机构

• 上海微系统与信息技术... [6]

采集方式

• OAI收割 [6]

内容类型

• 期刊论文 [6]

发表日期

• 2004 [1]
• 2002 [2]
• 2000 [3]

学科主题

• Materials ... [2]
• Materials ... [2]
• Applied [1]
• Applied; P... [1]
• Coatings &... [1]
• Condensed ... [1]
• 更多

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浏览/检索结果: 共6条，第1-6条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Simulation and characterization on properties of AlN films for SOI application 期刊论文  OAI收割 THIN SOLID FILMS, 2004, 卷号: 459, 期号: 1-2, 页码: 41-47 Song,ZR; Yu,YH; Zou,SC; Zheng,ZH; Shen,DS; Luo,EZ; Xie,Z; Sundaravel,B; Wong,SP; Wilson,IH 收藏  |  浏览/下载：24/0  |  提交时间：2012/03/24 THIN-FILMS  DEPOSITION  MOSFETS  SILICON  GROWTH   Preferentially oriented and amorphous Ti, TiN and Ti/TiN diffusion barrier for Cu prepared by ion beam assisted deposition (IBAD) 期刊论文  OAI收割 SURFACE & COATINGS TECHNOLOGY, 2002, 卷号: 151, 页码: 434-439 Chen, KW; Yu, YH; Mu, HC; Luo, EZ; Sundaravel, B; Wong, SP; Wilson, IH 收藏  |  浏览/下载：16/0  |  提交时间：2012/03/24 LAYERS   Tetrahedral amorphous-carbon thin films for silicon-on-insulator application 期刊论文  OAI收割 APPLIED PHYSICS LETTERS, 2002, 卷号: 80, 期号: 5, 页码: 743-745 Song,ZR; Yu,YH; Li,CL; Zou,SC; Zhang,FM; Wang,X; Shen,DS; Luo,EZ; Sundaravel,B; Wong,SP; Wilson,IH 收藏  |  浏览/下载：62/0  |  提交时间：2012/03/24 DIAMOND-LIKE CARBON  COMPRESSIVE-STRESS  ION  ENERGY   Ti, TiN, and Ti/TiN thin films prepared by ion beam assisted deposition as diffusion barriers between Cu and Si 期刊论文  OAI收割 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 卷号: 18, 期号: 5, 页码: 2312-2318 Mu, HC; Yu, YH; Luo, EZ; Sundaravel, B; Wong, SP; Wilson, IH 收藏  |  浏览/下载：15/0  |  提交时间：2012/03/24 TRANSITION-METALS  COPPER  METALLIZATION  LAYERS  SILICON  MO  TA   AlN thin films prepared by reactive ion beam coating 期刊论文  OAI收割 FUNDAMENTAL MECHANISMS OF LOW-ENERGY-BEAM-MODIFIED SURFACE GROWTH AND PROCESSING, 2000, 卷号: 585, 期号: 0, 页码: 251-256 Cheng,LL; Yu,YH; Sundaravel,B; Luo,EZ; Lin,S; Lei,YM; Ren,CX; Cheung,WY; Wong,SP; Xu,JB; Wilson,IH 收藏  |  浏览/下载：66/0  |  提交时间：2012/03/24 AUGER-ELECTRON SPECTROSCOPY  ALUMINUM NITRIDE  DEPOSITION  GROWTH   Compositional and morphological study of reactive ion beam deposited AlN thin films 期刊论文  OAI收割 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 卷号: 169, 页码: 94-97 Cheng, LL; Yu, YH; Sundaravel, B; Luo, EZ; Lin, S; Lei, YM; Ren, CX; Cheung, WY; Wong, SP; Xu, JB; Wilson, IH 收藏  |  浏览/下载：19/0  |  提交时间：2012/03/24 AUGER-ELECTRON SPECTROSCOPY  ALUMINUM NITRIDE  GROWTH  AIN