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CAS IR Grid
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合肥物质科学研究院 [10]
上海微系统与信息技术... [1]
半导体研究所 [1]
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OAI收割 [12]
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期刊论文 [12]
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Annealing-induced evolution in interface stability and electrical performance of sputtering-driven rare-earth-based gate oxides
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 卷号: 778, 期号: 无, 页码: 579-587
作者:
Wang, Die
;
He, Gang
;
Liang, Shuang
;
Liu, Mao
  |  
收藏
  |  
浏览/下载:69/0
  |  
提交时间:2020/03/31
Dy2O3 gate dielectrics
High-k
Annealing temperature
Optical properties
Electrical characteristics
Interface Modulation and Optimization of Electrical Properties of HfGdO/GaAs Gate Stacks by ALD-Derived Al2O3 Passivation Layer and Forming Gas Annealing
期刊论文
OAI收割
ADVANCED ELECTRONIC MATERIALS, 2018, 卷号: 4, 期号: 4, 页码: 9
作者:
Jiang, Shanshan
;
He, Gang
;
Liu, Mao
;
Zhu, Li
;
Liang, Shuang
  |  
收藏
  |  
浏览/下载:70/0
  |  
提交时间:2019/06/10
electrical properties
forming gas annealing
high-k gate dielectrics
interface chemistry
metal-oxide-semiconductor capacitors
Modulation of interfacial and electrical properties of HfGdO/GaAs gate stacks by ammonium sulfide passivation and rapid thermal annealing
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 卷号: 704, 期号: 无, 页码: 322-328
作者:
Jiang, S. S.
;
He, G.
;
Liang, S.
;
Zhu, L.
;
Li, W. D.
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2018/07/04
High-k Gate Dielectrics
Interface Chemistry
Xps Electrical Properties
Cmos Devices
Interfacial modulation and electrical properties improvement of solution-processed ZrO2 gate dielectrics upon Gd incorporation
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 卷号: 699, 期号: 无, 页码: 415-420
作者:
Xiao, D. Q.
;
He, G.
;
Lv, J. G.
;
Wang, P. H.
;
Liu, M.
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2018/07/04
High-k Gate Dielectrics
Gd Incorporation
Xps
Electrical Properties
Sol-gel
Interface quality modulation, band alignment modification and optimization of electrical properties of HfGdO/Ge gate stacks by nitrogen incorporation
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 卷号: 695, 期号: 无, 页码: 2199-2206
作者:
Gao, J.
;
He, G.
;
Fang, Z. B.
;
Lv, J. G.
;
Liu, M.
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2018/07/04
High-k Gate Dielectrics
Interface Quality
Band Alignment
Electrical Properties
Leakage Current Mechanism
Annealing-temperature-modulated optical, electrical properties, and leakage current transport mechanism of sol-gel-processed high-k HfAlOX gate dielectrics
期刊论文
OAI收割
CERAMICS INTERNATIONAL, 2017, 卷号: 43, 期号: 3, 页码: 3101-3106
作者:
Jin, P.
;
He, G.
;
Fang, Z. B.
;
Liu, M.
;
Xiao, D. Q.
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2018/07/04
High-k Hfalox Gate Dielectrics
Sol-gel
Optical Properties
Electrical Properties
Leakage Current Transport Mechanism
Baking-temperature-modulated optical and electrical properties of HfTiOx gate dielectrics via sol-gel method
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 卷号: 688, 期号: 无, 页码: 925-932
作者:
Jin, P.
;
He, G.
;
Wang, P. H.
;
Liu, M.
;
Xiao, D. Q.
收藏
  |  
浏览/下载:65/0
  |  
提交时间:2017/09/11
High-k Gate Dielectrics
Hftiox Thin Films
Sol-gel Processing
Optical Properties
Electrical Properties
Modification of optical and electrical properties of sol-gel-derived TiO2-doped ZrO2 gate dielectrics by annealing temperature
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 卷号: 688, 期号: 无, 页码: 252-259
作者:
Xiao, D. Q.
;
He, G.
;
Liu, M.
;
Gao, J.
;
Jin, P.
收藏
  |  
浏览/下载:47/0
  |  
提交时间:2017/10/18
High-k Gate Dielectrics
Optical Constant
Electrical Properties
Ti incorporaTion
Sol-gel
Conduction Mechanisms
Microstructure, optical and electrical properties of sputtered HfFiO high-k gate dielectric thin films
期刊论文
OAI收割
CERAMICS INTERNATIONAL, 2016, 卷号: 42, 期号: 10, 页码: 11640-11649
作者:
Jiang, S. S.
;
He, G.
;
Gao, J.
;
Xiao, D. Q.
;
Jin, P.
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2017/10/18
Electrical Properties
High-k Gate Dielectrics
Metal-oxide-semiconductor
Conduction Mechanisms
Sputtering
Microstructure, optical, electrical properties, and leakage current transport mechanism of sol-gel-processed high-k HfO2 gate dielectrics
期刊论文
OAI收割
CERAMICS INTERNATIONAL, 2016, 卷号: 42, 期号: 6, 页码: 6761-6769
作者:
Jin, Peng
;
He, Gang
;
Xiao, Dongqi
;
Gao, Juan
;
Liu, Mao
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2017/10/18
High-k Gate Dielectrics
Sol-gel
Electrical Properties
Leakage Current Transport Mechanism
Optical Properties