机构

• 光电技术研究所 [6]
• 上海应用物理研究所 [4]
• 物理研究所 [2]
• 上海光学精密机械研究... [2]
• 长春光学精密机械与物... [1]
• 微电子研究所 [1]
• 更多

采集方式

• OAI收割 [18]

内容类型

• 期刊论文 [17]
• 外文期刊 [1]

发表日期

• 2021 [1]
• 2019 [4]
• 2017 [1]
• 2016 [1]
• 2014 [3]
• 2013 [1]
• 更多

学科主题

• 光电子学 [1]

筛选

浏览/检索结果: 共18条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography 期刊论文  OAI收割 COATINGS, 2021, 卷号: 11, 期号: 1, 页码: 7 作者:  Jia, Tianxu;  Wang, Xiangxian;  Ren, Yaqian;  Su, Yingwen;  Zhang, Liping   |  收藏  |  浏览/下载：59/0  |  提交时间：2021/12/10 laser interference lithography  microstructure  incidence angle   Plasmonic Interference Lithography for Low-Cost Fabrication of Dense Lines with Sub-50 nm Half-Pitch 期刊论文  OAI收割 ACS Applied Nano Materials, 2019, 卷号: 2, 期号: 1, 页码: 489-496 作者:  Kong, Weijie;  Luo, Yunfei;  Zhao, Chengwei;  Liu, Ling;  Gao, Ping   |  收藏  |  浏览/下载：31/0  |  提交时间：2021/05/06 interference lithography  surface plasmonic  optical waveguide  near-field  diffraction limit  super resolution  nanomanufacturing  subwavelength optics   Parallel direct writing achromatic talbot lithography: a method for large-area arbitrary sub-micron periodic nano-arrays fabrication 期刊论文  OAI收割 NANOTECHNOLOGY, 2019, 卷号: 30, 期号: 31, 页码: — 作者:  Yang, SM;  Xue, CF;  Zhao, J;  Wang, LS;  Wu, YQ   |  收藏  |  浏览/下载：42/0  |  提交时间：2019/12/30 BEAM INTERFERENCE LITHOGRAPHY  RESOLUTION  METAMATERIALS  METASURFACE  RESONANCES  SPLITTER  LIGHT  ANGLE   Nonuniform self-imaging of achromatic Talbot lithography 期刊论文  OAI收割 CHINESE OPTICS LETTERS, 2019, 卷号: 17, 期号: 6, 页码: - 作者:  Xia, HJ;  Yang, SM;  Wang, LS;  Zhao, J;  Xue, CF   |  收藏  |  浏览/下载：11/0  |  提交时间：2020/10/16 INTERFEROMETRIC LITHOGRAPHY  INTERFERENCE   Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography 期刊论文  OAI收割 Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355 作者:  Y.Song;  Bayanheshig;  S.Li;  S.Jiang;  W.Wang   |  收藏  |  浏览/下载：29/0  |  提交时间：2020/08/24 Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics   Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography 期刊论文  OAI收割 MICROELECTRONIC ENGINEERING, 2017, 卷号: 170, 页码: 49-53 作者:  Zhao, J;  Wu, YQ;  Xue, CF;  Yang, SM;  Wang, LS   |  收藏  |  浏览/下载：30/0  |  提交时间：2017/12/08 Periodic Structures  Scintillator  Soft X-ray Interference Lithography  High Aspect Ratio   Patterning of nanodot-arrays using EUV achromatic Talbot lithography at the Swiss Light Source and Shanghai Synchrotron Radiation Facility 期刊论文  OAI收割 MICROELECTRONIC ENGINEERING, 2016, 卷号: 155, 页码: 55-60 作者:  Fan, D;  Buitrago, E;  Yang, SM;  Karim, W;  Wu, YQ 收藏  |  浏览/下载：16/0  |  提交时间：2017/03/02 EUV  Interference lithography  High resolution  Nano-lithography  Achromatic Talbot lithography   Fabrication of 2-inch nano patterned sapphire substrate with high uniformity by two-beam laser interference lithography 期刊论文  OAI收割 NANOPHOTONICS AND MICRO/NANO OPTICS II, 2014, 卷号: 9277 Dai, LG; Yang, F; Yue, G; Jiang, Y; Jia, HQ; Wang, WX; Chen, H 收藏  |  浏览/下载：38/0  |  提交时间：2015/04/14 Laser interference lithography  nano-scale patterned sapphire substrate  large area  high uniformity   Parallel laser writing system with scanning Dammann lithography 期刊论文  OAI收割 chin. opt. lett., 2014, 卷号: 12, 期号: 8, 页码: 80501 作者:  Zhu, Feng;  Ma, Jianyong;  Huang, Wei;  Wang, Jin;  Zhou, Changhe 收藏  |  浏览/下载：21/0  |  提交时间：2016/11/28 BEAM INTERFERENCE LITHOGRAPHY  FABRICATION   Parallel laser writing system with scanning Dammann lithography 期刊论文  OAI收割 chin. opt. lett., 2014, 卷号: 12, 期号: 8, 页码: 80501 作者:  Zhu, Feng;  Ma, Jianyong;  Huang, Wei;  Wang, Jin;  Zhou, Changhe 收藏  |  浏览/下载：17/0  |  提交时间：2016/11/28 BEAM INTERFERENCE LITHOGRAPHY  FABRICATION