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CAS IR Grid
机构
上海光学精密机械研... [10]
地理科学与资源研究所 [1]
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OAI收割 [11]
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期刊论文 [11]
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2024 [1]
2009 [9]
2007 [1]
学科主题
光学 [4]
光学::物理光学 [2]
光学::物理光学::... [1]
激光技术 [1]
激光技术::光检测技... [1]
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Spatial and Temporal Patterns of Maize Phenology in China From 2001 to 2020
期刊论文
OAI收割
JOURNAL OF GEOPHYSICAL RESEARCH-BIOGEOSCIENCES, 2024, 卷号: 129, 期号: 10, 页码: e2024JG008095
作者:
Peng, Qiongyan
;
Shen, Ruoque
;
Liu, Yujie
;
Li, Xiangqian
;
Sun, Qingling
  |  
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2024/11/19
maize
phenology
fused data set
high spatial resolution
climate change
China
Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 19, 页码: 3654-3663
Zicheng Qiu
;
Xiangzhao Wang
;
Qunyu Bi
;
Qiongyan Yuan
;
Bo Peng
;
and Lifeng Duan
收藏
  |  
浏览/下载:1046/213
  |  
提交时间:2010/04/19
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 2, 页码: 261-269
Zicheng Qiu
;
Xiangzhao Wang
;
Qiongyan Yuan
;
and Fan Wang
收藏
  |  
浏览/下载:1004/198
  |  
提交时间:2010/04/19
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 19
Zicheng Qiu
;
Xiangzhao Wang
;
Qiongyan Yuan
;
and Fan Wang
收藏
  |  
浏览/下载:846/127
  |  
提交时间:2010/04/26
Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node
期刊论文
OAI收割
optik, 2009, 卷号: 120, 期号: 7, 页码: 325, 329
Yuan Qiongyan
;
王向朝
;
Qiu Zicheng
收藏
  |  
浏览/下载:1362/237
  |  
提交时间:2009/09/18
Immersion lithography
Polarized illumination
Normalized image log slope
Exposure defocus window
Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 19
Zicheng Qiu, Xiangzhao Wang, Qunyu Bi, Qiongyan Yuan, Bo Peng, Lifeng Duan
收藏
  |  
浏览/下载:929/161
  |  
提交时间:2010/04/26
Even aberration measurement of lithographic projection system based on optimized phase-shifting marks
期刊论文
OAI收割
microelectron. eng., 2009, 卷号: 86, 期号: 1, 页码: 78, 82
Yuan Qiongyan
;
王向朝
;
Qiu Zicheng
;
Wang Fan
;
马明英
收藏
  |  
浏览/下载:1101/181
  |  
提交时间:2009/09/18
Lithography
Projection optics
Spherical aberration
Astigmatism
Zernike coefficients
Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45nm node
期刊论文
OAI收割
optik, 2009, 卷号: 120, 期号: 7
Qiongyan Yuan
;
Xiangzhao Wang
;
Zicheng Qiu
收藏
  |  
浏览/下载:911/130
  |  
提交时间:2010/04/26
Even aberration measurement of lithographic projection system based on optimized phase-shifting marks
期刊论文
OAI收割
microelectronic engineering, 2009, 卷号: 86, 期号: 1
Qiongyan Yuan
;
Xiangzhao Wang
;
Zicheng Qiu
;
Fan Wang
;
Mingying Ma
收藏
  |  
浏览/下载:914/168
  |  
提交时间:2010/04/26
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width
期刊论文
OAI收割
appl. optics, 2009, 卷号: 48, 期号: 2, 页码: 261, 269
Qiu Zicheng
;
王向朝
;
Yuan Qiongyan
;
Wang Fan
收藏
  |  
浏览/下载:1153/199
  |  
提交时间:2009/09/18
LITHOGRAPHY SIMULATION
ABERRATION MEASUREMENT
PROJECTION OPTICS
LENS ABERRATIONS
TOOLS