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Chinese Academy of Sciences Institutional Repositories Grid
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Lattice Defects and Exfoliation Efficiency of 6H-SiC via H-2(+) Implantation at Elevated Temperature
期刊论文
OAI收割
MATERIALS, 2020, 卷号: 13, 期号: 24
作者:
Wang, Tao
;
Yang, Zhen
;
Li, Bingsheng
;
Xu, Shuai
;
Liao, Qing
  |  
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2021/12/01
SILICON-CARBIDE
ON-INSULATOR
HYDROGEN IMPLANTATION
SURFACE EXFOLIATION
BUBBLE FORMATION
ION-CUT
IRRADIATION
HELIUM
WAFERS
H+
Anomalous electrical properties induced by hot-electron-injection in 130-nm partially depleted soi nmosfets fabricated on modified wafer
期刊论文
iSwitch采集
Ieee transactions on nuclear science, 2016, 卷号: 63, 期号: 5, 页码: 2731-2737
作者:
Dai, Lihua
;
Bi, Dawei
;
Ning, Bingxu
;
Hu, Zhiyuan
;
Song, Lei
收藏
  |  
浏览/下载:63/0
  |  
提交时间:2019/05/09
Buried oxide
Interface trap
Silicon ion implantation
Soi nmosfets
Total dose radiation
Photocarrier Radiometry Characterization of Ultra-shallow Junctions (USJ) in Silicon with Excimer Laser Irradiation
期刊论文
OAI收割
INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2015, 卷号: 36, 期号: 5-6, 页码: 1173-1180
作者:
Wang, Qian
;
Li, Bincheng
;
Ren, Shengdong
;
Wang, Qiang
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2015/09/21
Ion implantation
Laser irradiation
Photocarrier radiometry
Silicon
Ultra-shallow junction
Low frequency noise and radiation response in the partially depleted SOI MOSFETs with ion implanted buried oxide
期刊论文
OAI收割
CHINESE PHYSICS B, 2015, 卷号: 24, 期号: 8, 页码: 1-6
作者:
Liu, Y (Liu Yuan)
;
Chen, HB (Chen Hai-Bo)
;
Liu, YR (Liu Yu-Rong)
;
Wang, X (Wang Xin)
;
En, YF (En Yun-Fei)
  |  
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2018/01/25
SilicOn On Insulator
Ion implantatIon
Ionizing Radiation
Low Frequency Noise
Evolution of amorphization and nanohardness in SiC under Xe ion irradiation
期刊论文
OAI收割
JOURNAL OF NUCLEAR MATERIALS, 2014, 卷号: 454, 期号: 42007, 页码: 173—177
Li, JJ
;
Huang, HF
;
Lei, GH
;
Huang, Q
;
Liu, RD
;
Li, DH
;
Yan, L
收藏
  |  
浏览/下载:168/0
  |  
提交时间:2015/03/13
SILICON-CARBIDE
MECHANICAL-PROPERTIES
NEUTRON-IRRADIATION
RAMAN-SPECTROSCOPY
HEAVY-ION
DAMAGE
BEAM
INDENTATION
IMPLANTATION
TEMPERATURE
Characterization of Silicon Wafers with Combined Photocarrier Radiometry and Free Carrier Absorption
期刊论文
OAI收割
INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2013, 卷号: 34, 期号: 8-9, 页码: 1735-1745
作者:
Li, Bincheng
;
Huang, Qiuping
;
Ren, Shengdong
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2015/04/17
Electronic transport properties
Free carrier absorption
Ion implantation
Photocarrier radiometry
Silicon
Thermal annealing
Combined frequency- and time-domain photocarrier radiometry characterization of ion-implanted and thermally annealed silicon wafers
期刊论文
OAI收割
CHINESE PHYSICS B, 2013, 卷号: 22, 期号: 5
作者:
Ren Sheng-Dong
;
Li Bin-Cheng
;
Gao Li-Feng
;
Wang Qian
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2015/04/17
photocarrier radiometry
ion implantation
effective lifetime
silicon
Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content
期刊论文
OAI收割
Surface & Coatings Technology, 2013, 卷号: 235, 页码: 326-332
作者:
Wang JJ(王军军)
;
Pu JB(蒲吉斌)
;
Zhang GA(张广安)
;
Wang LP(王立平)
;
Wang LP(王立平)
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2013/12/03
Silicon-doped diamond-like carbon film
Hollow cathode plasma immersion ion implantation method
Tribological property
Mechanical property
Characterization of Arsenic Ultra-Shallow Junctions in Silicon Using Photocarrier Radiometry and Spectroscopic Ellipsometry
期刊论文
OAI收割
INTERNATIONAL JOURNAL OF THERMOPHYSICS, 2012, 卷号: 33, 期号: 10-11, 页码: 2082-2088
作者:
Huang, Qiuping
;
Li, Bincheng
;
Gao, Weidong
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2015/07/10
Ion implantation
Photocarrier radiometry
Silicon
Spectroscopic ellipsometry
Ultra-shallow junction
Transportation of carriers in silicon implanted SiO2 films during ionizing radiation
期刊论文
OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 卷号: 272, 页码: 266-270
Chen, M
;
Zhang, ZX
;
Wei, X
;
Bi, DW
;
Zou, SC
;
Wang, X
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2013/04/17
Silicon dioxide
Ion implantation
Total ionizing dose
Carrier transportation