中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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浏览/检索结果: 共16条,第1-10条 帮助

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Spatial and Temporal Patterns of Maize Phenology in China From 2001 to 2020 期刊论文  OAI收割
JOURNAL OF GEOPHYSICAL RESEARCH-BIOGEOSCIENCES, 2024, 卷号: 129, 期号: 10, 页码: e2024JG008095
作者:  
Peng, Qiongyan;  Shen, Ruoque;  Liu, Yujie;  Li, Xiangqian;  Sun, Qingling
  |  收藏  |  浏览/下载:10/0  |  提交时间:2024/11/19
Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image 期刊论文  OAI收割
optik, 2010, 卷号: 121, 期号: 19, 页码: 1739-1742
Yuan QY(袁琼雁); Wang XZ(王向朝); Qiu ZC(邱自成)
收藏  |  浏览/下载:37/0  |  提交时间:2011/03/31
Measurement technique for characterizing odd aberration of lithographic projection optics based on dipole illumination 期刊论文  OAI收割
optics communications, 2010, 卷号: 283, 期号: 11, 页码: 2309-2317
Peng B(彭勃); Wang XZ(王向朝); Qiu ZC(邱自成); Yuan QY(袁琼雁)
收藏  |  浏览/下载:9/0  |  提交时间:2011/03/31
Aberration induced intensity imbalance of alternating phase shifting mask in lithographic imaging 期刊论文  OAI收割
optics letters, 2010, 卷号: 35, 期号: 9, 页码: 1404-1406
Peng B(彭勃); Wang XZ(王向朝); Qiu ZC(邱自成); Yuan QY(袁琼雁); Cao YT(曹宇婷)
收藏  |  浏览/下载:28/0  |  提交时间:2011/03/31
Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations 期刊论文  OAI收割
applied optics, 2009, 卷号: 48, 期号: 19, 页码: 3654-3663
Zicheng Qiu; Xiangzhao Wang; Qunyu Bi; Qiongyan Yuan; Bo Peng; and Lifeng Duan
收藏  |  浏览/下载:1046/213  |  提交时间:2010/04/19
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width 期刊论文  OAI收割
applied optics, 2009, 卷号: 48, 期号: 2, 页码: 261-269
Zicheng Qiu; Xiangzhao Wang; Qiongyan Yuan; and Fan Wang
收藏  |  浏览/下载:1004/198  |  提交时间:2010/04/19
Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width 期刊论文  OAI收割
applied optics, 2009, 卷号: 48, 期号: 19
Zicheng Qiu; Xiangzhao Wang; Qiongyan Yuan; and Fan Wang
收藏  |  浏览/下载:846/127  |  提交时间:2010/04/26
Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node 期刊论文  OAI收割
optik, 2009, 卷号: 120, 期号: 7, 页码: 325, 329
Yuan Qiongyan; 王向朝; Qiu Zicheng
收藏  |  浏览/下载:1362/237  |  提交时间:2009/09/18
Translational-symmetry alternating phase shifting mask grating mark used in a linear measurement model of lithographic projection lens aberrations 期刊论文  OAI收割
applied optics, 2009, 卷号: 48, 期号: 19
Zicheng Qiu, Xiangzhao Wang, Qunyu Bi, Qiongyan Yuan, Bo Peng, Lifeng Duan
收藏  |  浏览/下载:929/161  |  提交时间:2010/04/26
Even aberration measurement of lithographic projection system based on optimized phase-shifting marks 期刊论文  OAI收割
microelectron. eng., 2009, 卷号: 86, 期号: 1, 页码: 78, 82
Yuan Qiongyan; 王向朝; Qiu Zicheng; Wang Fan; 马明英
收藏  |  浏览/下载:1101/181  |  提交时间:2009/09/18