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• 上海微系统与信息技术... [7]

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• OAI收割 [7]

内容类型

• 期刊论文 [7]

发表日期

• 2010 [5]
• 2009 [1]
• 2007 [1]

学科主题

• Engineerin... [2]
• Electroche... [1]
• Materials ... [1]
• Materials ... [1]
• Optics [1]
• Physics, M... [1]
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浏览/检索结果: 共7条，第1-7条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 Investigation on the controllable growth of monodisperse silica colloid abrasives for the chemical mechanical polishing application 期刊论文  OAI收割 MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 9, 页码: 1751-1755 Hu, XK; Song, ZT; Wang, HB; Liu, WL; Zhang, ZF 收藏  |   Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing 期刊论文  OAI收割 POWDER TECHNOLOGY AND APPLICATION II, 2010, 卷号: 92, 页码: 183-187 Hu,XK; Song,ZT; Wang,HB; Liu,WL; Qin,F; Zhang,ZF 收藏  |   Particle size and surfactant effects on chemical mechanical polishing of glass using silica-based slurry 期刊论文  OAI收割 APPLIED OPTICS, 2010, 卷号: 49, 期号: 28, 页码: 5480-5485 Zhang, ZF; Liu, WL; Song, ZT 收藏  |   Effect of abrasive particle concentration on preliminary chemical mechanical polishing of glass substrate 期刊论文  OAI收割 MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 11, 页码: 2168-2172 Zhang, ZF; Liu, WL; Song, ZT 收藏  |   Two-Step Chemical Mechanical Polishing of Sapphire Substrate 期刊论文  OAI收割 JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 6, 页码: H688-H691 Zhang, ZF; Liu, WL; Song, ZT; Hu, XK 收藏  |   Cation Effect on Copper Chemical Mechanical Polishing 期刊论文  OAI收割 CHINESE PHYSICS LETTERS, 2009, 卷号: 26, 期号: 2, 页码: 28103-28103 Wang, LY; Liu, B; Song, ZT; Feng, SL 收藏  |   Colloidal nano-abrasives and slurry for chemical-mechanical polishing of semiconductor materials 期刊论文  OAI收割 JOURNAL OF CERAMIC PROCESSING RESEARCH, 2007, 卷号: 8, 期号: 1, 页码: 52-55 Zhang, KL; Song, ZT; Lin, CL; Feng, SF; Chen, B 收藏  |