中国科学院机构知识库网格系统: 检索

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	Low-temperature (120 degrees C) growth of nanocrystalline silicon films prepared by plasma enhanced chemical vapor deposition from SiCl4/H-2 gases: Microstructure characterization 期刊论文 OAI收割 Applied Surface Science, 2012, 卷号: 258, 期号: 7, 页码: 3221-3226 L. Zhang; J. H. Gao; J. Q. Xiao; L. S. Wen; J. Gong; C. Sun 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/02/05 Nanocrystalline silicon PECVD Microstructure Raman spectra hydrogenated amorphous-silicon thin-films raman-spectroscopy solar-cells mechanism sih2cl2
	Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils 期刊论文 OAI收割 Materials Letters, 2012, 卷号: 68, 页码: 367-369 J. H. Gao; L. Zhang; J. Q. Xiao; J. Gong; C. Sun; L. S. Wen 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/02/05 Nanocrystalline silicon Thin films Solenoid coil Sputtering microcrystalline silicon fabrication deposition layer tool
	Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering 期刊论文 OAI收割 Journal of Materials Science & Technology, 2012, 卷号: 28, 期号: 11, 页码: 992-998 J. H. Gao; L. Zhang; J. Q. Xiao; J. Gong; C. Sun; L. S. Wen 收藏 \| 浏览/下载：16/0 \| 提交时间：2013/02/05 Nanocrystalline silicon Thin film Solenoid coil MF magnetron sputtering chemical-vapor-deposition amorphous-silicon thin-films microstructure temperature fabrication density si
	Effect of argon on the structure of hydrogenated nanocrystalline silicon deposited from tetrachlorosilane/hydrogen/argon plasma 期刊论文 OAI收割 Physica Status Solidi a-Applications and Materials Science, 2012, 卷号: 209, 期号: 6, 页码: 1080-1084 L. Zhang; J. H. Gao; J. Q. Xiao; L. S. Wen; J. Gong; C. Sun 收藏 \| 浏览/下载：15/0 \| 提交时间：2013/02/05 hydrogen concentration microstructure nanocrystalline silicon Raman spectra chemical-vapor-deposition low-temperature growth amorphous-silicon microcrystalline silicon raman-spectroscopy solar-cells thin-films chemistry mechanism kinetics
	Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells 期刊论文 OAI收割 cailiao gongcheng/journal of materials engineering, 2011, 期号: 8, 页码: 5-7+13 Liu, Shi-Yong; Zeng, Xiang-Bo; Peng, Wen-Bo; Yao, Wen-Jie; Xie, Xiao-Bing; Yang, Ping; Wang, Chao; Wang, Zhan-Guo 收藏 \| 浏览/下载：37/0 \| 提交时间：2012/06/14 Amorphous films Chemical vapor deposition Energy gap High resolution electron microscopy High resolution transmission electron microscopy Hydrogen Nanocrystalline silicon Optical band gaps Plasma deposition Plasma enhanced chemical vapor deposition Raman spectroscopy Semiconducting silicon compounds Solar power generation Thin films Transmission electron microscopy
	The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films 期刊论文 OAI收割 optoelectronics and advanced materials-rapid communications, 2011, 卷号: 5, 期号: 40545, 页码: 112-115 Hao HY; Xing J; Li WM; Zeng XB; Kong GL; Liao XB 收藏 \| 浏览/下载：85/3 \| 提交时间：2011/07/06 Nanocrystalline silicon thin films Structure Photoelectrical properties Stability MICROCRYSTALLINE SILICON TRANSITION FILMS SOLAR-CELLS HYDROGEN
	The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films 期刊论文 iSwitch采集 Optoelectronics and advanced materials-rapid communications, 2011, 卷号: 5, 期号: 1-2, 页码: 112-115 作者: Hao, Huiying; Xing, Jie; Li, Weimin; Zeng, Xiangbo; Kong, Guanglin 收藏 \| 浏览/下载：44/0 \| 提交时间：2019/05/12 Nanocrystalline silicon thin films Structure Photoelectrical properties Stability
	Microstructural control of Cr-Si-N films by a hybrid arc ion plating and magnetron sputtering process 期刊论文 OAI收割 Acta Materialia, 2009, 卷号: 57, 期号: 17, 页码: 4974-4987 Q. M. Wang; K. H. Kim 收藏 \| 浏览/下载：21/0 \| 提交时间：2012/04/13 Cr-Si-N Nanocomposite Physical vapor deposition Nanocrystalline microstructure Transmission electron microscopy nanocomposite thin-films negative bias voltage mechanical-properties coating system cathodic arc deposition silicon growth layer hard