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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
物理研究所 [12]
半导体研究所 [12]
金属研究所 [11]
长春光学精密机械与物... [2]
宁波材料技术与工程研... [2]
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OAI收割 [43]
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期刊论文 [37]
会议论文 [6]
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2020 [1]
2017 [1]
2012 [3]
2011 [4]
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半导体材料 [9]
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Structural and mechanism study on enhanced thermal stability of hydrogenated diamond-like carbon films doped with Si/O
期刊论文
OAI收割
DIAMOND AND RELATED MATERIALS, 2020, 卷号: 108
作者:
Zhang, Dong
;
Li, Shuyu
;
Zuo, Xiao
;
Guo, Peng
;
Ke, Peiling
  |  
收藏
  |  
浏览/下载:36/0
  |  
提交时间:2020/12/16
AMORPHOUS-CARBON
TRIBOLOGICAL PROPERTIES
NANOCOMPOSITE FILMS
OPTICAL-PROPERTIES
INTERNAL-STRESS
SUBSTRATE BIAS
DLC COATINGS
SILICON
SIOX
DEPOSITION
含硅无氢非晶碳基薄膜的摩擦磨损性能
期刊论文
OAI收割
中国表面工程, 2017, 卷号: 30, 期号: 1, 页码: 93-100
作者:
王立平
;
薛群基
;
谢明玲
;
王福
;
张广安
  |  
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2017/12/08
非晶碳基薄膜
硅
摩擦
磨损
Amorphous Carbon-based Films
Silicon
Friction
Wear
Low-temperature (120 degrees C) growth of nanocrystalline silicon films prepared by plasma enhanced chemical vapor deposition from SiCl4/H-2 gases: Microstructure characterization
期刊论文
OAI收割
Applied Surface Science, 2012, 卷号: 258, 期号: 7, 页码: 3221-3226
L. Zhang
;
J. H. Gao
;
J. Q. Xiao
;
L. S. Wen
;
J. Gong
;
C. Sun
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
PECVD
Microstructure
Raman spectra
hydrogenated amorphous-silicon
thin-films
raman-spectroscopy
solar-cells
mechanism
sih2cl2
Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering
期刊论文
OAI收割
Journal of Materials Science & Technology, 2012, 卷号: 28, 期号: 11, 页码: 992-998
J. H. Gao
;
L. Zhang
;
J. Q. Xiao
;
J. Gong
;
C. Sun
;
L. S. Wen
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
Thin film
Solenoid coil
MF magnetron
sputtering
chemical-vapor-deposition
amorphous-silicon
thin-films
microstructure
temperature
fabrication
density
si
Effect of argon on the structure of hydrogenated nanocrystalline silicon deposited from tetrachlorosilane/hydrogen/argon plasma
期刊论文
OAI收割
Physica Status Solidi a-Applications and Materials Science, 2012, 卷号: 209, 期号: 6, 页码: 1080-1084
L. Zhang
;
J. H. Gao
;
J. Q. Xiao
;
L. S. Wen
;
J. Gong
;
C. Sun
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2013/02/05
hydrogen concentration
microstructure
nanocrystalline silicon
Raman
spectra
chemical-vapor-deposition
low-temperature growth
amorphous-silicon
microcrystalline silicon
raman-spectroscopy
solar-cells
thin-films
chemistry
mechanism
kinetics
Development of a novel ODEP chip using polymer photoconductive material and FTO electrode
会议论文
OAI收割
6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011
作者:
Wang SE(王淑娥)
;
Dong ZL(董再励)
;
Qu YL(曲艳丽)
;
Zhou L(周磊)
;
Liu Z(刘柱)
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2012/06/06
Amorphous films
Amorphous silicon
Butyric acid
Dielectric devices
Electric fields
Electrophoresis
Fatty acids
Fluorine
Photoconductivity
Polystyrenes
Effect of gas pressure on the properties of silicon thin film
期刊论文
OAI收割
gongneng cailiao/journal of functional materials, 2011, 卷号: 42, 期号: 8, 页码: 1489-1491
Hao, Hui-Ying
;
Li, Wei-Min
;
Zeng, Xiang-Bo
;
Kong, Guang-Lin
;
Liao, Xian-Bo
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2012/06/14
Amorphous films
Chemical vapor deposition
Deposition
Microcrystalline silicon
Microstructure
Photoelectricity
Plasma deposition
Plasma enhanced chemical vapor deposition
Pressure effects
Semiconducting silicon compounds
Transport properties
Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells
期刊论文
OAI收割
cailiao gongcheng/journal of materials engineering, 2011, 期号: 8, 页码: 5-7+13
Liu, Shi-Yong
;
Zeng, Xiang-Bo
;
Peng, Wen-Bo
;
Yao, Wen-Jie
;
Xie, Xiao-Bing
;
Yang, Ping
;
Wang, Chao
;
Wang, Zhan-Guo
收藏
  |  
浏览/下载:38/0
  |  
提交时间:2012/06/14
Amorphous films
Chemical vapor deposition
Energy gap
High resolution electron microscopy
High resolution transmission electron microscopy
Hydrogen
Nanocrystalline silicon
Optical band gaps
Plasma deposition
Plasma enhanced chemical vapor deposition
Raman spectroscopy
Semiconducting silicon compounds
Solar power generation
Thin films
Transmission electron microscopy
Effect of rapid thermal annealing condition on the structure and conductivity properties of polycrystalline silicon films on glass
会议论文
OAI收割
SEP 25-28, 2010
作者:
Wang, Weiyan
;
Huang, Jinhua
;
Zhang, Xianpeng
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2021/12/02
SOLID-PHASE CRYSTALLIZATION
AMORPHOUS-SILICON
SOLAR-CELLS
SI FILMS
IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE)
会议论文
OAI收割
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
作者:
Xu L.
;
Wang X.
;
Wang X.
;
Wang X.
;
Zhang F.
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2013/03/25
To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors
a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided
showing that the amorphous film has great thermal shock resistance. Then
polishing experiments on 100.5m thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026 RMS (=0.6328nm) and less than 0.5nm RMS respectively. Moreover
reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors. 2009 SPIE.