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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
上海微系统与信息技... [20]
西安光学精密机械研究... [1]
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OAI收割 [21]
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期刊论文 [21]
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2018 [1]
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2003 [2]
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学科主题
Physics, ... [21]
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Fabrication of planar optical waveguides by 6.0MeV silicon ion implantation in Nd-doped phosphate glasses
期刊论文
OAI收割
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 卷号: 57, 期号: 4
作者:
Shen, Xiao-Liang
;
Dai, Han-Qing
;
Zhang, Liao-Lin
;
Wang, Yue
;
Zhu, Qi-Feng
  |  
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/04/02
The use of nanocavities for the fabrication of ultrathin buried oxide layers
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2009, 卷号: 94, 期号: 1, 页码: 11903-11903
Ou, X
;
Kogler, R
;
Mucklich, A
;
Skorupa, W
;
Moller, W
;
Wang, X
;
Vines, L
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2012/03/24
ION-IMPLANTATION
SOI MOSFETS
SILICON
SI
HELIUM
SEPARATION
DEFECTS
TEMPERATURE
HYDROGEN
BUBBLES
Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2006, 卷号: 88, 期号: 14, 页码: 142108-142108
Di, ZF
;
Chu, PK
;
Zhu, M
;
Fu, RKY
;
Luo, SH
;
Shao, L
;
Nastasi, M
;
Chen, P
;
Alford, TL
;
Mayer, JW
;
Zhang, M
;
Liu, WL
;
Song, ZT
;
Lin, CL
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2012/03/24
SILICON-ON-DIAMOND
IMPLANTATION
TECHNOLOGY
MOSFETS
Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator
期刊论文
OAI收割
JOURNAL OF APPLIED PHYSICS, 2005, 卷号: 98, 期号: 5, 页码: 53502-53502
Di, ZF
;
Huang, AP
;
Fu, RKY
;
Chu, PK
;
Shao, L
;
Hochbauer, T
;
Nastasi, M
;
Zhang, M
;
Liu, WL
;
Shen, QW
;
Luo, ST
;
Song, ZT
;
Lin, CG
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2012/03/24
DLC FILMS
SPECTROSCOPY
Formation of silicon-on-diamond by direct bonding of plasma-synthesized diamond-like carbon to silicon
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2004, 卷号: 85, 期号: 13, 页码: 2532-2534
Zhu, M
;
Chu, PK
;
Shi, XJ
;
Wong, M
;
Liu, WL
;
Lin, CL
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2012/03/24
IMMERSION ION-IMPLANTATION
AMORPHOUS-CARBON
TECHNOLOGY
FILMS
Electron field emission from SiC/Si heterostructures by high temperature carbon implantation into silicon
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2004, 卷号: 84, 期号: 26, 页码: 5461-5463
Xing, YM
;
Zhang, JH
;
Yang, WW
;
Yu, YH
;
Song, ZR
;
Lin, ZX
;
Shen, DS
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2012/03/24
DIAMOND-LIKE CARBON
ENHANCEMENT
ARRAYS
LAYERS
FILMS
Comparative study of SOI/Si hybrid substrates fabricated using high-dose and low-dose oxygen implantation
期刊论文
OAI收割
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 卷号: 37, 期号: 13, 页码: 1732-1735
Dong, YM
;
Chen, M
;
Chen, J
;
Wang, X
;
Wang, X
收藏
  |  
浏览/下载:11/0
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提交时间:2012/03/24
BURIED OXIDE LAYERS
ION-IMPLANTATION
SILICON
OXIDATION
Oxygen profile engineering in silicon by germanium addition and high-temperature annealing
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2003, 卷号: 83, 期号: 2, 页码: 305-307
An, ZH
;
Chu, PK
;
Zhang, M
;
Men, CL
;
Lin, CL
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2012/03/24
ION-IMPLANTATION
SI/SIO2 SUPERLATTICE
SI
Linear and third-order nonlinear optical absorption of amorphous Ge nanoclusters embedded in Al2O3 matrix synthesized by electron-beam coevaporation
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2003, 卷号: 82, 期号: 19, 页码: 3162-3164
Wan, Q
;
Lin, CL
;
Zhang, NL
;
Liu, WL
;
Yang, G
;
Wang, TH
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2012/03/24
Z-SCAN DETERMINATION
ION-IMPLANTATION
VISIBLE PHOTOLUMINESCENCE
SI NANOCRYSTALS
SILICA MATRIX
FILMS
LUMINESCENCE
Dose-energy match for the formation of high-integrity buried oxide layers in low-dose separation-by-implantation-of-oxygen materials
期刊论文
OAI收割
APPLIED PHYSICS LETTERS, 2002, 卷号: 80, 期号: 5, 页码: 880-882
Chen, M
;
Wang, X
;
Chen, J
;
Liu, XH
;
Dong, YM
;
Yu, YH
;
Wang, X
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2012/03/24
SIMOX WAFERS
TEMPERATURE