机构

• 上海光学精密机械研... [12]

采集方式

• OAI收割 [12]

内容类型

• 期刊论文 [10]
• 会议论文 [2]

发表日期

• 2015 [1]
• 2014 [6]
• 2013 [3]
• 2012 [2]

学科主题

筛选

浏览/检索结果: 共12条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序作者升序作者降序题名升序题名降序发表日期升序发表日期降序 In situ aberration measurement method using a phase-shift ring mask 期刊论文  OAI收割 j. micro-nanolithogr. mems moems, 2015, 卷号: 14, 期号: 1, 页码: 11005 作者:  Li, Sikun;  Wang, Xiangzhao;  Yang, Jishuo;  Duan, Lifeng;  Tang, Feng 收藏  |  浏览/下载：23/0  |  提交时间：2016/11/28 Aberration measurement based on principal component analysis of aerial images of optimized marks 期刊论文  OAI收割 opt. commun., 2014, 卷号: 329, 页码: 63 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：30/0  |  提交时间：2016/11/28 Aberration measurement  Principal component analysis  Optimized marks  Aerial image   Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文  OAI收割 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：41/0  |  提交时间：2016/11/28 NIJBOER-ZERNIKE APPROACH  POINT-SPREAD FUNCTIONS  PHASE-SHIFTING MASK  LITHOGRAPHIC TOOLS  PROJECTION OPTICS  COMA MEASUREMENT  ILLUMINATION  COMPUTATION   In situ aberration measurement method using a phase-shift ring mask 会议论文  OAI收割 27th optical microlithography conference as part of the spie advanced lithography symposium 作者:  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Tang, Feng;  Yan, Guanyong 收藏  |  浏览/下载：26/0  |  提交时间：2016/11/28 Aberration measurement based on principal component analysis of aerial images of optimized marks 期刊论文  OAI收割 opt. commun., 2014, 卷号: 329, 页码: 63 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：33/0  |  提交时间：2016/11/28 Aberration measurement  Principal component analysis  Optimized marks  Aerial image   A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask 会议论文  OAI收割 27th optical microlithography conference as part of the spie advanced lithography symposium 作者:  Li, Sikun;  Wang, Xiangzhao;  Yang, Jishuo;  Tang, Feng;  Yan, Guanyong 收藏  |  浏览/下载：31/0  |  提交时间：2016/11/28 Aberration measurement technique based on an analytical linear model of a through-focus aerial image 期刊论文  OAI收割 opt. express, 2014, 卷号: 22, 期号: 5, 页码: 5623 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：29/0  |  提交时间：2016/11/28 NIJBOER-ZERNIKE APPROACH  POINT-SPREAD FUNCTIONS  PHASE-SHIFTING MASK  LITHOGRAPHIC TOOLS  PROJECTION OPTICS  COMA MEASUREMENT  ILLUMINATION  COMPUTATION   Adaptive denoising method to improve aberration measurement performance 期刊论文  OAI收割 opt. commun., 2013, 卷号: 308, 页码: 228 作者:  Yang, Jishuo;  Wang, Xiangzhao;  Li, Sikun;  Duan, Lifeng;  Bourov, Anatoly Y. 收藏  |  浏览/下载：26/0  |  提交时间：2016/11/28 In situ aberration measurement technique based on an aerial image with an optimized source 期刊论文  OAI收割 opt. eng., 2013, 卷号: 52, 期号: 6, 页码: 63602 作者:  Yan, Guanyong;  Wang, Xiangzhao;  Li, Sikun;  Yang, Jishuo;  Xu, Dongbo 收藏  |  浏览/下载：24/0  |  提交时间：2016/11/28 High-order aberration measurement technique based on a quadratic Zernike model with optimized source 期刊论文  OAI收割 opt. eng., 2013, 卷号: 52, 期号: 5, 页码: 53603 作者:  Yang, Jishuo;  Wang, Xiangzhao;  Li, Sikun;  Duan, Lifeng;  Yan, Guanyong 收藏  |  浏览/下载：22/0  |  提交时间：2016/11/28