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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
上海光学精密机械研... [15]
地理科学与资源研究所 [1]
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OAI收割 [16]
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期刊论文 [16]
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2024 [1]
2010 [3]
2009 [9]
2007 [2]
2006 [1]
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光学 [7]
光学::物理光学 [2]
光学::物理光学::... [1]
激光技术 [1]
激光技术::光检测技... [1]
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Spatial and Temporal Patterns of Maize Phenology in China From 2001 to 2020
期刊论文
OAI收割
JOURNAL OF GEOPHYSICAL RESEARCH-BIOGEOSCIENCES, 2024, 卷号: 129, 期号: 10, 页码: e2024JG008095
作者:
Peng, Qiongyan
;
Shen, Ruoque
;
Liu, Yujie
;
Li, Xiangqian
;
Sun, Qingling
  |  
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2024/11/19
maize
phenology
fused data set
high spatial resolution
climate change
China
Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image
期刊论文
OAI收割
optik, 2010, 卷号: 121, 期号: 19, 页码: 1739-1742
Yuan QY(袁琼雁)
;
Wang XZ(王向朝)
;
Qiu ZC(邱自成)
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2011/03/31
Measurement technique for characterizing odd aberration of lithographic projection optics based on dipole illumination
期刊论文
OAI收割
optics communications, 2010, 卷号: 283, 期号: 11, 页码: 2309-2317
Peng B(彭勃)
;
Wang XZ(王向朝)
;
Qiu ZC(邱自成)
;
Yuan QY(袁琼雁)
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2011/03/31
Aberration induced intensity imbalance of alternating phase shifting mask in lithographic imaging
期刊论文
OAI收割
optics letters, 2010, 卷号: 35, 期号: 9, 页码: 1404-1406
Peng B(彭勃)
;
Wang XZ(王向朝)
;
Qiu ZC(邱自成)
;
Yuan QY(袁琼雁)
;
Cao YT(曹宇婷)
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2011/03/31
Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 19, 页码: 3654-3663
Zicheng Qiu
;
Xiangzhao Wang
;
Qunyu Bi
;
Qiongyan Yuan
;
Bo Peng
;
and Lifeng Duan
收藏
  |  
浏览/下载:1046/213
  |  
提交时间:2010/04/19
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 2, 页码: 261-269
Zicheng Qiu
;
Xiangzhao Wang
;
Qiongyan Yuan
;
and Fan Wang
收藏
  |  
浏览/下载:1004/198
  |  
提交时间:2010/04/19
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 19
Zicheng Qiu
;
Xiangzhao Wang
;
Qiongyan Yuan
;
and Fan Wang
收藏
  |  
浏览/下载:846/127
  |  
提交时间:2010/04/26
Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node
期刊论文
OAI收割
optik, 2009, 卷号: 120, 期号: 7, 页码: 325, 329
Yuan Qiongyan
;
王向朝
;
Qiu Zicheng
收藏
  |  
浏览/下载:1362/237
  |  
提交时间:2009/09/18
Immersion lithography
Polarized illumination
Normalized image log slope
Exposure defocus window
Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations
期刊论文
OAI收割
applied optics, 2009, 卷号: 48, 期号: 19
Zicheng Qiu, Xiangzhao Wang, Qunyu Bi, Qiongyan Yuan, Bo Peng, Lifeng Duan
收藏
  |  
浏览/下载:929/161
  |  
提交时间:2010/04/26
Even aberration measurement of lithographic projection system based on optimized phase-shifting marks
期刊论文
OAI收割
microelectron. eng., 2009, 卷号: 86, 期号: 1, 页码: 78, 82
Yuan Qiongyan
;
王向朝
;
Qiu Zicheng
;
Wang Fan
;
马明英
收藏
  |  
浏览/下载:1101/181
  |  
提交时间:2009/09/18
Lithography
Projection optics
Spherical aberration
Astigmatism
Zernike coefficients