机构

• 半导体研究所 [6]
• 兰州化学物理研究所 [5]
• 物理研究所 [1]
• 金属研究所 [1]
• 长春光学精密机械与物... [1]
• 化学研究所 [1]
• 更多

采集方式

• OAI收割 [16]
• iSwitch采集 [1]

内容类型

• 期刊论文 [14]
• 会议论文 [2]
• 学位论文 [1]

发表日期

• 2015 [1]
• 2014 [3]
• 2012 [2]
• 2011 [2]
• 2010 [1]
• 2008 [2]
• 更多

学科主题

• 半导体材料 [5]
• 材料科学与物理化学 [5]

筛选

浏览/检索结果: 共17条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Multiscale modeling and operation of PECVD of thin film solar cells 期刊论文  OAI收割 CHEMICAL ENGINEERING SCIENCE, 2015, 卷号: 136, 页码: 50-61 作者:  Crose, Marquis;  Kwon, Joseph Sang-Il 收藏  |  浏览/下载：17/0  |  提交时间：2016/03/30 Process modeling  Process optimization  Plasma-enhanced chemical vapor deposition  Thin film solar cells  Thin film surface morphology  Thin film thickness   超厚类金刚石碳基薄膜多层界面特征及其摩擦学特性 学位论文  OAI收割 理学博士: 中国科学院大学, 2014 王军军 收藏  |  浏览/下载：93/0  |  提交时间：2014/11/21 等离子体增强化学气相沉积  超厚类金刚石薄膜  超高承载  摩擦学性能  Plasma-enhanced chemical vapor deposition  Super-thick diamond-likecarbon film  Ultra-high load-bearing capacity  Tribological property   Study on the anti-reflection and structure evolution of hydrogenated amorphous carbon grown by plasma chemical vapor deposition 期刊论文  OAI收割 Surface and interface analysis, 2014, 卷号: 46, 期号: 8, 页码: 530-534 作者:  Shi J(师晶);  Geng ZR(耿中荣);  Zhang JY(张俊彦);  Wang CB(王成兵) 收藏  |  浏览/下载：30/0  |  提交时间：2014/10/17 hydrogenated amorphous carbon  direct current plasma-enhanced chemical vapor deposition  anti-reflection property  raman spectroscopy  X-ray photoelectron spectroscopy   Si过渡层类金刚石薄膜界面优化及其性能研究 期刊论文  OAI收割 摩擦学学报, 2014, 卷号: 34, 期号: 5, 页码: 531-537 作者:  王军军;  蒲吉斌;  张广安;  王立平 收藏  |  浏览/下载：17/0  |  提交时间：2014/12/30 类金刚石薄膜  等离子体化学气相沉积  摩擦学性能  diamond-like carbon films  plasma enhanced chemical vapor deposition  tribological property   Low temperature growth of nanoblade In2O3 thin films by plasma enhanced chemical vapor deposition: Morphology control and lithium storage properties 期刊论文  OAI收割 THIN SOLID FILMS, 2012, 卷号: 521, 页码: 137-140 作者:  Zheng, Jie;  Yang, Rong;  Lou, Yu;  Li, Wei;  Li, Xingguo   |  收藏  |  浏览/下载：19/0  |  提交时间：2019/04/09 Plasma Enhanced Chemical Vapor Deposition  Indium Oxide  Nanoblades  Electrode  Lithium Storage   Highly formaldehyde-sensitive, transition-metal doped ZnO nanorods prepared by plasma-enhanced chemical vapor deposition 期刊论文  OAI收割 SENSORS AND ACTUATORS B-CHEMICAL, 2012, 卷号: 169, 期号: 0, 页码: 74-80 作者:  Hu, Peng;  Han, Ning;  Zhang, Dangwen;  Ho, Johnny C.;  Chen, Yunfa 收藏  |  浏览/下载：41/0  |  提交时间：2013/10/16 Plasma-enhanced chemical vapor deposition  ZnO nanorods  Transition metal dopants  Formaldehyde gas sensors   Effect of gas pressure on the properties of silicon thin film 期刊论文  OAI收割 gongneng cailiao/journal of functional materials, 2011, 卷号: 42, 期号: 8, 页码: 1489-1491 Hao, Hui-Ying; Li, Wei-Min; Zeng, Xiang-Bo; Kong, Guang-Lin; Liao, Xian-Bo 收藏  |  浏览/下载：53/0  |  提交时间：2012/06/14 Amorphous films  Chemical vapor deposition  Deposition  Microcrystalline silicon  Microstructure  Photoelectricity  Plasma deposition  Plasma enhanced chemical vapor deposition  Pressure effects  Semiconducting silicon compounds  Transport properties   Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells 期刊论文  OAI收割 cailiao gongcheng/journal of materials engineering, 2011, 期号: 8, 页码: 5-7+13 Liu, Shi-Yong; Zeng, Xiang-Bo; Peng, Wen-Bo; Yao, Wen-Jie; Xie, Xiao-Bing; Yang, Ping; Wang, Chao; Wang, Zhan-Guo 收藏  |  浏览/下载：37/0  |  提交时间：2012/06/14 Amorphous films  Chemical vapor deposition  Energy gap  High resolution electron microscopy  High resolution transmission electron microscopy  Hydrogen  Nanocrystalline silicon  Optical band gaps  Plasma deposition  Plasma enhanced chemical vapor deposition  Raman spectroscopy  Semiconducting silicon compounds  Solar power generation  Thin films  Transmission electron microscopy   Cavitation erosion behavior of nanocomposite Ti-Si-C-N and Ti/Ti-Si-C-N coatings deposited on 2Cr13 stainless steel using a Plasma Enhanced Magnetron Sputtering process 期刊论文  OAI收割 Surface & Coatings Technology, 2010, 卷号: 204, 期号: 21-22, 页码: 3530-3538 C. P. Qin; Y. G. Zheng; R. Wei 收藏  |  浏览/下载：21/0  |  提交时间：2012/04/13 Cavitation erosion  Ti-Si-C-N coating  2Cr13 steel  Plasma Enhanced  Magnetron Sputtering  Steam turbine  Liquid droplet erosion  liquid impact erosion  chemical-vapor-deposition  water droplet erosion  stellite 6b  12cr steel  resistance  surface  microstructure  impingement  protection   ZnO thin film grown on glass by metal-organic chemical vapor deposition (EI CONFERENCE) 会议论文  OAI收割 2008 2nd IEEE International Nanoelectronics Conference, INEC 2008, March 24, 2008 - March 27, 2008, Shanghai, China 作者:  Wang C. 收藏  |  浏览/下载：146/0  |  提交时间：2013/03/25 ZnO thin film was deposited on the substrate of Corning glass by metal-organic chemical vapor deposition (MOCVD)[1  2  3] with a buffer layer of SiNx grown by plasma enhanced chemical vapor deposition. The quality of ZnO film was studied by X-ray diffraction and photoluminescence measurement. We found strong diffraction (0 0 2) peak at 34.50  indicating that the ZnO film was strongly C-oriented. The full-width at half maximum of (0 0 2) peak was 0.179. 2008 IEEE.