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Monte-Carlo simulation of ion distributions in a gas cell for multinucleon transfer reaction products at LENSHIAF spectrometer 期刊论文  OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2020, 卷号: 463, 页码: 528-532
作者:  
Wang, Yong-Sheng;  Huang, Wen-Xue;  Tian, Yu -Lin;  Wang, Jun-Ying;  Li, Cheng
  |  收藏  |  浏览/下载:22/0  |  提交时间:2022/01/18
An in situ system for simultaneous stress measurement and optical observation of silicon thin film electrodes 期刊论文  OAI收割
JOURNAL OF POWER SOURCES, 2019, 卷号: 444, 页码: 5
作者:  
Chen J;  Yang L;  Han Y;  Bao YH;  Zhang KL
  |  收藏  |  浏览/下载:104/0  |  提交时间:2020/03/11
A high-throughput screening method for breeding Aspergillus niger with C-12(6+) ion beam-improved cellulase 期刊论文  OAI收割
NUCLEAR SCIENCE AND TECHNIQUES, 2017, 卷号: 28, 页码: 7
作者:  
Liu, Jing;  Li, Wen-Jian;  Chen, Ji-Hong;  Xiao, Guo-Qing;  Wang, Shu-Yang
  |  收藏  |  浏览/下载:21/0  |  提交时间:2017/04/13
Interfacial Residual Stress Analysis of Thermal Spray Coatings by Miniature Ring-Core Cutting Combined with DIC Method 期刊论文  OAI收割
EXPERIMENTAL MECHANICS, 2014, 卷号: 54, 期号: 2, 页码: 127
Zhu, JG; Xie, HM; Li, YJ; Hu, ZX; Luo, Q; Gu, CZ
收藏  |  浏览/下载:23/0  |  提交时间:2015/04/14
Fabrication of high-efficiency ultraviolet blazed gratings by use of direct Ar2-CHF3 ion-beam etching through a rectangular photoresist mask (EI CONFERENCE) 会议论文  OAI收割
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, May 24, 2011 - May 26, 2011, Beijing, China
Tan X.
收藏  |  浏览/下载:25/0  |  提交时间:2013/03/25
In ultraviolet spectroscopy  groove irregularity and surface roughness of nanometer magnitude can cause a significant loss of diffraction efficiency. Therefore  there is a constant need to improve the diffraction efficiency. A blazed grating can concentrate most of the light intensity into a desired diffraction order  it is important to control the groove shape precisely  so it is the optimum choice among gratings of different kinds of profile. As the operating wavelength of most UV spectral applications is less than 200 nm  especially the blaze angle and the apical angle. We have presented a direct shaping method to fabricate EUV blazed gratings by using an ion-beam mixture of Ar+ and CHF2 +to etch K9 glass with a rectangular photoresist mask. With this method  the required blaze angle is small  we have succeeded in fabricating well-shaped UV blazed gratings with a 1200 line/mm groove density and 8.54 blaze angles and 1200 line/mm groove density and 11.68 blaze angles  and the metrical efficiency is about 81% and 78%. The good performance of the gratings was verified by diffraction efficiency measurements. When one uses the etching model  the conditions on the ion-beam grazing incident angle and the CHF3partial pressure should be noted. Besides  since the etched groove shape depends on the aspect ratio of the photoresist mask ridge  if we wish to fabricate larger gratings with this method  we must improve the uniformity of the photoresist mask before ion-beam etching. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).  
Surface modification of SiC mirror by IARE method (EI CONFERENCE) 会议论文  OAI收割
7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China
作者:  
Gao J.
收藏  |  浏览/下载:26/0  |  提交时间:2013/03/25
A method to prepare high quality SiC coating at low temperature using large aperture E-beam evaporation PVD equipment with ion assistance was developed for the surface modification of SiC mirror for space projects. This method was called Ion Assisted Reactive Evaporation (IARE). The modified SiC coating was prepared using CH4 and Si with Kaufman ion source by IARE at 300C and it had met the requirements of applications. The SiC coating prepared by this method was amorphous. It was dense  homogeneous and easy to be polished. The surface modification of a SiC mirror was carried out using SiC coating by this method and achieved a fine surface modification effect. The surface roughness (rms) of the SiC substrate was reduced to 0.862nm  the scattering coefficient was reduced to 2.79% and the reflectance coated with Ag film was improved simultaneously after the surface modification. The effect of surface modification using SiC coating was close to that of using Si coating. It can be drawn that this technological method to preparation SiC coating for the surface modification of SiC mirror is reasonable and effective. 2011 SPIE.  
Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文  OAI收割
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
作者:  
Liu L.;  Yang H.;  Liu L.
收藏  |  浏览/下载:21/0  |  提交时间:2013/03/25
We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First  we obtained the structure information (the layer thickness  surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second  based on the acquired structure information  the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally  the optical band gap is verified by Taue plot method  which is well consistent with that of SE.  
Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE) 会议论文  OAI收割
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
作者:  
Yang H.;  Liu L.;  Liu L.
收藏  |  浏览/下载:28/0  |  提交时间:2013/03/25
Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First  Second  Third  alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method  Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra  based on the acquired structure information  the structure information (the thickness of the aluminum and the cap layer  the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally  surface roughness and the diffusion between Al-Al2O 3) is obtained  an induced transmission filter (ITF) is designed and deposited.  
Chalcogenide random access memory cell with structure of W sub-microtube heater electrode 期刊论文  OAI收割
CHINESE PHYSICS LETTERS, 2007, 卷号: 24, 期号: 1, 页码: 262-264
Bo, L; Feng, GM; Wu, LC; Song, ZT; Liu, QB; Feng, SL; Bomy, C
收藏  |  浏览/下载:20/0  |  提交时间:2012/03/24
Damascene array structure of phase change memory fabricated with chemical mechanical polishing method 期刊论文  OAI收割
CHINESE PHYSICS LETTERS, 2006, 卷号: 23, 期号: 8, 页码: 2296-2298
Liu, QB; Song, ZT; Zhang, KL; Wang, LY; Feng, SL; Chen, BM
收藏  |  浏览/下载:11/0  |  提交时间:2012/03/24