码: 2944-2953 作者:  Xie, Zhongye;  Tang, Yan;  Zhou, Yi;  Deng, Qinyuan   |  收藏  |  浏览/下载：27/0  |  提交时间：2019/08/23 Digital devices  Film thickness  Interferometry  Modulation  Thickness measurement   Spatial modulation assisted scanning white-light interferometry for noise suppression 期刊论文  OAI收割 IEEE Photonics Technology Letters, 2017 作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong   |  收藏  |  浏览/下载：30/0  |  提交时间：2018/11/20 Bandpass filters - Frequency domain analysis - Interferometry - Light sources - Scanning - Signal to noise ratio - Spurious signal noise - Surface measurement   Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography 期刊论文  OAI收割 Micromachines, 2017, 卷号: 8, 期号: 10, 页码: 314 作者:  Deng, Qinyuan;  Yang, Yong;  Gao, Hongtao;  Zhou, Yi;  He, Yu   |  收藏  |  浏览/下载：41/0  |  提交时间：2018/11/20 Cost effectiveness - Lithography - Microoptics - Photoresists   Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry 期刊论文  OAI收割 Applied Optics, 2017, 卷号: 56, 期号: 8, 页码: 2301-2306 作者:  Zhou, Yi;  Tang, Yan;  Zhu, Jiangping;  Deng, Qinyuan;  Yang, Yong   |  收藏  |  浏览/下载：52/0  |  提交时间：2018/11/20 Microstructure   Contrast enhancement of microsphere-assisted super-resolution imaging in dark-field microscopy 期刊论文  OAI收割 APPLIED PHYSICS EXPRESS, 2017, 卷号: 10, 期号: 8 作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song   |  收藏  |  浏览/下载：28/0  |  提交时间：2018/11/20 SOLID IMMERSION LENS  RESOLUTION  NANOSCOPE  SINGLE   Dimensional metrology of smooth micro structures utilizing the spatial modulation of white-light interference fringes 期刊论文  OAI收割 Optics and Laser Technology, 2017, 卷号: 93, 页码: 187-193 作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Liu, Junbo;  Wang, Jian   |  收藏  |  浏览/下载：58/0  |  提交时间：2018/11/20 Frequency domain analysis - Interferometry - Microstructure - Phase measurement - System stability - Topography - Units of measurement   Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry 会议论文  OAI收割 作者:  Zhou, Yi;  Tang, Yan;  Deng, Qinyuan;  Zhao, Lixin;  Hu, Song   |  收藏  |  浏览/下载：53/0  |  提交时间：2018/12/20 Microstructure - Modulation - Surface topography - Units of measurement   Topography measurement of micro structure by modulation-based method 期刊论文  OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505 作者:  Zhou, Yi;  Tang, Yan;  Liu, Junbo;  Deng, Qinyuan   |  收藏  |  浏览/下载：28/0  |  提交时间：2018/06/14 Interferometry  Light Sources  Manufacture  Materials Testing  Microstructure  Optical Devices  Pixels  Surface Measurement  Topography   Thickness measurement of transparent film by white-light interferometry 期刊论文  OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968506 作者:  Deng, Qinyuan;  Zhou, Yi;  Liu, Junbo;  Yao, Jingwei;  Hu, Song   |  收藏  |  浏览/下载：29/0  |  提交时间：2018/06/14 Film Thickness  Manufacture  Materials Testing  Optical Devices  Optical Films  Reflection  Reflectometers  Structural Design  Thickness Gages  Thickness Measurement  Thin Films