机构

• 光电技术研究所 [16]
• 上海光学精密机械研... [11]
• 长春应用化学研究所 [7]
• 长春光学精密机械与物... [5]
• 物理研究所 [3]
• 力学研究所 [1]
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• OAI收割 [48]

内容类型

• 期刊论文 [40]
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• 外文期刊 [1]

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• 2020 [2]
• 2019 [1]
• 2018 [1]
• 2016 [10]
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学科主题

• 光学工程 [2]
• 光电子技术 [1]

筛选

浏览/检索结果: 共48条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application 期刊论文  OAI收割 IEEE Photonics Journal, 2020, 卷号: 12, 期号: 4, 页码: 2400310-1-10 作者:  Liu, Xin;  Gong, Changchang;  Fan, Bin;  Bian, Jiang   |  收藏  |  浏览/下载：52/0  |  提交时间：2021/05/11 Flexible Membrane  Diffractive Optical Elements  Polyimide  Contact Lithography  Microstructure Morphology Error  Wave-front Error   Dynamic fabrication of microfluidic systems for particles separation based on optical projection lithography 期刊论文  OAI收割 Biomedical Microdevices, 2020, 卷号: 22, 期号: 4, 页码: 1-7 作者:  Sun LJ(孙路静);  Yang WG(杨文广);  Chu HH(褚洪汇);  Yang, Rendi;  Yu HB(于海波)   |  收藏  |  浏览/下载：32/0  |  提交时间：2020/11/28 Particles separation  Microfluidic technology  Optical projection lithography   Plasmonic Interference Lithography for Low-Cost Fabrication of Dense Lines with Sub-50 nm Half-Pitch 期刊论文  OAI收割 ACS Applied Nano Materials, 2019, 卷号: 2, 期号: 1, 页码: 489-496 作者:  Kong, Weijie;  Luo, Yunfei;  Zhao, Chengwei;  Liu, Ling;  Gao, Ping   |  收藏  |  浏览/下载：31/0  |  提交时间：2021/05/06 interference lithography  surface plasmonic  optical waveguide  near-field  diffraction limit  super resolution  nanomanufacturing  subwavelength optics   Optical coatings for projection objective immersion lithography 期刊论文  OAI收割 Chinese Optics, 2018, 卷号: 11, 期号: 5, 页码: 745-764 作者:  Bi, Dan-Dan;  Zhang, Li-Chao;  Shi, Guang   |  收藏  |  浏览/下载：15/0  |  提交时间：2019/09/17 Optical films  Integrated circuit manufacture  Irradiation  Lithography  Optical coatings  Optical systems   Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review 期刊论文  OAI收割 MICROMACHINES, 2016, 卷号: 7, 期号: 7 作者:  Wang, Changtao;  Zhang, Wei;  Zhao, Zeyu;  Wang, Yanqin;  Gao, Ping 收藏  |  浏览/下载：29/0  |  提交时间：2016/11/15 surface plasmon polaritons  bulk plasmon polaritons  diffraction limit  subwavelength optics  near-field optics  metamaterial  super resolution  nano optical lithography  nanostructure fabrication   Study of Characteristics of Vortex Beam Produced by Fabricated Spiral Phase Plates 期刊论文  OAI收割 IEEE PHOTONICS JOURNAL, 2016, 卷号: 8, 期号: 2 作者:  Wang, Jiazhou;  Cao, Axiu;  Zhang, Man;  Pang, Hui;  Hu, Song 收藏  |  浏览/下载：23/0  |  提交时间：2016/10/27 Spiral phase plates (SPPs)  optical vortices  lithography  micro-optical devices   Analysis of adjustment error in aspheric null testing with CGH 期刊论文  OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technology: Optical Test, Measurement Technology, and Equipment, 2016, 卷号: 9684, 页码: 968444 作者:  He, Yiwei;  Xi, Hou;  Chen, Qiang   |  收藏  |  浏览/下载：38/0  |  提交时间：2018/06/14 Aspherics  Electron Holography  Errors  Holograms  Lithography  Manufacture  Optical Testing  Wavefronts   Design and simulation of large field plate lithography lens 期刊论文  OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850V 作者:  Deng, Chao;  Xing, Tingwen;  Lin, Wumei;  Zhu, Xianchang   |  收藏  |  浏览/下载：28/0  |  提交时间：2018/06/14 Fits And Tolerances  Lithography  Manufacture  Materials Testing  Optical Design  Optical Devices  Optical Systems   Applying Q-Type aspheres in the ultraviolet lithography objective lens 期刊论文  OAI收割 Proceedings of SPIE: Novel Optical Systems Design and Optimization XIX, 2016, 卷号: 9948, 页码: 994804 作者:  Bai, Yu;  Xing, Tingwen;  Jiang, Yadong   |  收藏  |  浏览/下载：31/0  |  提交时间：2018/06/14 Cost Engineering  Lenses  Lithography  Metal Drawing  Optical Design  Optical Instrument Lenses  Silica  Systems Analysis   A new flexible hybrid mask for contact exposure and its fabrication 期刊论文  OAI收割 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q 作者:  Liu, Xin;  Zhang, Man;  Cao, A-Xiu;  Pang, Hui;  Wang, Jia-Zhou   |  收藏  |  浏览/下载：26/0  |  提交时间：2018/06/14 Elastic Moduli  Fabrication  Lithography  Manufacture  Nanostructures  Optical Devices  Photolithography  Photoresists  Polymers  Printing