机构

• 长春光学精密机械与... [15]

采集方式

• OAI收割 [15]

内容类型

• 期刊论文 [15]

发表日期

• 2023 [1]
• 2020 [2]
• 2017 [7]
• 2016 [3]
• 2015 [2]

学科主题

筛选

浏览/检索结果: 共15条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Accurate measurement and adjustment method for interference fringe direction in a scanning beam interference lithography system 期刊论文  OAI收割 Optics Express, 2023, 卷号: 31, 期号: 17, 页码: 28145-28160 作者:  Y. Li;  S. Jiang;  X. Chen;  Z. Liu;  W. Wang   |  收藏  |  浏览/下载：18/0  |  提交时间：2024/07/03 Grating-based precision measurement system for five-dimensional measurement 期刊论文  OAI收割 Chinese Optics, 2020, 卷号: 13, 期号: 1, 页码: 189-202 作者:  Q. Lv,W. Wang,Z.-W. Liu,Y. Song,S. Jiang,L. Liu,Bayanheshig and W.-H. Li   |  收藏  |  浏览/下载：29/0  |  提交时间：2021/07/06 Heterodyne period measurement in a scanning beam interference lithography system 期刊论文  OAI收割 Applied Optics, 2020, 卷号: 59, 期号: 19, 页码: 5830-5836 作者:  S. Jiang,B. Lu,Y. Song,Z. W. Liu,W. Wang,L. Shuo and Bayanheshig   |  收藏  |  浏览/下载：37/0  |  提交时间：2021/07/06 Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文  OAI收割 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1 作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang   |  收藏  |  浏览/下载：21/0  |  提交时间：2018/06/13 Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文  OAI收割 Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7 作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li   |  收藏  |  浏览/下载：22/0  |  提交时间：2018/06/13 Weighted iterative algorithm for beam alignment in scanning beam interference lithography 期刊论文  OAI收割 Applied Optics, 2017, 卷号: 56, 期号: 31 作者:  Song, Y.;  W. Wang;  S. Jiang;  Bayanheshig and N. Zhang   |  收藏  |  浏览/下载：16/0  |  提交时间：2018/06/13 Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances 期刊论文  OAI收割 Scientific Reports, 2017, 卷号: 7 作者:  Liu, Z. W.;  W. H. Li;  Bayanheshig;  X. T. Li;  S. Jiang   |  收藏  |  浏览/下载：20/0  |  提交时间：2018/06/13 Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文  OAI收割 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9 作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig   |  收藏  |  浏览/下载：21/0  |  提交时间：2018/06/13 Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文  OAI收割 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5 作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi   |  收藏  |  浏览/下载：18/0  |  提交时间：2018/06/13 Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文  OAI收割 Optics Express, 2017, 卷号: 25, 期号: 9 作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig   |  收藏  |  浏览/下载：129/0  |  提交时间：2018/06/13