中国科学院机构知识库网格系统: 检索

A surface shape test method for a thin flat mirror 期刊论文 OAI收割
OPTIK, 2018, 卷号: 152, 页码: 116-126
作者: Guo, Yongwei

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收藏 | 浏览/下载：34/0 | 提交时间：2018/06/08

Surface Measurements Instrumentation Figure Measurement And Metrology Testing Space Instrumentation

STEP Mission: Search for Terrestrial Exo-Planets 会议论文 OAI收割
European Planetary Science Congress 2013,, London, UK, 2013
Chen D.; Wu; J.; Li B.

收藏 | 浏览/下载：35/0 | 提交时间：2014/04/30

Search for Terrestrial Exo-Planest (hereafter STEP) mission is a latest advanced research project in Chinese Strategic Pioneer Program (SPP) on Space Science. STEP aims at the nearby earth-alike planets detection comprehensive research on the planetary system and some astrometry research with 0.5 uas precision in the space which will get the fruitful achievements in the exo-planetary and astrometry research fields. STEP will take the Space Astrometry technique in the optical band. The FOV is 0.44 degree based on 1.2m primary and focus length is 50m. The special metrology technique will be taken to reach 0.5 uas astrometry precision which will be idea for terrestrial exo-planets detection. The mission will take the L2 orbit.

Influence of spatial temperature distribution on high accuracy interferometric metrology (EI CONFERENCE) 会议论文 OAI收割
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China
作者: Yang H.; Zhang J.; Zhang J.; Zhang J.; Yan F.

收藏 | 浏览/下载：29/0 | 提交时间：2013/03/25

We calculate the influence of temperature change on the refractive index of air establish a model of air temperature distribution and analyze the effect of different temperature distribution on the high accuracy interferometric metrology. First a revised Edlen formula is employed to acquire the relation between temperature and refractive index of air followed by introducing the fixed temperature gradient distribution among the spatial grid within the optical cavity between the reference flat and the test flat of the Fizeau interferometer accompanied by a temperature change random function within each grid. Finally all the rays through the air layer with different incident angles are traced by Matlab program in order to obtain the final output position angle and OPD for each ray. The influence of different temperature distribution and the length of the optical cavity in on the testing accuracy can be analyzed through the RMS value that results from repeatable rays tracing. As a result the horizontal distribution (vertical to optical axis) has a large effect on the testing accuracy. Thus to realize the high accuracy figure metrology the horizontal distribution of temperature must be rigorously controlled as well as to shorten the length of the optical cavity to a large extent. The results from our simulation are of great significant for the accuracy analysis of interferometric testing and the research of manufacturing a interferometer. 2010 Copyright SPIE - The International Society for Optical Engineering.

Three dimensional profilometry using Dammann grating 期刊论文 OAI收割
applied optics, 2009, 卷号: 48, 期号: 19, 页码: 3709
J. Zhang; Changhe Zhou; X. Wang

收藏 | 浏览/下载：1672/356 | 提交时间：2010/05/13

instrumentation, measurement, and metrology

基于基频分量消光的1/4波片快轴标定方法 期刊论文 OAI收割
中国激光, 2007, 卷号: 34, 期号: 11, 页码: 1553, 1556
杨坤; 曾爱军; 王向朝; 王华

收藏 | 浏览/下载：1143/173 | 提交时间：2009/09/18

测量与计量 measurement and metrology 偏振 polarization 1/4波片 quarter-wave plate 快轴 fast axis 相位调制器 phase modulator 琼斯矩阵 Jones matrix

一种步进扫描投影光刻机承片台不平度检测新技术 期刊论文 OAI收割
光学学报, 2007, 卷号: 27, 期号: 7, 页码: 1205, 1210
何乐; 王向朝; 王帆; 施伟杰; 马明英

收藏 | 浏览/下载：763/180 | 提交时间：2009/09/18

测量与计量 measurement and metrology 不平度检测 non-flatness measurement 承片台 wafer chuck 调平调焦 leveling control 最小二乘 least square method 光刻机 lithographic tool

基于高频微波技术的分布式光纤传感器布里渊散射信号检测 期刊论文 OAI收割
中国激光, 2007, 卷号: 34, 期号: 4, 页码: 503, 506
孙安; 陈嘉琳; 李国扬; 王利; 常丽萍; 林尊琪

收藏 | 浏览/下载：1176/224 | 提交时间：2009/09/18

测量与计量 measurement and metrology 光纤传感器 optical fiber sensors 布里渊散射 Brillouin scattering 电光调制 electro-optical modulation 相干检测 optical coherent detection

The application of auto-controlled liquid crystal light valve arrays to photolithography shutter (EI CONFERENCE) 会议论文 OAI收割
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
作者: Chen Y.

收藏 | 浏览/下载：16/0 | 提交时间：2013/03/25

Photolithography shutter is usually used to control exposure in order to obtain patterns of code disc and metrology grating which are the core components of optical shaft encoder. But perforated film as photolithography shutter has many disadvantages such as taking too long time to perforate easily making wrong code lower reusable ratio. Mathematical models for resist property luminous efficiency and exposure have been established by deducing their relations for avoiding the disadvantages which provides the theory of using liquid crystal light valve (LCLV) replacing proforated film. Based on operating principles of LCLV and control theories of photolithography shutter the principle diagram of control circuit of LCLV arrays has been designed according to theirs control principles. In the control system LCLV arrays as photolithography shutter are realized by adopting DS75451 to drive them and using AT89C51 chip to control them. By photolithographic experiment the patterns of code disc are good the edges of lines are vertical it indicates LCLV arrays as photolithography shutter may control exposure and light passing accords with the intending requires. It proves using LCLV arrays replacing perforated film as photolithography shutter is feasible completely.

基于光栅成像投影的微位移检测方法 期刊论文 OAI收割
中国激光, 2005, 卷号: 32, 期号: 3, 页码: 394, 398
曾爱军; 王向朝

收藏 | 浏览/下载：1386/223 | 提交时间：2009/09/18

测量与计量 measurement and metrology 微位移 micro-displacements 光栅 grating 傅里叶变换 Fourier transform 成像投影 projection 光弹调制器 photoelastic modulator

A novel method to determine the FOCAL energy range 期刊论文 OAI收割
chin. opt. lett., 2005, 卷号: 3, 期号: 10, 页码: 589, 592
Dongqing Zhang; 王向朝; Weijie Shi

收藏 | 浏览/下载：1575/267 | 提交时间：2009/09/18

diffraction and gratings focal-plane-array image processors instrumentation measurement and metrology optical devices