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Chinese Academy of Sciences Institutional Repositories Grid
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Microstructure and properties of AlB2-type WB2 thin films deposited by direct-current magnetron sputtering 期刊论文  OAI收割
Surface & Coatings Technology, 2014, 卷号: 245, 页码: 108-116
Y. M. Liu; C. L. Jiang; Z. L. Pei; H. Lei; J. Gong; C. Sun
收藏  |  浏览/下载:25/0  |  提交时间:2014/07/03
Influence of substrate bias voltage on the microstructure and residual stress of CrN films deposited by medium frequency magnetron sputtering 期刊论文  OAI收割
Materials Science and Engineering B, 2011, 卷号: 176, 页码: 850-854
作者:  
Ji L(吉利);  Li HX(李红轩);  Li HX(李红轩);  Zhou HD(周惠娣);  Chen JM(陈建敏)
收藏  |  浏览/下载:29/0  |  提交时间:2012/09/24
Low content indium-doped zinc oxide films with tunable work function fabricated through magnetron sputtering 期刊论文  OAI收割
Semiconductor Science and Technology, 2010, 卷号: 25, 期号: 4
C. G. Huang, M. L. Wang, Z. H. Deng, Y. G. Cao, Q. L. Liu, Z. Huang, Y. Liu, W. Guo and Q. F. Huang
收藏  |  浏览/下载:42/0  |  提交时间:2012/11/02
Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating 期刊论文  OAI收割
Journal of Materials Science & Technology, 2009, 卷号: 25, 期号: 5, 页码: 681-686
Y. H. Zhao; G. Q. Liu; J. Q. Xiao; C. Dong; L. S. Wen
收藏  |  浏览/下载:19/0  |  提交时间:2012/04/13
Substrate temperature calculation for pulsed bias arc ion plating 期刊论文  OAI收割
Surface & Coatings Technology, 2005, 卷号: 194, 期号: 2-3, 页码: 325-329
G. Q. Lin; X. Bai; C. Dong; W. Lishi; L. H. Wen
收藏  |  浏览/下载:26/0  |  提交时间:2012/04/14
Low temperature deposition of titanium nitride 期刊论文  OAI收割
Journal of Materials Science & Technology, 1998, 卷号: 14, 期号: 4, 页码: 289-293
L. S. Wen; R. F. Huang
收藏  |  浏览/下载:18/0  |  提交时间:2012/04/14