中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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浏览/检索结果: 共318条,第1-10条 帮助

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Lead Oxalate-Induced Nucleation Retardation for High-Performance Indoor and Outdoor Perovskite Photovoltaics 期刊论文  OAI收割
ACS APPLIED MATERIALS & INTERFACES, 2020, 卷号: 12, 期号: 1, 页码: 836-843
作者:  
Dong, C;  Li, M;  Zhang, Y;  Wang, KL;  Yuan, S
  |  收藏  |  浏览/下载:25/0  |  提交时间:2021/09/06
A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes 期刊论文  OAI收割
Journal of Microelectronic Manufacturing, 2018
作者:  
Zhao C(赵超);  Wei YY(韦亚一);  Chen R(陈睿);  Dong LS(董立松);  Liu YS(刘艳松)
  |  收藏  |  浏览/下载:37/0  |  提交时间:2019/05/05
Retargeting of forbidden-dense-alternate structures for lithography capability improvement in advanced nodes 期刊论文  OAI收割
APPLIED OPTICS, 2018
作者:  
He JF(何建芳);  Dong LS(董立松);  Ye TC(叶甜春);  Zhao LJ(赵利俊);  Wei YY(韦亚一)
  |  收藏  |  浏览/下载:24/0  |  提交时间:2019/05/05
Pattern quality and defect evaluation based on cross correlation and power spectral density methods 期刊论文  OAI收割
J Vac Sci Technol B, 2018
作者:  
Zhang LB(张利斌);  Ma L(马乐);  Chen R(陈睿);  He JF(何建芳);  Su XJ(苏晓菁)
  |  收藏  |  浏览/下载:25/0  |  提交时间:2019/05/05
Characteristic study of image-based alignment for increasing accuracy in lithography application 期刊论文  OAI收割
Journal of Vacuum Science & Technology B, 2017
作者:  
Zhang LB(张利斌);  Dong LS(董立松);  Su XJ(苏晓菁);  Wei YY(韦亚一)
  |  收藏  |  浏览/下载:17/0  |  提交时间:2018/07/09
Applications of RCWA on EUV mask optics 会议论文  OAI收割
作者:  
Fan TA(范泰安);  Dong LS(董立松);  Wei YY(韦亚一)
  |  收藏  |  浏览/下载:11/0  |  提交时间:2018/07/26
Necessity of resist model in source mask optimization for negative tone development process 期刊论文  OAI收割
J. Micro/Nanolith. MEMS MOEMS, 2017
作者:  
Wei YY(韦亚一);  Dong LS(董立松);  Zhao LJ(赵利俊);  Chen WH(陈文辉);  Ye TC(叶甜春)
  |  收藏  |  浏览/下载:21/0  |  提交时间:2018/06/08
Optimization of the focus monitor mark in immersion lithography according to illumination type 期刊论文  OAI收割
J. Micro/Nanolith. MEMS MOEMS, 2017
作者:  
Zhang LB(张利斌);  Wei YY(韦亚一);  He JF(何建芳)
  |  收藏  |  浏览/下载:20/0  |  提交时间:2018/06/08
Mitigating the influence of wafer topography on the implantation process in optical lithography 期刊论文  OAI收割
Optics Letter, 2017
作者:  
Su XJ(苏晓菁);  Dong LS(董立松);  Chen WH(陈文辉);  Fan TA(范泰安);  Wei YY(韦亚一)
  |  收藏  |  浏览/下载:19/0  |  提交时间:2018/06/08
An off-line roughness evaluation software and its application in quantitative calculation of wiggling based on low frequency power spectrum density method 会议论文  OAI收割
作者:  
Zhao LJ(赵利俊);  Zhang LB(张利斌);  Dong LS(董立松);  Su XJ(苏晓菁);  Liu YS(刘艳松)
  |  收藏  |  浏览/下载:12/0  |  提交时间:2018/07/26