中国科学院机构知识库网格系统: 检索

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	Critical-dimension scanning electron microscope characterization of smoothly varying wave structures with a Monte Carlo simulation 期刊论文 OAI收割 JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2021, 卷号: 54 作者: \| 收藏 \|
	Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE) 会议论文 OAI收割 2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010, Guangzhou, China 作者: Zhang Y. 收藏 \|
	A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文 OAI收割 6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China 作者: Zhao Y.; Zhang W.; Zhang W.; Li S.; Gong Y. 收藏 \|
	Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method 期刊论文 OAI收割 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 卷号: 8, 期号: 3, 页码: 13 作者: Zong, Ke; Zeng, Xuan; Ji, Xia; Cai, Wei \| 收藏 \|
	Study of the contour-based optical proximity correction methodology 期刊论文 OAI收割 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 卷号: 8, 期号: 4, 页码: 43005-43005 Zhu, L; Kang, XH; Gu, YL; Yang, S 收藏 \|
	Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width 期刊论文 OAI收割 appl. optics, 2009, 卷号: 48, 期号: 2, 页码: 261, 269 Qiu Zicheng; 王向朝; Yuan Qiongyan; Wang Fan 收藏 \|
	Periodic ZnO nanorod arrays defined by polystyrene microsphere self-assembled monolayers 期刊论文 OAI收割 NANO LETTERS, 2006, 卷号: 6, 期号: 10, 页码: 2375 Liu, DF; Xiang, YJ; Wu, XC; Zhang, ZX; Liu, LF; Song, L; Zhao, XW; Luo, SD; Ma, WJ; Shen, J; Zhou, WY; Wang, G; Wang, CY; Xie, SS 收藏 \|