机构

• 上海微系统与信息技术... [5]
• 大连化学物理研究所 [3]
• 半导体研究所 [3]
• 兰州化学物理研究所 [3]

采集方式

• OAI收割 [14]

内容类型

• 期刊论文 [14]

发表日期

• 2008 [1]
• 2001 [3]
• 2000 [2]
• 1998 [3]
• 1996 [1]
• 1995 [2]
• 更多

学科主题

• 半导体物理 [3]
• 材料科学与物理化学 [3]
• Engineerin... [1]
• Materials ... [1]
• Materials ... [1]
• Materials ... [1]
• 更多

筛选

浏览/检索结果: 共14条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Characterization of bonded silicon-on-aluminum-nitride wafers with RBS, TEM and HRXRD techniques 期刊论文  OAI收割 MICROELECTRONIC ENGINEERING, 2008, 卷号: 85, 期号: 8, 页码: 1807-1810 Men, CL; Lin, CL 收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24 BEAM-ENHANCED DEPOSITION  ALN THIN-FILMS   In vivo and in vitro investigation of titanium oxide layers coated on LTI-carbon by IBED 期刊论文  OAI收割 JOURNAL OF MATERIALS SCIENCE, 2001, 卷号: 36, 期号: 8, 页码: 2067-2072 Wang, XH; Zhang, F; Li, CR; Yu, LJ; Zheng, ZH; Liu, XH; Chen, LZ; Wang, HM; Chen, A 收藏  |  浏览/下载：18/0  |  提交时间：2012/03/24 BEAM-ENHANCED DEPOSITION  BLOOD COMPATIBILITY  SURFACE  FILMS   Influence of ion energy and deposition temperature on the surface morphology of carbon films deposited by ion beams 期刊论文  OAI收割 acta physica sinica, 2001, 卷号: 50, 期号: 7, 页码: 1324-1328 Liao MY; Qin FG; Chai CL; Liu ZK; Yang SY; Yao ZY; Wang ZG 收藏  |  浏览/下载：138/13  |  提交时间：2010/08/12 amorphous carbon  surface morphology  mass-selected low energy ion beam deposition  TETRAHEDRAL AMORPHOUS-CARBON  BIAS-ENHANCED NUCLEATION  ATOMIC-FORCE MICROSCOPY  DIAMOND-LIKE CARBON  SILICON  GROWTH  MODEL   Ion bombardment as the initial stage of diamond film growth 期刊论文  OAI收割 journal of applied physics, 2001, 卷号: 89, 期号: 3, 页码: 1983-1985 Liao MY; Qin FG; Zhang JH; Liu ZK; Yang SY; Wang ZG; Lee ST 收藏  |  浏览/下载：54/0  |  提交时间：2010/08/12 BIAS-ENHANCED NUCLEATION  CHEMICAL-VAPOR-DEPOSITION  BEAM DEPOSITION  MECHANISM  SILICON  SPECTROSCOPY   Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon 期刊论文  OAI收割 MATERIALS LETTERS, 2000, 卷号: 45, 期号: 1, 页码: 1-5 Wang, XH; Zhang, F; Li, CR; Zheng, ZH; Chen, LH; Wang, HM; Liu, XH 收藏  |  浏览/下载：8/0  |  提交时间：2012/03/24 BEAM-ENHANCED DEPOSITION  THIN-FILMS  GROWTH   Carbon film deposited by mass-selected low energy ion beam technique and ion bombardment effect 期刊论文  OAI收割 acta physica sinica, 2000, 卷号: 49, 期号: 11, 页码: 2186-2190 Liao MY; Zhang JH; Qin FG; Liu ZK; Yang SY; Wang ZG; Lee ST 收藏  |  浏览/下载：54/0  |  提交时间：2010/08/12 amorphous carbon  ion bombardment  mass-selected low energy ion beam  CHEMICAL-VAPOR-DEPOSITION  BIAS-ENHANCED NUCLEATION  DIAMOND FILMS  RAMAN-SCATTERING  GROWTH  SILICON  MECHANISM   Fabrication and characterization of a new automotive air-to-fuel sensors based on Pt- and TiO2-doped Nb2O5 film deposited by IBED 期刊论文  OAI收割 sensors and actuators b-chemical, 1998, 卷号: 46, 期号: 3, 页码: 180-185 作者:  Zhu, JZ;  Ren, CX;  Chen, GL;  Mu, HC;  Wu, JL 收藏  |  浏览/下载：19/0  |  提交时间：2015/11/10 air-to-fuel sensors  metal oxide semiconductor  ion-beam-enhanced deposition   Rutile-type titanium oxide films synthesized by filtered arc deposition 期刊论文  OAI收割 SURFACE & COATINGS TECHNOLOGY, 1998, 卷号: 110, 期号: 3, 页码: 136-139 Zhang, F; Wang, XH; Li, CR; Wang, HM; Chen, LZ; Liu, XH 收藏  |  浏览/下载：12/0  |  提交时间：2012/03/25 BEAM-ENHANCED DEPOSITION  TIO2 FILMS  THIN-FILMS  MICROSTRUCTURE   Air/fuel sensors based on Pt- and TiO2-doped Nb2O5 film 期刊论文  OAI收割 sensors and materials, 1998, 卷号: 10, 期号: 2, 页码: 93-102 作者:  Zhu, JZ;  Ren, CX;  Chen, GL;  Mu, HC;  Wu, JL 收藏  |  浏览/下载：17/0  |  提交时间：2015/11/09 air/fuel sensors  metal oxide semiconductor  ion-beam-enhanced deposition   New automotive air/fuel sensor based on TiO2-doped Nb2O5 thin film by ion-beam-enhanced deposition 期刊论文  OAI收割 sensors and actuators b-chemical, 1996, 卷号: 32, 期号: 3, 页码: 209-213 作者:  Zhu, JZ;  Ren, CX;  Chen, GL;  Yu, CY;  Wu, JL 收藏  |  浏览/下载：22/0  |  提交时间：2015/11/12 air/fuel sensors  automotive sensors  ion-beam-enhanced deposition  semiconducting metal oxides