机构

• 上海光学精密机械研... [25]

采集方式

• OAI收割 [25]

内容类型

• 期刊论文 [20]
• 会议论文 [5]

发表日期

• 2016 [6]
• 2015 [4]
• 2014 [9]
• 2013 [2]
• 2012 [4]

学科主题

筛选

浏览/检索结果: 共25条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image 期刊论文  OAI收割 Appl. Optics, 2016, 卷号: 55, 期号: 12, 页码: 3192 作者:  Zhu, Boer;  Wang, Xiangzhao;  Li, Sikun;  Yan, Guanyong;  Shen, Lina 收藏  |  浏览/下载：25/0  |  提交时间：2017/12/25 Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image 期刊论文  OAI收割 Appl. Optics, 2016, 卷号: 55, 期号: 12, 页码: 3192 作者:  Zhu, Boer;  Wang, Xiangzhao;  Li, Sikun;  Yan, Guanyong;  Shen, Lina 收藏  |  浏览/下载：26/0  |  提交时间：2017/12/25 General analytical expressions for the impact of polarization aberration on lithographic imaging under linearly polarized illumination 期刊论文  OAI收割 J. Opt. Soc. Am. A-Opt. Image Sci. Vis., 2016, 卷号: 33, 期号: 6, 页码: 1112 作者:  Zhu, Boer;  Shen, Lina;  Wang, Xiangzhao;  Li, Sikun;  Yan, Guanyong 收藏  |  浏览/下载：14/0  |  提交时间：2017/12/25 Pixelated source optimization for optical lithography via particle swarm optimization 期刊论文  OAI收割 J. Micro-Nanolithogr. MEMS MOEMS, 2016, 卷号: 15, 期号: 1 作者:  Wang, Lei;  Li, Sikun;  Wang, Xiangzhao;  Yan, Guanyong;  Yang, Chaoxing 收藏  |  浏览/下载：15/0  |  提交时间：2017/12/25 Pixelated source optimization for optical lithography via particle swarm optimization 期刊论文  OAI收割 J. Micro-Nanolithogr. MEMS MOEMS, 2016, 卷号: 15, 期号: 1 作者:  Li, Sikun;  Yang, Chaoxing;  Wang, Lei;  Yan, Guanyong;  Wang, Xiangzhao 收藏  |  浏览/下载：24/0  |  提交时间：2017/12/25 General analytical expressions for the impact of polarization aberration on lithographic imaging under linearly polarized illumination 期刊论文  OAI收割 J. Opt. Soc. Am. A-Opt. Image Sci. Vis., 2016, 卷号: 33, 期号: 6, 页码: 1112 作者:  Zhang, Heng;  Shen, Lina;  Wang, Xiangzhao;  Li, Sikun;  Yan, Guanyong 收藏  |  浏览/下载：24/0  |  提交时间：2017/12/25 Analytical analysis of the impact of polarization aberration of projection lens on lithographic imaging 期刊论文  OAI收割 j. micro-nanolithogr. mems moems, 2015, 卷号: 14, 期号: 4, 页码: 43504 作者:  Shen, Lina;  Li, Sikun;  Wang, Xiangzhao;  Yan, Guanyong 收藏  |  浏览/下载：21/0  |  提交时间：2016/11/28 Analytical analysis for impact of polarization aberration of projection lens on lithographic imaging quality 会议论文  OAI收割 conference on optical microlithography xxviii 作者:  Shen, Lina;  Li, Sikun;  Wang, Xiangzhao;  Yan, Guanyong 收藏  |  浏览/下载：19/0  |  提交时间：2016/11/28 In situ aberration measurement method using a phase-shift ring mask 期刊论文  OAI收割 j. micro-nanolithogr. mems moems, 2015, 卷号: 14, 期号: 1, 页码: 11005 作者:  Li, Sikun;  Wang, Xiangzhao;  Yang, Jishuo;  Duan, Lifeng;  Tang, Feng 收藏  |  浏览/下载：16/0  |  提交时间：2016/11/28 Source Optimization using Particle Swarm Optimization Algorithm in Photolithography 会议论文  OAI收割 conference on optical microlithography xxviii 作者:  Wang, Lei;  Li, Sikun;  Wang, Xiangzhao;  Yan, Guanyong;  Yang, Chaoxing 收藏  |  浏览/下载：20/0  |  提交时间：2016/11/28