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Chinese Academy of Sciences Institutional Repositories Grid
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半导体研究所 [5]
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期刊论文 [14]
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Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography
期刊论文
OAI收割
Advanced Optical Materials, 2017, 卷号: 5, 期号: 21, 页码: 1700429
作者:
Liu, Liqin
;
Zhang, Xiaohu
;
Zhao, Zeyu
;
Pu, Mingbo
;
Gao, Ping
  |  
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/11/20
Electric fields - Electron beam lithography - Fabrication - Holography - Ion beams - Lithography - Masks - Nanostructures - Photoresists - Plasmons
Simulation and experimental study of aspect ratio limitation in Fresnel zone plates for hard-x-ray optics
期刊论文
OAI收割
APPLIED OPTICS, 2015, 卷号: 54, 期号: 32, 页码: 9630—9636
作者:
Liu, JP
;
Shao, JH
;
Zhang, SC
;
Ma, YQ
;
Taksatorn, N
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2016/03/04
ELECTRON-BEAM LITHOGRAPHY
HIGH-EFFICIENCY
RESOLUTION
FABRICATION
MICROSCOPY
RESIST
Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region
期刊论文
OAI收割
appl. optics, 2014, 卷号: 53, 期号: 7, 页码: 1298
作者:
Sun, Jian
;
Shao, Jianda
;
Yi, Kui
;
Zhang, Weili
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2016/11/28
ELECTRON-BEAM EVAPORATION
OPTICAL-CONSTANTS
OXYGEN SENSOR
COATINGS
MGF2
GROWTH
MICROSTRUCTURE
LITHOGRAPHY
DEPOSITION
BOAT
Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region
期刊论文
OAI收割
appl. optics, 2014, 卷号: 53, 期号: 7, 页码: 1298
作者:
Sun, Jian
;
Shao, Jianda
;
Yi, Kui
;
Zhang, Weili
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2016/11/28
ELECTRON-BEAM EVAPORATION
OPTICAL-CONSTANTS
OXYGEN SENSOR
COATINGS
MGF2
GROWTH
MICROSTRUCTURE
LITHOGRAPHY
DEPOSITION
BOAT
Effects of substrate temperatures on the characterization of magnesium fluoride thin films in deep-ultraviolet region
期刊论文
OAI收割
appl. optics, 2014, 卷号: 53, 期号: 7, 页码: 1298
作者:
Sun, Jian
;
Shao, Jianda
;
Yi, Kui
;
Zhang, Weili
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2016/11/25
ELECTRON-BEAM EVAPORATION
OPTICAL-CONSTANTS
OXYGEN SENSOR
COATINGS
MGF2
GROWTH
MICROSTRUCTURE
LITHOGRAPHY
DEPOSITION
BOAT
Fabrication of Sub-20 nm Width Ferromagnetic Nanocontact Structures by Shadow Evaporation
期刊论文
OAI收割
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2013, 卷号: 13, 期号: 2, 页码: 1199
Yao, ZN
;
Yang, HF
;
Li, WX
;
Li, JJ
;
Cui, AJ
;
Gu, CZ
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2014/01/16
Ferromagnetic Nanocontact
Shadow Evaporation
Electron Beam Lithography
The study on microscopic mechanical property of polycrystalline with SEM moire method
期刊论文
OAI收割
OPTICS AND LASERS IN ENGINEERING, 2012, 卷号: 50, 期号: 12, 页码: 1757
Li, YJ
;
Xie, HM
;
Tang, MJ
;
Zhu, JG
;
Luo, Q
;
Gu, CZ
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2013/09/23
PHASE-SHIFTED INTERFEROGRAMS
ADVANCED ITERATIVE ALGORITHM
ELECTRON-BEAM LITHOGRAPHY
MICROCREEP DEFORMATION
FABRICATION
TECHNOLOGY
Fabrication of a 256-bits organic memory by soft x-ray lithography
期刊论文
OAI收割
CHINESE PHYSICS B, 2010, 卷号: 19, 期号: 5
作者:
Liu Xing-Hua
;
Lu Wen-Sheng
;
Ji Zhuo-Yu
;
Tu De-Yu
;
Zhu Xiao-Li
  |  
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2019/04/09
Molecular Memory
Crossbar Array
Soft X-ray Lithography
Electron Beam Lithography
Fabrication of high quality two-dimensional photonic crystal mask layer patterns
外文期刊
OAI收割
2009
作者:
Niu, JB
;
Xu, B
;
Ye, XL
;
Peng, YS
;
Wang, ZG
  |  
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2010/11/26
Electron-beam Lithography
Characteristics of SOI rib waveguide microring and racetrack resonators
会议论文
OAI收割
5th ieee international conference on group iv photonics, sorrento, italy, sep 17-19, 2008
Huang, QZ
;
Xiao, X
;
Li, YT
;
Yu, YD
;
Yu, JZ
收藏
  |  
浏览/下载:74/0
  |  
提交时间:2010/03/09
Resonators
submicron rib waveguides
silicon-on-insulator
electron beam lithography