中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
半导体研究所 [4]
力学研究所 [1]
物理研究所 [1]
南海海洋研究所 [1]
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OAI收割 [6]
iSwitch采集 [1]
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期刊论文 [6]
会议论文 [1]
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2014 [1]
2008 [1]
2003 [3]
1999 [1]
1991 [1]
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半导体材料 [2]
Crystallog... [1]
Materials ... [1]
Physics [1]
半导体物理 [1]
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Large eddy simulation of industrial Czochralski Si crystal growth under transverse magnetic field
期刊论文
OAI收割
JOURNAL OF CRYSTAL GROWTH, 2014, 卷号: 389, 页码: 60-67
Chen, X
;
Zhan, JM
;
Li, YS
;
Cen, XR
收藏
  |  
浏览/下载:41/0
  |  
提交时间:2014/12/11
Computer simulation
Heat transfer
Semiconducting silicon
Magnetic field assisted Czochralski method
Progress In Modeling Of Fluid Flows In Crystal Growth Processes
期刊论文
OAI收割
Progress In Natural Science, 2008, 页码: 1465-1473
作者:
Chen QS(陈启生)
;
Jiang YN(姜燕妮)
;
Yan JY(颜君毅)
;
Qin M(秦明)
;
Chen QS(陈启生)
收藏
  |  
浏览/下载:737/52
  |  
提交时间:2009/08/03
Modeling
Crystal Growth
Fluid Flow
Czochralski Growth
Ammonothermal Growth
Physical Vapor Transport
Transverse Magnetic-Field
Physical-Vapor Transport
Sic-Bulk Growth
Silicon Czochralski Furnace
Thermal-Capillary Analysis
Radiative Heat-Transfer
Sublimation Growth
Numerical-Simulation
Ammonothermal Growth
Oxygen Distribution
Effects and numerical analysis of argon gas flow on the oxygen concentration in czochralski silicon single crystal growth
期刊论文
iSwitch采集
Microelectronic engineering, 2003, 卷号: 66, 期号: 1-4, 页码: 504-509
作者:
Zhang, ZC
;
Ren, BY
;
Chen, YH
;
Yang, SY
;
Wang, ZG
收藏
  |  
浏览/下载:48/0
  |  
提交时间:2019/05/12
Czochralski method
Growth from melt
Semiconductor silicon
Argon gas flow
Computer simulation
Oxygen content
Effects and numerical analysis of argon gas flow on the oxygen concentration in Czochralski silicon single crystal growth
会议论文
OAI收割
iumrs/icem 2002 conference, xian, peoples r china, jun 10-14, 2002
Zhang ZC
;
Ren BY
;
Chen YH
;
Yang SY
;
Wang ZG
收藏
  |  
浏览/下载:42/0
  |  
提交时间:2010/11/15
Czochralski method
growth from melt
semiconductor silicon
argon gas flow
computer simulation
oxygen content
FURNACE PRESSURE
Effects and numerical analysis of argon gas flow on the oxygen concentration in Czochralski silicon single crystal growth
期刊论文
OAI收割
microelectronic engineering, 2003, 卷号: 66, 期号: 1-4, 页码: 504-509
Zhang ZC
;
Ren BY
;
Chen YH
;
Yang SY
;
Wang ZG
收藏
  |  
浏览/下载:52/0
  |  
提交时间:2010/08/12
Czochralski method
growth from melt
semiconductor silicon
argon gas flow
computer simulation
oxygen content
FURNACE PRESSURE
Observation of defects in a C3N4/diamond/Si structure by infrared light scattering tomography
期刊论文
OAI收割
JOURNAL OF PHYSICS-CONDENSED MATTER, 1999, 卷号: 11, 期号: 20, 页码: L191
Ma, MY
;
Tsuru, T
;
Ogawa, T
;
Mai, ZH
;
Wang, CY
;
Guo, JG
;
Ma, XC
;
Wang, EG
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2013/09/24
CZOCHRALSKI SILICON
FILMS
CRYSTALS
DIAMOND
SOLIDS
PHASE
C3N4
ELECTRICAL CHARACTERS OF OXYGEN DEFECTS IN SILICON SUBJECTED TO INTRINSIC GETTERING TREATMENT
期刊论文
OAI收割
journal of applied physics, 1991, 卷号: 70, 期号: 1, 页码: 511-513
LI JM
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  |  
浏览/下载:30/0
  |  
提交时间:2010/11/15
CZOCHRALSKI-GROWN SILICON
MICRODEFECTS
DISLOCATIONS
BEHAVIOR
WAFERS