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Chinese Academy of Sciences Institutional Repositories Grid
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金属研究所 [17]
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兰州化学物理研究所 [3]
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期刊论文 [31]
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The interfacial reaction and microstructure of Co/In/Cu sputtering target assembly after soldering
期刊论文
OAI收割
MICROELECTRONICS RELIABILITY, 2020, 卷号: 113, 页码: 6
作者:
Liu, Zhi-Quan
;
Meng, Zhi-Chao
;
Wu, Di
;
Shang, Zhengang
;
He, Xin
  |  
收藏
  |  
浏览/下载:48/0
  |  
提交时间:2021/02/02
Co sputtering target
Soldering assembly
Interface
IMC
Growth mechanism
The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering
期刊论文
OAI收割
Diamond & Related Materials, 2020, 期号: 109, 页码: 108018
作者:
Pei LL(裴露露)
;
Ju PF(鞠鹏飞)
;
Ji L(吉利)
;
Li HX(李红轩)
;
Liu XH(刘晓红)
  |  
收藏
  |  
浏览/下载:41/0
  |  
提交时间:2020/12/03
Methane
Target poisoning
Fullerene-like nanostructure
Hydrogenated carbon films
Reactive magnetron sputtering
Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets
期刊论文
OAI收割
CERAMICS INTERNATIONAL, 2018, 卷号: 44, 期号: 14, 页码: 17530-17534
作者:
Li, YM
;
Zhao, GR
;
Qi, H
;
Li, MS
;
Zheng, YF
  |  
收藏
  |  
浏览/下载:43/0
  |  
提交时间:2018/12/25
Cost-efficient target
Ti(2)AIN coating
Magnetron sputtering
Annealing
Crystallization
Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets
期刊论文
OAI收割
CERAMICS INTERNATIONAL, 2018, 卷号: 44, 期号: 14, 页码: 17530-17534
作者:
Li, Yueming
;
Zhao, Guorui
;
Qi, Hong
;
Li, Meishuan
;
Zheng, Yufeng
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2021/02/02
Cost-efficient target
Ti(2)AIN coating
Magnetron sputtering
Annealing
Crystallization
Preparation of single-phase Ti2AlN coating by magnetron sputtering with cost-efficient hot-pressed Ti-Al-N targets
期刊论文
OAI收割
CERAMICS INTERNATIONAL, 2018, 卷号: 44, 期号: 14, 页码: 17530-17534
作者:
Li, Yueming
;
Zhao, Guorui
;
Qi, Hong
;
Li, Meishuan
;
Zheng, Yufeng
  |  
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2021/02/02
Cost-efficient target
Ti(2)AIN coating
Magnetron sputtering
Annealing
Crystallization
Deposition and characterization of phase-pure Ti2AlC and Ti3AlC2 coatings by DC magnetron sputtering with cost-effective targets
期刊论文
OAI收割
VACUUM, 2018, 卷号: 153, 页码: 62-69
作者:
Li, YM
;
Zhao, GR
;
Qian, YH
;
Xu, JJ
;
Li, MS
  |  
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2018/12/25
Ti2AlC coating
Ti3AlC2 coating
Magnetron sputtering
Cost-effective target
Annealing
Characteristics of the Structure and Properties of ZnSnO3 Films by Varying the Magnetron Sputtering Parameters
期刊论文
OAI收割
ACTA METALLURGICA SINICA-ENGLISH LETTERS, 2016, 卷号: 29, 期号: 9, 页码: 827-833
作者:
Wu FaYu
;
Li JianWei
;
Qi Yi
;
Ding WuTong
;
Guo YuanYuan
  |  
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2021/02/02
CONDUCTIVE OXIDE-FILMS
THIN-FILMS
TRANSPARENT
ZnSnO3 film
Powder target
Magnetron sputtering
Optical property
Electrical property
磁控溅射沉积BCx薄膜的摩擦学性能
期刊论文
OAI收割
中国表面工程, 2015, 卷号: 28, 期号: 5, 页码: 16-23
作者:
尚伦霖
;
王立平
;
张广安
;
蒲吉斌
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2015/11/12
BCx薄膜
磁控溅射
靶电流
摩擦学性能
BCx films
magnetron sputtering
target current
tribological properties
Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature
期刊论文
OAI收割
THIN SOLID FILMS, 2014, 卷号: 556, 页码: 155-159
作者:
Xiao, Y
;
Gao, FY
;
Dong, GB
;
Guo, TT
;
Liu, QR
收藏
  |  
浏览/下载:59/0
  |  
提交时间:2016/04/08
Indium tin oxide
Facing target sputtering
Transparent conductors
Polyethylene terephthalate
Comparative studies on damages to organic layer during the deposition of ITO films by various sputtering methods
期刊论文
OAI收割
Applied Surface Science, 2013, 卷号: 285, 页码: 389-394
H. Lei
;
M. H. Wang
;
Y. Hoshi
;
T. Uchida
;
S. Kobayashi
;
Y. Sawada
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2013/12/24
Damage to organic layer
Magnetron sputtering (MS)
Low voltage
sputtering (LVS)
Kinetic-energy-control-deposition (KECD)
Facing
target sputtering (FTS)
PL spectra
thin-films
tris-(8-hydroxyquinoline) aluminum
bombardment