中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
光电技术研究所 [6]
长春光学精密机械与物... [2]
化学研究所 [1]
遥感与数字地球研究所 [1]
半导体研究所 [1]
采集方式
OAI收割 [11]
内容类型
期刊论文 [9]
会议论文 [2]
发表日期
2019 [1]
2018 [1]
2017 [3]
2016 [3]
2011 [1]
2008 [1]
更多
学科主题
微电子学 [1]
筛选
浏览/检索结果:
共11条,第1-10条
帮助
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
提交时间升序
提交时间降序
作者升序
作者降序
发表日期升序
发表日期降序
Fluorescence enhanced lab-on-a-chip patterned using a hybrid technique of femtosecond laser direct writing and anodized aluminum oxide porous nanostructuring
期刊论文
OAI收割
Nanoscale Advances, 2019, 卷号: 1, 期号: 9, 页码: 3474-3484
作者:
Z.Yu
;
Y.Lei
;
W.Yu
;
J.Cheng
;
J.Xing
  |  
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2020/08/24
Aluminum oxide,Alumina,Chemical modification,Electrochemical deposition,Energy transfer,Femtosecond lasers,Fluorescence,Hydrophilicity,Lab-on-a-chip,Laser excitation,Molecules,Photoresists,Reduction,Rhodium compounds,Spectral resolution,Superhydrophobicity
Molecular Glass Photoresists with High Resolution, Low LER, and High Sensitivity for EUV Lithography
期刊论文
OAI收割
MACROMOLECULAR MATERIALS AND ENGINEERING, 2018, 卷号: 303, 期号: 6
作者:
Peng, Xiaoman
;
Wang, Yafei
;
Xu, Jian
;
Yuan, Hua
;
Wang, Liangqian
  |  
收藏
  |  
浏览/下载:38/0
  |  
提交时间:2019/04/09
Euv
Lithography
Molecular Glasses
Photoresists
Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography
期刊论文
OAI收割
Micromachines, 2017, 卷号: 8, 期号: 10, 页码: 314
作者:
Deng, Qinyuan
;
Yang, Yong
;
Gao, Hongtao
;
Zhou, Yi
;
He, Yu
  |  
收藏
  |  
浏览/下载:43/0
  |  
提交时间:2018/11/20
Cost effectiveness - Lithography - Microoptics - Photoresists
Subdiffraction plasmonic lens lithography prototype in stepper mode
期刊论文
OAI收割
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 2017, 卷号: 35, 期号: 1, 页码: 011603
作者:
Liu, Minggang
;
Zhao, Chengwei
;
Luo, Yunfei
;
Zhao, Zeyu
;
Wang, Yanqin
  |  
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2018/11/20
Lenses - Lithography - Metal working - Photolithography - Photoresists
Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography
期刊论文
OAI收割
Advanced Optical Materials, 2017, 卷号: 5, 期号: 21, 页码: 1700429
作者:
Liu, Liqin
;
Zhang, Xiaohu
;
Zhao, Zeyu
;
Pu, Mingbo
;
Gao, Ping
  |  
收藏
  |  
浏览/下载:36/0
  |  
提交时间:2018/11/20
Electric fields - Electron beam lithography - Fabrication - Holography - Ion beams - Lithography - Masks - Nanostructures - Photoresists - Plasmons
Superresolution nanolithography technique based on polydimethylsiloxane soft mold
期刊论文
OAI收割
IEEE International Conference: 2016 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (IEEE 3M-NANO), 2016, 页码: 269-272
作者:
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2018/06/14
Electric Fields
Linewidth
Manufacture
Microchannels
Molds
Nanolithography
Nanotechnology
Optical Resolving Power
Photoresists
Pulse Width Modulation
Silver
A new flexible hybrid mask for contact exposure and its fabrication
期刊论文
OAI收割
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q
作者:
Liu, Xin
;
Zhang, Man
;
Cao, A-Xiu
;
Pang, Hui
;
Wang, Jia-Zhou
  |  
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2018/06/14
Elastic Moduli
Fabrication
Lithography
Manufacture
Nanostructures
Optical Devices
Photolithography
Photoresists
Polymers
Printing
3D micro-concrete hybrid structures fabricated by femtosecond laser two-photon polymerization for biomedical and photonic applications
期刊论文
OAI收割
Proceedings of the IEEE: 2016 IEEE International Conference on Industrial Technology, ICIT 2016, 2016, 卷号: 2016-May, 页码: 1108-1114
作者:
Zheren, Du
;
Lianwei, Chen
;
Dacheng, Wang
;
Zuyong, Wang
;
Teck, Lim Chwee
  |  
收藏
  |  
浏览/下载:47/0
  |  
提交时间:2018/06/14
3d Printers
Biomedical Equipment
Concretes
Efficiency
Optical Properties
Photons
Photoresists
Polymerization
Printing
T-shaped gate AlGaN/GaN HEMTs fabricated by femtosecond laser lithography without ablation
期刊论文
OAI收割
applied physics a: materials science and processing, 2011, 页码: 1-5
Du, Y.D.
;
Cao, H.Z.
;
Yan, W.
;
Han, W.H.
;
Liu, Y.
;
Dong, X.Z.
;
Zhang, Y.B.
;
Jin, F.
;
Zhao, Z.S.
;
Yang, F.H.
;
Duan, X.M.
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2012/06/14
Ablation
Drain current
Fabrication
Gallium nitride
High electron mobility transistors
Photoresists
Ultrashort pulses
A new method to retrieve soil moisture at bare soil surface using ERS scatterometer data
会议论文
OAI收割
2008 IEEE International Geoscience and Remote Sensing Symposium - Proceedings, Boston, MA, United states, July 6, 2008 - July 11,2008
Sun, Ruijing
;
Shi, Jiancheng
;
Jiang, Lingmei
;
Du, Jinyang
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2014/12/07
Geologic models
Antennas
Backscattering
Groundwater
Meteorological instruments
Moisture determination
Permittivity
Photoresists
Range finding
Remote sensing
Soil moisture
Soil testing
Surface properties
Surface roughness