中国科学院机构知识库网格系统: 检索

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	An Image-Based Alignment Errors Correction Method for Segmented Fresnel Primary Mirror 期刊论文 OAI收割 IEEE Photonics Journal, 2020, 卷号: 12, 期号: 2, 页码: 6900614-1-14 作者: Zhu, Licheng; Yang, Ping; Wen, Lianghua; Zhao, Lujia; Guan, Chunlin \| 收藏 \| 浏览/下载：28/0 \| 提交时间：2021/05/11 Segmented Membrane Telescope Alignment Errors Fine Phasing Correction
	Fine-grained alignment of cryo-electron subtomograms based on MPI parallel optimization 期刊论文 OAI收割 BMC BIOINFORMATICS, 2019, 卷号: 20, 期号: 1, 页码: 13 作者: Lu, Yongchun; Zeng, Xiangrui; Zhao, Xiaofang; Li, Shirui; Li, Hua \| 收藏 \| 浏览/下载：94/0 \| 提交时间：2019/12/10 Stochastic average gradient Fine-grained alignment Cryo-ET MPI
	Learning to Classify Fine-Grained Categories with Privileged Visual-Semantic Misalignment 期刊论文 OAI收割 IEEE Transactions on Big Data, 2016, 卷号: PP, 期号: 99, 页码: 2332-7790 作者: Ke Chen; Zhaoxiang Zhang \| 收藏 \| 浏览/下载：14/0 \| 提交时间：2017/02/27 Fine-grained Categorisation Cost-sensitive Learning Deep Feature Visual-semantic Alignment Multiclass Classification
	A modified alignment method based on four-quadrant-grating moire for proximity lithography 期刊论文 OAI收割 OPTIK, 2014, 卷号: 125, 期号: 17, 页码: 4868-4872 作者: Di, Chengliang; Zhu, Jiangping; Yan, Wei; Hu, Song 收藏 \| 浏览/下载：25/0 \| 提交时间：2015/07/10 Coarse alignment Fine alignment Image processing Moire fringe
	掩模传输系统的运动控制与预对准方法研究学位论文 OAI收割工学博士, 中国科学院自动化研究所: 中国科学院研究生院, 2007 作者: 刘云收藏 \| 浏览/下载：107/0 \| 提交时间：2015/09/02 掩模版四象限光电探测器粗预对准精细预对准显微视觉运动控制 Petri网 photo mask FQPD coarse pre-alignment fine pre-alignment microscopic vision motion control Petri net
	Development of an experimental EUVL system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-P.; Zhang L.-C.; Jin C.-S. 收藏 \| 浏览/下载：19/0 \| 提交时间：2013/03/25 An experimental EUVL system has been developed to investigate EUV imaging system design component fabrication assembly technique and experimental process. The system includes a laser produced plasma (LPP) source an ellipsoidal condenser a transmission mask a reduced projection optics and vacuum system. We designed a 10:1 reduction projection optics using Schwarzschild system with spherical mirrors to achieve 0.1m resolution. The Schwarzschild optics coated with Mo/Si multilayers was assembled with wavefront error (WFE) of 0.014 waves RMS at 632.8nm wavelength under computer-aided alignment method. Using this system a fine pattern of less than 0.25m covering a 0.1mm diameter image field of view was clearly replicated on resist-coated wafer.